[go: up one dir, main page]

Duval et al., 2004 - Google Patents

High frequency PZT composite thick film resonators

Duval et al., 2004

Document ID
14284539588831563916
Author
Duval F
Dorey R
Wright R
Huang Z
Whatmore R
Publication year
Publication venue
Integrated Ferroelectrics

External Links

Snippet

High frequency, thickness mode resonators were fabricated using a 7 μm PZT thick film which was produced using a modified composite ceramic sol-gel process. Devices were produced and the acoustic properties measured for different electrode sizes ranging from …
Continue reading at www.tandfonline.com (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on micro-sensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices

Similar Documents

Publication Publication Date Title
Akasheh et al. Development of piezoelectric micromachined ultrasonic transducers
Sun et al. High frequency PMN-PT 1-3 composite transducer for ultrasonic imaging application
Wang et al. Highly sensitive piezoelectric micromachined ultrasonic transducer operated in air
Kinoshita et al. Theoretical and experimental study of shear mode bulk acoustic wave transformer based on c-axis zigzag ScAlN multilayer for rectenna application
Herth et al. Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer
Ferrari et al. Theory, modeling and characterization of PZT-on-alumina resonant piezo-layers as acoustic-wave mass sensors
Givois et al. Experimental analysis of nonlinear resonances in piezoelectric plates with geometric nonlinearities
Rybianets et al. Automatic iterative evaluation of complex material constants of highly attenuating piezocomposites
Duval et al. Fabrication and modeling of high-frequency PZT composite thick film membrance resonators
Sherrit et al. Composite piezoelectric resonator 1D modeling with loss
Turuk et al. Finite element simulation and characterization of one-port heterostructured surface acoustic wave resonator
Duval et al. High frequency PZT composite thick film resonators
Lugovaya et al. Complex material properties of porous piezoelectric ceramics
Zheng et al. Langasite surface acoustic wave gas sensors: Modeling and verification
Yang et al. Modeling of 1-3 piezoelectric composites operating in thickness-stretch vibration mode
Li et al. Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) films
Rybianets et al. Complete characterization of porous piezoelectric ceramics properties including losses and dispersion
Ali et al. Design and modeling of piezoelectric-ALN-based acoustic sensor for sound pressure level measurements
Lu et al. Thin-film lithium niobate based piezoelectric micromachined ultrasound transducers
Zhang et al. Analysis of thickness vibrations of c-axis inclined aluminum-nitrogen thin film resonators
Ruiz et al. Evaluation of piezoelectric resonator parameters using an artificial intelligence technique
Huang et al. Improving thin-film zinc-oxide surface acoustic wave device insertion loss using a grooved reflective grating structure
Vyshatko et al. Deposition and characterization of thick pb (zr, ti) o3 films on optical fibers
Dogheche et al. A bi-stable micro-machined piezoelectric transducer for mechanical to electrical energy transformation
Jiang et al. Monolithic integration of Pb (Zr, Ti) O3 thin film based resonators using a complete dry microfabrication process