Enloe et al., 1997 - Google Patents
Novel bandpass electrostatic analyzerEnloe et al., 1997
View PDF- Document ID
- 245371435082510318
- Author
- Enloe C
- Agnew K
- Cifuentes A
- Publication year
- Publication venue
- Review of scientific instruments
External Links
Snippet
A novel electrostatic analyzer for energetic charged particles has been developed that has a simple geometry and has demonstrated a wide field of view (90°× 4° in the prototype device). The bandpass of the device can be adjusted by changing the size of the entrance …
- 239000002245 particle 0 abstract description 32
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometer or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometer or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometer or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/32—Static spectrometers using double focusing
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometer or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometer or separator tubes
- H01J49/02—Details
- H01J49/025—Detectors specially adapted to particle spectrometers
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometer or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometer or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometer or separator tubes
- H01J49/02—Details
- H01J49/22—Electrostatic deflection
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3266286B2 (en) | Charged particle energy analyzer | |
| US6984821B1 (en) | Mass spectrometer and methods of increasing dispersion between ion beams | |
| WO2006079096A2 (en) | Ion optics systems | |
| US3949221A (en) | Double-focussing mass spectrometer | |
| AU2014204935B2 (en) | Mass spectrometer with improved magnetic sector | |
| JPH0352180B2 (en) | ||
| Yokota et al. | Development of an ion energy mass spectrometer for application on board three-axis stabilized spacecraft | |
| EP0456516B1 (en) | Ion buncher | |
| JP4497925B2 (en) | Cycloid mass spectrometer | |
| Enloe et al. | Novel bandpass electrostatic analyzer | |
| Toyoda | Development of multi-turn time-of-flight mass spectrometers and their applications | |
| CN105914126B (en) | A kind of ion beam regulating device, ion-optic system and ion microprobe | |
| US5541409A (en) | High resolution retarding potential analyzer | |
| US5962850A (en) | Large aperture particle detector with integrated antenna | |
| Stalder et al. | Micromachined array of electrostatic energy analyzers for charged particles | |
| US4769542A (en) | Charged particle energy analyzer | |
| EP0295653B1 (en) | High luminosity spherical analyzer for charged particles | |
| EP1051735A2 (en) | Charged particle energy analysers | |
| Enloe et al. | Characterization of a plasma source for ground-based simulation of LEO plasma conditions | |
| Krasnova et al. | Cone electrostatic energy analyser, used for concurrent energy-and angle-resolved measurements | |
| Vaisberg et al. | The possibility of making fast measurements of ion distribution function | |
| Livi et al. | An interstellar neutral atom detector (INAD) | |
| Scime et al. | A Low-Voltage, Ultra-Compact Plasma Spectrometer for Small Spacecraft | |
| Steichen | Development of an energy analyzer for the characterization of the neutral and ionized upper atmosphere | |
| Herrero et al. | Miniature imaging plasma spectrometer: A new approach with large geometric factor and wide field of view |