Rangel et al., 2019 - Google Patents
Role of the plasma activation degree on densification of organosilicon filmsRangel et al., 2019
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- Rangel R
- Cruz N
- Rangel E
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The possibility of controlling the density of organosilicon films was investigated by tuning the plasma activation degree without providing extra energy to the structure, as usually reported in the literature. For this purpose, thin films were deposited in plasmas fed with …
- 238000000678 plasma activation 0 title abstract description 11
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