Lasagni et al., 2010 - Google Patents
Two‐and Three‐Dimensional Micro‐and Sub‐Micrometer Periodic Structures Using Two‐Beam Laser Interference LithographyLasagni et al., 2010
- Document ID
- 13345239807113615372
- Author
- Lasagni A
- Menéndez‐Ormaza B
- Publication year
- Publication venue
- Advanced engineering materials
External Links
Snippet
In this study, we present different approaches for the fabrication of two and three dimensional structures using two‐beam interference lithography. The advantages of using more than one irradiation step for the fabrication of complex structures are theoretically …
- 238000000025 interference lithography 0 title abstract description 8
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Exposure apparatus for microlithography
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