Wolfson et al., 1987 - Google Patents
Safety in thin film semiconductor depositionWolfson et al., 1987
- Document ID
- 16585275038438196002
- Author
- Wolfson R
- Vernon S
- Publication year
- Publication venue
- Solar cells
External Links
Snippet
Special safety precautions are required in thin film photovoltaics manufacture because of the hazardous nature of the source gases used for deposition. Most of these gases are pyrophoric or flammable and dangerously unstable in air but it is the toxicity of some that …
- 239000004065 semiconductor 0 title abstract description 7
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