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de Freitas Daudt et al., 2012 - Google Patents

TiN thin film deposition by cathodic cage discharge: effect of cage configuration and active species

de Freitas Daudt et al., 2012

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Document ID
218052124561737871
Author
de Freitas Daudt N
Barbosa J
Braz D
Pereira M
Junior C
Publication year
Publication venue
Journal of Physics: Conference Series

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Snippet

Plasma cathodic cage technique was developed recently in order to eliminate phenomena such as edge effects and overheating, which occur during conventional nitriding processes. In this work, the effect of plasma active species and cage configurations during thin film …
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