Sui et al., 2021 - Google Patents
Thermal response and TC f of GaN/AlN heterostructure multimode micro string resonators from− 10° C up to 325° CSui et al., 2021
View PDF- Document ID
- 4837720092725995605
- Author
- Sui W
- Zheng X
- Lin J
- Alphenaar B
- Feng P
- Publication year
- Publication venue
- Journal of Microelectromechanical Systems
External Links
Snippet
We report on the first experimental characterization and analysis of the thermal response and temperature coefficient of resonance frequency (TC f) of gallium nitride/aluminum nitride (GaN/AlN) heterostructure micro string resonators, in a wide temperature range from-10° C …
- PIGFYZPCRLYGLF-UHFFFAOYSA-N aluminum nitride 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[Al]#N 0 title abstract description 58
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