Farber et al., 2000 - Google Patents
Crystallization behaviour and magnetic properties of highly magnetostrictive Fe–Tb–Dy thin filmsFarber et al., 2000
- Document ID
- 4831684681596453509
- Author
- Farber P
- Kronmüller H
- Publication year
- Publication venue
- Journal of Magnetism and Magnetic Materials
External Links
Snippet
Thin films of the Fe–Tb–Dy alloy with compositions near to the Terfenol-D alloy (Fe67Tb9Dy24) have been produced by ion-beam sputtering on sapphire substrates at room temperature. Mosaic and sintered targets have been used to vary the chemical …
- 238000002425 crystallisation 0 title abstract description 24
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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