Demirci, 2006 - Google Patents
Acoustic picoliter droplets for emerging applications in semiconductor industry and biotechnologyDemirci, 2006
- Document ID
- 5722241486502773386
- Author
- Demirci U
- Publication year
- Publication venue
- Journal of Microelectromechanical Systems
External Links
Snippet
This paper presents the theory of operation, fabrication, and experimental results obtained with a new acoustically actuated two-dimensional (2-D) micromachined microdroplet ejector array. Direct droplet based deposition of chemicals used in IC manufacturing such as …
- 239000004065 semiconductor 0 title description 8
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