[go: up one dir, main page]

Shankar et al., 2014 - Google Patents

Influence of Al concentration on structural and optical properties of Aluminum doped zinc oxide thin films prepared by sol gel spin coating method

Shankar et al., 2014

View PDF
Document ID
5629282068174684736
Author
Shankar S
Saroja M
Venkatachalam M
Balachander M
Kumar V
Publication year
Publication venue
J Nano Sci Nano Technol

External Links

Snippet

Al doped ZnO thin film can be employed as the transparent conducting oxide (TCO) in solar cell application, due to its advantage of low cost, high productivity, and excellent electrical conductivity. Multilayer Aluminum doped Zinc oxide (AZO) thin films have been prepared on …
Continue reading at www.researchgate.net (PDF) (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02551—Group 12/16 materials
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02623—Liquid deposition
    • H01L21/02628—Liquid deposition using solutions
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GASES [GHG] EMISSION, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/54—Material technologies
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides

Similar Documents

Publication Publication Date Title
Xu et al. Structural and optical properties of ZnO thin films prepared by sol–gel method with different thickness
Yilmaz Investigation of characteristics of ZnO: Ga nanocrystalline thin films with varying dopant content
Tari et al. Sol–gel synthesis of ZnO transparent and conductive films: A critical approach
Shirahata et al. Transparent conductive zinc-oxide-based films grown at low temperature by mist chemical vapor deposition
Jung et al. The electrical properties of low pressure chemical vapor deposition Ga doped ZnO thin films depending on chemical bonding configuration
Elsherif et al. Structural, optical and electrical properties of SnO2: F thin films deposited by spray pyrolysis for application in thin film solar cells
Hu et al. Surface morphology evolution and optoelectronic properties of heteroepitaxial Si-doped β-Ga2O3 thin films grown by metal-organic chemical vapor deposition
Yu et al. Transparent conducting yttrium-doped ZnO thin films deposited by sol–gel method
Bu Sol-gel production of p-type ZnO thin film by using sodium doping
Choi et al. Non-laminated growth of chlorine-doped zinc oxide films by atomic layer deposition at low temperatures
Singh et al. Structural and optoelectronic properties of epitaxial Ni-substituted Cr2O3 thin films for p-type TCO applications
Guan et al. Understanding the role of potassium incorporation in realizing transparent p-type ZnO thin films
Abood et al. A comparison study the effect of doping by Ga2O3 and CeO2 on the structural and optical properties of SnO2 thin films
Wu et al. Preparation and conductivity enhancement of Al-doped zinc oxide thin films containingtrace Ag nanoparticles by the sol–gel process
Colibaba et al. Effect of chlorine on the conductivity of ZnO: Ga thin films
Chinnakutti et al. Highly transparent zinc nitride thin films by RF magnetron sputtering with enhanced optoelectronic behavior
Nirmala et al. Structural and optical properties of an undoped and Mn doped ZnO nanocrysatlline thin film
Shankar et al. Influence of Al concentration on structural and optical properties of Aluminum doped zinc oxide thin films prepared by sol gel spin coating method
Karakaya Effect of fluorine and boron co-doping on ZnO thin films: structural, luminescence properties and Hall effect measurements
Scolfaro et al. Optical absorption in full composition range of ZnCuO thin films synthesized by spray pyrolysis
Hanzawa et al. Heteroepitaxial growth, degenerate state, and superconductivity of perovskite-type LaWN3 thin films
Ganesh et al. Spray pyrolysis deposited aluminium-indium zinc oxide thin films and study of their electrical and photoluminescence properties
Kwok et al. Highly transparent and conducting In doped CdO synthesized by sol-gel solution processing
Chen et al. The effect of boron on the doping efficiency of nitrogen in ZnO
Shankar et al. Influence of pH on structural and optical properties of spin coated ZnO thin films