Okamoto et al., 2006 - Google Patents
Large Deflection Electrostatic Spiral Actuator with Twisted-beamsOkamoto et al., 2006
View PDF- Document ID
- 18355026941482282159
- Author
- Okamoto S
- Shimamoto N
- Matsushita Y
- Fujita T
- Maenaka K
- Takayama Y
- Publication year
- Publication venue
- IEEJ Transactions on Sensors and Micromachines
External Links
Snippet
In this paper, we propose a large-deflection electrostatic spiral-actuator with novel twisted- beams fabricated by surface micromachining. The stress-induced or bimetal-like actuators have merits of simple structure and fabrication steps with relatively large stroke. The novel …
- 238000004519 manufacturing process 0 abstract description 7
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICRO-STRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00555—Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICRO-STRUCTURAL TECHNOLOGY
- B81B—MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
- B81B2203/00—Basic micro-electromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
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