Egawa et al., 1991 - Google Patents
Film actuators: Planar, electrostatic surface-drive actuatorsEgawa et al., 1991
- Document ID
- 49273606802288048
- Author
- Egawa S
- Niino T
- Higuchi T
- Publication year
- Publication venue
- [1991] Proceedings. IEEE Micro Electro Mechanical Systems
External Links
Snippet
The authors present a variety of surface-drive film actuators and discuss their characteristics. An actuator consisting of a stator with three-phase 420 mu m-pitched electrodes and a slightly conductive slider was developed previously. A finer 100 mu m-pitched stator was …
- 238000004519 manufacturing process 0 abstract description 2
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
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