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Chu et al., 1995 - Google Patents

Silicon nanofilter with absolute pore size and high mechanical strength

Chu et al., 1995

Document ID
14571289048853925246
Author
Chu W
Ferrari M
Publication year
Publication venue
Microrobotics and micromechanical systems

External Links

Snippet

Microfabricated silicon filters with a nominal pore size of 20 nm have been successfully fabricated and characterized. The filter consists of a filtration membrane on top of a silicon surface and a mechanical support on the silicon substrate. Two polysilicon layers together …
Continue reading at www.spiedigitallibrary.org (other versions)

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane formation
    • B01D67/0053—Inorganic membrane formation by inducing porosity into non porous precursor membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06—Organic material
    • B01D71/76—Macromolecular material not specifically provided for in a single one of groups B01D71/08 - B01D71/74

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