[go: up one dir, main page]

Bauerle et al., 1990 - Google Patents

Laser deposition and patterning of high-temperature superconductors

Bauerle et al., 1990

Document ID
15717976434855607087
Author
Bauerle D
Heitz J
Ludorf W
Schwab P
Wang X
Publication year
Publication venue
In-situ patterning

External Links

Snippet

Superconducting films of Y-Ba-Cu-O and Bi-Sr-Ca-Cu-O on (100) SrTiO3 and (100) MgO substrates have been fabricated by reactive excimer-laser sputtering from ceramic targets. Film patterning by laser-induced reduction/metallization, oxidation, and ablation has been …
Continue reading at www.cambridge.org (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/24—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof
    • H01L39/2419—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof the superconducting material comprising copper oxide
    • H01L39/2422—Processes for depositing or forming superconductor layers
    • H01L39/2454—Processes for depositing or forming superconductor layers characterised by the substrate
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/24—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof
    • H01L39/2419—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof the superconducting material comprising copper oxide
    • H01L39/2464—After-treatment, e.g. patterning
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/22—Devices comprising a junction of dissimilar materials, e.g. Josephson-effect devices
    • H01L39/223—Josephson-effect devices
    • H01L39/225—Josephson-effect devices comprising high Tc ceramic materials
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/02—Details
    • H01L39/12—Details characterised by the material
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials

Similar Documents

Publication Publication Date Title
US5077266A (en) Method of forming weak-link josephson junction, and superconducting device employing the junction
Rogers et al. Fabrication of heteroepitaxial YBa2Cu3O7− x‐PrBa2Cu3O7− x‐YBa2Cu3O7− x Josephson devices grown by laser deposition
Mannhart et al. Micropatterning of high T c films with an excimer laser
US5290761A (en) Process for making oxide superconducting films by pulsed excimer laser ablation
US4957900A (en) Method of manufacturing a superconducting pattern by light irradiation
EP0292387B1 (en) Method for producing a superconducting circuit
US20030125213A1 (en) Superconducting structure
CA1278885C (en) Method of producing superconducting circuit
Stritzker et al. Comparison of YBCO-films prepared by laser ablation and sputtering
Miura et al. Structure and superconducting properties of Y1Ba2Cu3O7− δ films prepared by transversely excited atmospheric pressure CO2 pulsed laser evaporation
Bauerle et al. Laser deposition and patterning of high-temperature superconductors
BÅuerle et al. Laser Deposition and Patterning of High-Temperature Superconductors
Kula et al. Laser patterning of YBa/sub 2/Cu/sub 3/O/sub x/thin films protected by in-situ grown SrTiO/sub 3/cap layer
US5187147A (en) Method for producing freestanding high Tc superconducting thin films
Jia et al. High‐temperature superconductor Josephson junctions with a gradient Pr‐doped Y1− x Pr x Ba2Cu3O7− δ (x= 0.1, 0.3, 0.5) as barriers
KR20010067425A (en) Ramp edge josephson junction devices and methods for fabricating the same
Cheenne et al. Laser assisted deposition of thin BiSrCaCuO films
WO1989003125A1 (en) A process for producing an electric circuit including josephson diodes
Wiener-Avnear et al. Laser patterning of YBaCuO weak link bridges
Eryu et al. Formation of high Tc, superconducting films by laser induced fragments
Ballentine High temperature superconducting thin films: Sputter deposition and fast optical switching
Lengfellner et al. Preparation of Y-Ba-Cu-O thin films by laser evaporation with near-infrared radiation
Zach et al. Laser ablated YBCO thin films—relations between structural and electrical properties
Hagerhorst et al. Patterning of High Tc Superconductor Films with a Focussed Excimer Laser
Ianno et al. Pulsed Laser Deposition of Tl-Ca-Ba-Cu-O Films at 248 nm