Friend et al., 2006 - Google Patents
A simple bidirectional linear microactuator for nanopositioning-the" Baltan" microactuatorFriend et al., 2006
View PDF- Document ID
- 4308719619812271839
- Author
- Friend J
- Gouda Y
- Nakamura K
- Ueha S
- Publication year
- Publication venue
- ieee transactions on ultrasonics, ferroelectrics, and frequency control
External Links
Snippet
A new linear microactuator, using bulk PZT and electro-discharge-machined components, generates a sliding velocity and force of 100 mm/s and 12 mN, respectively, in either direction, and a peak velocity and force of 212 mm/s and 44 mN, respectively. Using a …
- 230000002457 bidirectional 0 title abstract description 4
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners; Linear motors
- H02N2/021—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
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