Yoon et al., 2012 - Google Patents
Growth of batio3–ag hybrid composite films at room temperature by aerosol depositionYoon et al., 2012
- Document ID
- 14444929911446223664
- Author
- Yoon Y
- Cho S
- KIM H
- BAIK H
- KIM J
- et al.
- Publication year
- Publication venue
- Transactions of Nonferrous Metals Society of China
External Links
Snippet
Barium titanate (BaTiO3) and silver (Ag) composite film with high dielectric constant was grown at room temperature by an aerosol deposition method. The dielectric constant increases by 0.5 times after adding Ag to the BaTiO3 matrix, compared with pure BaTiO3 …
- 239000002131 composite material 0 title abstract description 37
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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