Boyd et al., 2006 - Google Patents
Development and application of UV excimer lamps from 354nm-126nmBoyd et al., 2006
- Document ID
- 4097240556472401926
- Author
- Boyd I
- Liaw I
- Publication year
- Publication venue
- High-Power Laser Ablation VI
External Links
Snippet
The use of high intensity ultraviolet (UV) and vacuum ultraviolet (VUV) radiation generated from decaying excimer complexes through dielectric barrier discharge (silent discharges) sources for the purposes of surface processing and modification is reviewed. Such sources …
- 238000000034 method 0 abstract description 26
Classifications
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01S—DEVICES USING STIMULATED EMISSION
- H01S3/00—Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
- H01S3/14—Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing more than one atom
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01S—DEVICES USING STIMULATED EMISSION
- H01S3/00—Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
- H01S3/02—Constructional details
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