Maithripala et al., 2003 - Google Patents
Nonlinear dynamic output feedback stabilization of electrostatically actuated MEMSMaithripala et al., 2003
View PDF- Document ID
- 15273248196500901810
- Author
- Maithripala D
- Berg J
- Dayawansa W
- Publication year
- Publication venue
- 42nd IEEE International Conference on Decision and Control (IEEE Cat. No. 03CH37475)
External Links
Snippet
Operating regions of electrostatically-actuated microelectromechanical systems are limited by a bifurcation phenomenon called" snap-through" or" pull-in". It is known that charge feedback control can be employed to avoid this bifurcation. The performance of such …
- 238000005312 nonlinear dynamic 0 title description 2
Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
- G02B26/08—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
- G02B26/0816—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
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