Lai et al., 2014 - Google Patents
Electrochemical micromachining with wet stamping: Instrument design and experimental investigationLai et al., 2014
- Document ID
- 4053973668604869860
- Author
- Lai L
- Zhou H
- Du Y
- Li C
- Zhang L
- Jiang L
- Zhu L
- Publication year
- Publication venue
- Precision Engineering
External Links
Snippet
This paper presents a novel micromachining approach named electrochemical wet stamping (E-WETS) for the fabrication of microstructures on metals and semiconductors. The E-WETS allows the direct imprinting of microstructures on an agarose stamp into workpiece …
- 238000005459 micromachining 0 title abstract description 28
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Zhan et al. | Confined chemical etching for electrochemical machining with nanoscale accuracy | |
| Xu et al. | Study of surface roughness in wire electrochemical micro machining | |
| Yong et al. | Localized electrochemical micromachining with gap control | |
| CN106077852B (en) | Electrochemical machining system | |
| Liu et al. | Development of microelectrodes for electrochemical micromachining | |
| CN105347298B (en) | A kind of method using AFM probe nanometer delineation processed complex three-dimensional micro-nano structure | |
| CN104098066B (en) | Electrochemistry micro-nano technology equipment | |
| Yuan et al. | Electrochemical micromachining under mechanical motion mode | |
| Matsumura et al. | Micro machining for control of wettability with surface topography | |
| CN102216015A (en) | Machine and method for machining a part by micro-electrical discharge machining | |
| Qu et al. | Modified microscale pattern transfer without photolithography of substrates | |
| Rathod et al. | Fabrication of microgrooves with varied cross-sections by electrochemical micromachining | |
| Lai et al. | Fabrication of microlens array on silicon surface using electrochemical wet stamping technique | |
| Lai et al. | High precision electrochemical micromachining based on confined etchant layer technique | |
| Davydov et al. | Electrochemical local maskless micro/nanoscale deposition, dissolution, and oxidation of metals and semiconductors (a review) | |
| Chen et al. | Meniscus-confined electrodeposition of metallic microstructures with in-process monitoring of surface qualities | |
| Ma et al. | Electrochemical micromachining of nitinol by confined-etchant-layer technique | |
| CN206200274U (en) | Electrochemical machining device | |
| Kunar et al. | Electrochemical microsurface texturing with reusable masked patterned tool | |
| Rathod et al. | Parametric investigation into the fabrication of disk microelectrodes by electrochemical micromachining | |
| CN100406618C (en) | Method and device for processing complex three-dimensional microstructure on metal surface | |
| Lai et al. | Electrochemical micromachining with wet stamping: Instrument design and experimental investigation | |
| Chen et al. | A novel surface microtexture array generation approach using a fast-tool-feeding mechanism with elliptical cam drive | |
| CN105108250B (en) | The method that flexibility prepares fine group's line electrode online | |
| CN107385504A (en) | Array electrode and its processing method based on Constraints etching |