Wagner et al., 1996 - Google Patents
Bistable microvalve with pneumatically coupled membranesWagner et al., 1996
- Document ID
- 5305873067470913957
- Author
- Wagner B
- Quenzer H
- Hoerschelmann S
- Lisec T
- Juerss M
- Publication year
- Publication venue
- Proceedings of Ninth International Workshop on Micro Electromechanical Systems
External Links
Snippet
The paper reports on a novel bistable electrostatic actuator with pneumatic coupling. Two buckled Si/SiO/sub 2/membranes span over connected air filled cavities with enclosed driving electrodes. The membranes operate in counteraction. If one electrode is pulled down …
- 239000012528 membrane 0 title abstract description 63
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