Tomita et al., 1996 - Google Patents
High-response XY stage system driven by in-parallel linear motorsTomita et al., 1996
- Document ID
- 4136307786614652172
- Author
- Tomita Y
- Makino K
- Sugimine M
- Taniguchi N
- Publication year
- Publication venue
- CIRP annals
External Links
Snippet
We present our newly developed high-response XY stage system driven by in-parallel linear motors. Briefly described are operational principles, associated mechanical and control system design based on analysis of stage dynamics, and typical results of system …
- 230000001429 stepping 0 abstract description 10
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
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