Michl et al., 2015 - Google Patents
Laboratory scale systems for the plasma treatment and coating of particlesMichl et al., 2015
- Document ID
- 479763070310578241
- Author
- Michl T
- Coad B
- Hüsler A
- Vasilev K
- Griesser H
- Publication year
- Publication venue
- Plasma Processes and Polymers
External Links
Snippet
We here report two reactor designs for the efficient and uniform plasma treatment of particles: 1) retrofitting an existing plasma reactor with a loudspeaker for agitation (LPR) and 2) adapting a rotary evaporator by adding custom electrodes (RPR). Both designs offer …
- 239000002245 particle 0 title abstract description 99
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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