[go: up one dir, main page]

Woltjer et al., 2016 - Google Patents

Optimization of piezo-MEMS layout for a bladder monitor

Woltjer et al., 2016

View PDF
Document ID
608039222596948052
Author
Woltjer R
Suijlen M
Srinivasa P
Banerjee N
Koning J
Rijnders G
Publication year
Publication venue
2016 IEEE international ultrasonics symposium (IUS)

External Links

Snippet

MEMS technology has never been used for a non-imaging wearable ultrasound application, where eg lateral resolution is a minor issue. We combine finite element modeling and thin- plate analytic modeling and some measurements on MEMS devices, to optimize the …
Continue reading at research.utwente.nl (PDF) (other versions)

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezo-electric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezo-electric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezo-electric effect or with electrostriction using multiple elements on one surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezo-electric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezo-electric effect or with electrostriction using a single piezo-electric element
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting, or directing sound
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type

Similar Documents

Publication Publication Date Title
Lu et al. Modeling, fabrication, and characterization of piezoelectric micromachined ultrasonic transducer arrays based on cavity SOI wafers
Akasheh et al. Piezoelectric micromachined ultrasonic transducers: Modeling the influence of structural parameters on device performance
Akhbari et al. Highly responsive curved aluminum nitride pMUT
JP5961246B2 (en) Ultrasonic CMUT with suppressed acoustic coupling to the substrate
Guedes et al. Aluminum nitride pMUT based on a flexurally-suspended membrane
US11800806B2 (en) Method for manufacturing a multi-cell transducer
US20130278111A1 (en) Piezoelectric micromachined ultrasound transducer with patterned electrodes
US20090085441A1 (en) Piezoelectric transducers and associated methods
Perçin et al. Piezoelectrically actuated flextensional micromachined ultrasound transducers. I. Theory
Eovino et al. Broadband ring-shaped PMUTS based on an acoustically induced resonance
Sammoura et al. A two-port piezoelectric micromachined ultrasonic transducer
Sammoura et al. An accurate equivalent circuit for the clamped circular multiple-electrode PMUT with residual stress
CN112718437B (en) Piezoelectric micromechanical ultrasonic transducer based on multi-diaphragm coupling
CN115432662B (en) Micromachined ultrasonic transducer with centrally supported bottom electrode
Goldberg et al. Modeling of piezoelectric multilayer ceramics using finite element analysis
CN110560352A (en) Frequency-adjustable ultrasonic sensor array based on Helmholtz resonant cavity
Pala et al. Piezoelectric micromachined ultrasonic transducers (pMUT) with free boundary
Luo et al. High fill factor piezoelectric micromachined ultrasonic transducers on transparent substrates
Woltjer et al. Optimization of piezo-MEMS layout for a bladder monitor
Wang et al. Multi-frequency broadband piezoelectric micromachined ultrasonic transducer utilizing Helmholtz resonance
Roy et al. Towards the development of backing layer for piezoelectric micromachined ultrasound transducers
Akhbari et al. An equivalent circuit model for curved piezoelectric micromachined ultrasonic transducers with spherical-shape diaphragms
Sammoura et al. Enhanced coupling of piezoelectric micromachined ultrasonic transducers with initial static deflection
Wang et al. Design of piezoelectric micromachined ultrasonic transducers (pMUTs) for high pressure output
JP2012175507A (en) Ultrasonic vibrator