Almaev et al., 2021 - Google Patents
Structural, electrical and gas-sensitive properties of Cr2O3 thin filmsAlmaev et al., 2021
- Document ID
- 2973470284890019269
- Author
- Almaev A
- Kushnarev B
- Chernikov E
- Novikov V
- Korusenko P
- Nesov S
- Publication year
- Publication venue
- Superlattices and Microstructures
External Links
Snippet
Cr 2 O 3 thin films were synthesized by RF magnetron sputtering of a Cr target in an oxygen- argon plasma. The effect of annealing temperature on the structural, electrical, and gas- sensitive properties of the Cr 2 O 3 thin films was studied. According to AFM, SEM, XRD …
- 239000010409 thin film 0 title abstract description 49
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by the preceding groups
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—Specially adapted to detect a particular component
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material
- G01N27/04—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
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