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Ezhilvalavan et al., 1998 - Google Patents

Conduction mechanisms in amorphous and crystalline Ta 2 O 5 thin films

Ezhilvalavan et al., 1998

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Document ID
14475296789143987609
Author
Ezhilvalavan S
Tseng T
Publication year
Publication venue
Journal of applied physics

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Electrical properties and leakage current mechanisms of amorphous and polycrystalline tantalum pentoxide (Ta 2 O 5) films were studied. Ta 2 O 5 thin films were deposited on Pt/SiO 2/n-Si substrate by reactive magnetron sputtering and then annealed at temperatures …
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