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Zhao et al., 2015 - Google Patents

Effect of axial magnetic field on the microstructure, hardness and wear resistance of TiN films deposited by arc ion plating

Zhao et al., 2015

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Document ID
3124407830377011218
Author
Zhao Y
Yang W
Guo C
Chen Y
Yu B
Xiao J
Publication year
Publication venue
Acta Metallurgica Sinica (English Letters)

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Snippet

TiN films were deposited on stainless steel substrates by arc ion plating. The influence of an axial magnetic field was examined with regard to the microstructure, chemical elemental composition, mechanical properties and wear resistance of the films. The results showed …
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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