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Claassen et al., 1980 - Google Patents

The Nucleation of CVD Silicon on SiO2 and Si3 N 4 Substrates: II. The System

Claassen et al., 1980

Document ID
4739084977626302380
Author
Claassen W
Bloem J
Publication year
Publication venue
Journal of The Electrochemical Society

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ABSTRACT A description is given of nucleation experiments with silicon on SiO2 and SigN4 substrates in the SiH2C12-H2-Nz system, performed at temperatures between 800~ and ll00~ The saturation cluster densities were determined for different mixtures as a function of …
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