[go: up one dir, main page]

Ralib et al., 2010 - Google Patents

A comparative study on MEMS piezoelectric microgenerators

Ralib et al., 2010

Document ID
4045941147122301621
Author
Ralib A
Nordin A
Salleh H
Publication year
Publication venue
Microsystem technologies

External Links

Snippet

The growing demand of wireless sensor networks has created the necessity of miniature, portable, long lasting and easily recharged sources of power. Traditional, hazardous batteries are rendered unacceptable and the viability of 'green'MEMS energy harvesters has …
Continue reading at link.springer.com (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/113—Piezo-electric or electrostrictive devices with mechanical input and electrical output, e.g. generators, sensors
    • H01L41/1134—Beam type
    • H01L41/1136—Cantilevers
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H02N2/186—Vibration harvesters
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/09—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators
    • H01L41/0926—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/113—Piezo-electric or electrostrictive devices with mechanical input and electrical output, e.g. generators, sensors
    • H01L41/1132—Sensors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/02—Details
    • H01L41/04—Details of piezo-electric or electrostrictive devices
    • H01L41/047—Electrodes or electrical connection arrangements
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/16—Selection of materials

Similar Documents

Publication Publication Date Title
Ahmad et al. Review of vibration‐based electromagnetic–piezoelectric hybrid energy harvesters
Uchino Piezoelectric energy harvesting systems—Essentials to successful developments
Toshiyoshi et al. MEMS vibrational energy harvesters
US8110964B2 (en) Energy harvesting device
Najafi et al. Microsystems for energy harvesting
Liu et al. A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz
Kim et al. Piezoelectric MEMS for energy harvesting
Jackson et al. Evaluation of low-acceleration MEMS piezoelectric energy harvesting devices
Md Ralib et al. Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters
Al Ahmad Piezoelectric water drop energy harvesting
Wen et al. Improving voltage output with PZT beam array for MEMS-based vibration energy harvester: theory and experiment
Ralib et al. A comparative study on MEMS piezoelectric microgenerators
Sriramdas et al. Scaling and performance analysis of MEMS piezoelectric energy harvesters
Debnath et al. Meandering-trapezoidal shaped MEMS structure for low frequency vibration based energy harvesting applications
Deng et al. A MEMS based piezoelectric vibration energy harvester for fault monitoring system
JP2015503218A (en) Piezoelectric energy recovery device or actuator
Ibrahim et al. On geometrical configurations of vibration-driven piezoelectric energy harvesters for optimum energy transduction: a critical review
EP2610935A1 (en) An energy harvesting device
Singh et al. Simulations, fabrication, and characterization of d 31 mode piezoelectric vibration energy harvester
WO2012164545A1 (en) Energy scavenging from a rotating gear using an impact type piezoelectric mems scavenger
Elvin et al. Introduction and methods of mechanical energy harvesting
Shabara et al. Comprehensive piezoelectric material application issues on energy harvesting for artificial intelligence systems
Kirubaveni et al. Analysis of rectangular and triangular end array type piezoelectric vibration energy harvester
Nisanth et al. Design and simulation of MEMS AlN piezoelectric vibration energy harvester array for improved power density
Butram et al. Performance enhancement of piezoelectric mems energy harvester using split proof mass for powering ultralow power wireless sensor nodes