[go: up one dir, main page]

Kornbluh et al., 1999 - Google Patents

High-field electrostriction of elastomeric polymer dielectrics for actuation

Kornbluh et al., 1999

Document ID
3651882780449884740
Author
Kornbluh R
Pelrine R
Joseph J
Heydt R
Pei Q
Chiba S
Publication year
Publication venue
Smart Structures and Materials 1999: Electroactive Polymer Actuators and Devices

External Links

Snippet

This paper investigates the use of elastomeric dielectric materials with compliant electrodes as a means of actuation. When a voltage is applied to the electrodes, the elastomeric films expand in area and compress in thickness. The strain response to applied electric fields was …
Continue reading at www.spiedigitallibrary.org (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/02—Details
    • H01L41/04—Details of piezo-electric or electrostrictive devices
    • H01L41/047—Electrodes or electrical connection arrangements
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/09—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators
    • H01L41/0926—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H01L41/0973—Membrane type
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/09—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators
    • H01L41/0926—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H01L41/0933—Beam type
    • H01L41/094—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/09—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators
    • H01L41/0986—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators using longitudinal or thickness displacement only, e.g. d33 or d31 type devices
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/22—Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
    • H01L41/35—Forming piezo-electric or electrostrictive materials
    • H01L41/45—Organic materials
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/083—Piezo-electric or electrostrictive devices having a stacked or multilayer structure
    • H01L41/0836—Piezo-electric or electrostrictive devices having a stacked or multilayer structure of cylindrical shape with stacking in radial direction, e.g. coaxial or spiral type rolls
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/083—Piezo-electric or electrostrictive devices having a stacked or multilayer structure
    • H01L41/0833—Piezo-electric or electrostrictive devices having a stacked or multilayer structure with non-rectangular cross-section orthogonal to the stacking direction, e.g. polygonal, circular
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/02—Details
    • H01L41/04—Details of piezo-electric or electrostrictive devices
    • H01L41/053—Mounts, supports, enclosures or casings
    • H01L41/0536—Mechanical prestressing means, e.g. springs
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/113—Piezo-electric or electrostrictive devices with mechanical input and electrical output, e.g. generators, sensors
    • H01L41/1134—Beam type
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/16—Selection of materials
    • H01L41/18—Selection of materials for piezo-electric or electrostrictive devices, e.g. bulk piezo-electric crystals
    • H01L41/193—Macromolecular compositions, e.g. piezo-electric polymers
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners; Linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/06—Influence generators
    • H02N1/08—Influence generators with conductive charge carrier, i.e. capacitor machines

Similar Documents

Publication Publication Date Title
Kornbluh et al. High-field electrostriction of elastomeric polymer dielectrics for actuation
Pelrine et al. High-field deformation of elastomeric dielectrics for actuators
Kornbluh et al. Ultrahigh strain response of field-actuated elastomeric polymers
Benslimane et al. Mechanical properties of dielectric elastomer actuators with smart metallic compliant electrodes
Duduta et al. Multilayer dielectric elastomers for fast, programmable actuation without prestretch
Schlaak et al. Novel multilayer electrostatic solid state actuators with elastic dielectric
Pelrine et al. High‐strain actuator materials based on dielectric elastomers
Pelrine et al. Electrostriction of polymer films for microactuators
Carpi et al. Folded dielectric elastomer actuators
Shankar et al. Dielectric elastomers as next-generation polymeric actuators
Biggs et al. Electroactive polymers: developments of and perspectives for dielectric elastomers
Löwe et al. Dielectric elastomers in actuator technology
US6911764B2 (en) Energy efficient electroactive polymers and electroactive polymer devices
Pelrine et al. High-speed electrically actuated elastomers with strain greater than 100%
York et al. Experimental characterization of the hysteretic and rate-dependent electromechanicalbehavior of dielectric electro-active polymer actuators
US10124569B2 (en) Methods for making an electroactive device fabricated with a nanotube film electrode
US20100026143A1 (en) Monolithic electroactive polymers
EP2819293A1 (en) Gel actuator and method for producing same
WO2014012403A1 (en) Piezoelectric-triboelectric hybrid-film nanogenerator
WO2001059852A9 (en) Monolithic electroactive polymers
Schäffner et al. Microstructured single-layer electrodes embedded in P (VDF-TrFE) for flexible and self-powered direction-sensitive strain sensors
Akle Characterization and modeling of the ionomer-conductor interface in ionic polymer transducers
Kornbluh et al. Ultra-high strain response of elastomeric polymer dielectrics
Jones et al. Dielectric elastomers and compliant metal electrode technology
Chiba et al. Examination of factors to improve the performance of dielectric elastomer transducers and their applications