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Weiss et al., 1999 - Google Patents

Metal oxide heteroepitaxy: Stranski-Krastanov growth for iron oxides on Pt (111)

Weiss et al., 1999

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Document ID
17902840412896705864
Author
Weiss W
Ritter M
Publication year
Publication venue
Physical Review B

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The epitaxial growth of iron oxide films on Pt (111) substrates was investigated by scanning tunneling microscopy and low-energy electron diffraction. The film growth was accomplished by repeated cycles of iron deposition and subsequent oxidation at p (O 2)= 10− 6 mbar. For …
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Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers

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