Liu et al., 2012 - Google Patents
Cylindrical glass nanocapillaries patterned via coarse lithography (> 1 μm) for biomicrofluidic applicationsLiu et al., 2012
View PDF- Document ID
- 1569240882402839463
- Author
- Liu Y
- Yobas L
- Publication year
- Publication venue
- Biomicrofluidics
External Links
Snippet
We demonstrate a new method of fabricating in-plane cylindrical glass nanocapillaries (< 100 nm) that does not require advanced patterning techniques but the standard coarse photolithography (> 1 μm). These nanocapillaries are self-enclosed optically transparent …
- 239000011521 glass 0 title abstract description 47
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICRO-STRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing micro-systems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing micro-systems without movable or flexible elements
- B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
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