Wallenberger et al., 1994 - Google Patents
Inorganic fibers and microstructures directly from the vapor phaseWallenberger et al., 1994
- Document ID
- 3923437289267955546
- Author
- Wallenberger F
- Nordine P
- Boman M
- Publication year
- Publication venue
- Composites Science and Technology
External Links
Snippet
By using high reactor pressures (> 1 bar) and a unique rate control mechanism, chemically pure and structurally uniform boron, carbon, silicon, silicon nitride and silicon carbide fibers were obtained by laser-assisted chemical vapor deposition (LCVD) with high growth rates …
- 239000000835 fiber 0 title abstract description 387
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Wallenberger et al. | Inorganic fibers and microstructures directly from the vapor phase | |
| JP7090688B2 (en) | High-strength heat-resistant fiber material | |
| US5549971A (en) | Laser assisted fiber growth | |
| Tang et al. | Germanium dioxide whiskers synthesized by laser ablation | |
| US5146481A (en) | Diamond membranes for X-ray lithography | |
| TWI239266B (en) | Apparatus and method for diamond production | |
| Hackl et al. | Coating of carbon short fibers with thin ceramic layers by chemical vapor deposition | |
| US4343836A (en) | One-directional uniformly coated fibers, method of preparation, and uses therefor | |
| AU610519B2 (en) | Laser assisted fiber growth | |
| US20160237595A1 (en) | High-Strength Refractory Fibrous Materials | |
| JPH0610136A (en) | Production of uniform cylidrical pipe made of cvd diamond | |
| JP2022003185A (en) | Method and apparatus for producing fiber and microstructure from precursor having different molecular mass | |
| US20220251727A1 (en) | Apparatus and method for manufacturing hexagonal silicon crystal | |
| US5399430A (en) | Boron fibers having improved tensile strength | |
| Joshi et al. | Liquid phase regrowth of< 110> nanodiamond film by UV laser annealing of PTFE to generate dense CVD microdiamond film | |
| US5126200A (en) | Laser assisted fiber growth | |
| Wallenberger | Inorganic fibres and microfabricated parts by laser assisted chemical vapour deposition (LCVD): structures and properties | |
| Wallenberger et al. | Strong, small diameter, boron fibers by LCVD | |
| EP1339637A1 (en) | A process for the synthesis of nanotubes of transition metal dichalcogenides | |
| Wallenberger et al. | Amorphous silicon nitride fibers grown from the vapor phase | |
| EP0772699A1 (en) | Diamond-phase carbon tubes and cvd process for their production | |
| Colomban | SiC, from amorphous to nanosized materials, the exemple of SiC fibres issued of polymer precursors | |
| Wallenberger et al. | Inorganic fibers and microstructures by laser assisted chemical vapor deposition | |
| Nordine et al. | Silicon fibers produced by high-pressure LCVD | |
| EP0494753A2 (en) | Chemical vapor deposition-produced silicon and silicon carbide having improved optical properties |