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Zhou, 2019 - Google Patents

Self-Assembly of Block Copolymer Thin Films for Fabricating Tailored Nanostructures

Zhou, 2019

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Document ID
2779386651619220178
Author
Zhou C
Publication year

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Block copolymers (BCPs) self-assemble into periodic arrays of lamella, cylinders, spheres and gyroids with characteristic feature sizes of 3-100nm, making them ideal for fabrication of nanostructured materials. For many applications including separation membranes and …
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICRO-STRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00Manufacture or treatment of micro-structural devices or systems
    • B81C2201/01Manufacture or treatment of micro-structural devices or systems in or on a substrate
    • B81C2201/0101Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0147Film patterning
    • B81C2201/0149Forming nanoscale microstructures using auto-arranging or self-assembling material

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