[go: up one dir, main page]

Monkowski et al., 2006 - Google Patents

Arrayed nanostructured titania functionalized for hydrogen detection

Monkowski et al., 2006

View PDF
Document ID
5142540702415127184
Author
Monkowski A
Morrill A
MacDonald N
Publication year
Publication venue
ECS Transactions

External Links

Snippet

Arrays of nanostructured titania (NST) sensing elements have been fabricated on the wafer scale using standard microfabrication techniques. Sensing elements are 20 µm on a side and formed by the oxidation of titanium thin films in aqueous hydrogen peroxide. NST …
Continue reading at citeseerx.ist.psu.edu (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material
    • G01N27/04—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by the preceding groups
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—Specially adapted to detect a particular component

Similar Documents

Publication Publication Date Title
Huotari et al. Pulsed laser deposited nanostructured vanadium oxide thin films characterized as ammonia sensors
Kumar et al. Highly sensitive and selective CO gas sensor based on a hydrophobic SnO 2/CuO bilayer
Sharma et al. Pd/Ag alloy as an application for hydrogen sensing
Chang et al. Highly sensitive ZnO nanowire acetone vapor sensor with Au adsorption
Cantalini et al. NO2 response of In2O3 thin film gas sensors prepared by sol–gel and vacuum thermal evaporation techniques
Hazra et al. Highly repeatable low-ppm ethanol sensing characteristics of p-TiO 2-based resistive devices
Williams et al. NOx response of tin dioxide based gas sensors
Bhattacharyya et al. Noble metal catalytic contacts to sol–gel nanocrystalline zinc oxide thin films for sensing methane
US10845325B2 (en) In-situ localized growth of porous metal oxide films on microheater platform for low temperature gas detection
Li et al. NO2-sensing properties based on the nanocomposite of n-WO3− x/n-porous silicon at room temperature
Preiß et al. Gas sensing by SnO2 thin films prepared by large-area pulsed laser deposition
Helwig et al. Gas sensing properties of hydrogen-terminated diamond
Ahmad et al. Investigation of RF sputtered tungsten trioxide nanorod thin film gas sensors prepared with a glancing angle deposition method toward reductive and oxidative analytes
Fahad et al. Thin films of tungsten oxide based on NH3 and NO2 gas sensors
Li et al. NO2 sensing performance of p-type intermediate size porous silicon by a galvanostatic electrochemical etching method
Lee et al. Sputtered PdO decorated TiO2 sensing layer for a hydrogen gas sensor
Duoc et al. Hydrogen gas sensor based on self-heating effect of SnO2/Pt thin film with ultralow power consumption
Preiß et al. Characterization of WO3 thin films prepared by picosecond laser deposition for gas sensing
Rajan et al. An investigation on electrical and hydrogen sensing characteristics of RF sputtered ZnO thin-film with palladium Schottky contacts
Nacer et al. Promising ethanol detection enhancement of Cu2O thin film deposited by GLAD technique
Cantalini et al. Investigation on the cross sensitivity of NO2 sensors based on In2O3 thin films prepared by sol-gel and vacuum thermal evaporation
Wang et al. Room-Temperature Chemiresistive Effect of ${\rm TiO} _ {2}\!-\!{\rm B} $ Nanowires to Nitroaromatic and Nitroamine Explosives
Aroutiounian et al. Hydrogen Sensor Made of Porous Silicon and Covered by TiO $ _ {2-{\rm x}} $ or ZnO $\langle $ Al $\rangle $ Thin Film
Hwang et al. Rice-like tellurium thin films deposited by a galvanic displacement reaction and ultra-high sensing response to hydrogen sulfide (H2S) gas at room temperature
Monkowski et al. Arrayed nanostructured titania functionalized for hydrogen detection