Nakajima et al., 2015 - Google Patents
Development of Near-Field-Enhanced High-Fill-Factor MEMS Radiator with Shared SpringNakajima et al., 2015
View PDF- Document ID
- 4009003250504614300
- Author
- Nakajima H
- Oh S
- Ueno A
- Morimoto K
- Suzuki Y
- Publication year
- Publication venue
- Journal of Physics: Conference Series
External Links
Snippet
For precise thermal control in satellites under varying internal heat dissipation and thermal boundary condition, we propose a high-fill factor MEMS radiator enhanced by the near-field effect. We have successfully fabricated a prototype with parylene shared springs and …
- 230000004907 flux 0 abstract description 22
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L35/00—Thermo-electric devices comprising a junction of dissimilar materials, i.e. exhibiting Seebeck or Peltier effect with or without other thermo-electric effects or thermomagnetic effects; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L35/28—Thermo-electric devices comprising a junction of dissimilar materials, i.e. exhibiting Seebeck or Peltier effect with or without other thermo-electric effects or thermomagnetic effects; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof operating with Peltier or Seebeck effect only
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