Ciarlo, 1987 - Google Patents
Corner compensation structures for (110) oriented siliconCiarlo, 1987
- Document ID
- 2852306678432379256
- Author
- Ciarlo D
- Publication year
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We have studied the use of (110) oriented silicon wafers for the fabrication of microscale mechanisms such as cantilever beams and latching mechanisms. Using this orientation, cantilever beams can be fabricated such that they deflect in a parallel direction to the wafer …
- 229910052710 silicon 0 title abstract description 8
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