[go: up one dir, main page]

Goldstein et al., 1993 - Google Patents

Heterodyn interferometer for the detection of electric and thermal signals in integrated circuits through the substrate

Goldstein et al., 1993

Document ID
1481186563549817003
Author
Goldstein M
Sölkner G
Gornik E
Publication year
Publication venue
Review of scientific instruments

External Links

Snippet

A laser diode based probing system for the interferometric detection of charge density modulations and temperature changes which accompany electric signals in integrated circuits has been developed. Measurements are performed through the substrate of the …
Continue reading at pubs.aip.org (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/265—Contactless testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/636—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited using an arrangement of pump beam and probe beam; using the measurement of optical non-linear properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/396—Type of laser source
    • G01N2021/399—Diode laser
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/20—Arrangements or instruments for measuring magnetic variables involving magnetic resonance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
    • G01R23/02—Arrangements for measuring frequency, e.g. pulse repetition rate Arrangements for measuring period of current or voltage
    • G01R23/14—Arrangements for measuring frequency, e.g. pulse repetition rate Arrangements for measuring period of current or voltage by heterodyning; by beat-frequency comparison
    • G01R23/145—Arrangements for measuring frequency, e.g. pulse repetition rate Arrangements for measuring period of current or voltage by heterodyning; by beat-frequency comparison by heterodyning or by beat-frequency comparison with the harmonic of an oscillator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R13/00—Arrangements for displaying electric variables or waveforms

Similar Documents

Publication Publication Date Title
Goldstein et al. Heterodyn interferometer for the detection of electric and thermal signals in integrated circuits through the substrate
US4681449A (en) High speed testing of electronic circuits by electro-optic sampling
US4594511A (en) Method and apparatus for double modulation spectroscopy
US5872360A (en) Method and apparatus using an infrared laser based optical probe for measuring electric fields directly from active regions in an integrated circuit
Economou et al. Limitations and noise in interferometric systems using frequency ramped single-mode diode lasers
US6072179A (en) Method and apparatus using an infrared laser based optical probe for measuring voltages directly from active regions in an integrated circuit
US6084396A (en) Method for performing quantitative measurement of DC and AC current flow in integrated circuit interconnects by the measurement of magnetic fields with a magneto optic laser probe
Ye et al. Ultrastable optical frequency reference at 1.064/spl mu/m using a C/sub 2/HD molecular overtone transition
Spzno et al. Spectroscopic demonstration of picosecond, phase-shifted laser multiple-pulse sequences
Shinagawa et al. A laser-diode-based picosecond electrooptic prober for high-speed LSIs
EP0493906A1 (en) Optical probing method and apparatus
Bruce et al. Waveform acquisition from the backside of silicon using electro-optic probing
Takahashi et al. Sampling and real-time methods in electro-optic probing system [LSI testing]
JP2656686B2 (en) Optical probe method and apparatus
US5666062A (en) Voltage measuring using electro-optic material's change in refractive index
US5631555A (en) Voltage measurement system
Li et al. Intermixing optical and microwave signals in GaAs microstrip circuits for phase-locking applications
Acef CO/sub 2//OsO/sub 4/lasers as frequency standards in the 29 THz range
Wiesenfeld et al. Electro-optic sampling using injection lasers
Baur et al. High voltage resolution with a laser diode based electro-optic measurement system
Hofmann et al. Electro-optic sampling system for the testing of high-speed integrated circuits using a free running solid-state laser
Ginter et al. Phase accurate optical probing of surface acoustic wave devices
Zapka et al. Measurement of time dependent optical gain using frequency modulation spectroscopy
Mazzoni et al. A Coherent hybrid fiber-optic probe for mapping induced birefringence in GaAs structures
TWI240080B (en) Electric optical image measurement system using heterodyne method