Mehregany et al., 1999 - Google Patents
SiC MEMS: opportunities and challenges for applications in harsh environmentsMehregany et al., 1999
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- 4046835269576603295
- Author
- Mehregany M
- Zorman C
- Publication year
- Publication venue
- Thin solid films
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Many measurement and control applications requiring MEMS technology are in the presence of harsh environments, eg high temperatures, intense shock/vibrations, erosive flows, and corrosive media. Unlike Si, SiC as a semiconductor material is exceptionally well …
- 229910010271 silicon carbide 0 title abstract description 154
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