Yang et al., 1997 - Google Patents
Micro bellow actuatorsYang et al., 1997
- Document ID
- 13225110093781413583
- Author
- Yang X
- Tai Y
- Ho C
- Publication year
- Publication venue
- Proceedings of International Solid State Sensors and Actuators Conference (Transducers' 97)
External Links
Snippet
We report here a novel micromachined bellow-style actuator (microbellow) which uses a smaller real estate but is capable of larger deflections compared to a flat membrane of the same size. In this first demonstration, three-layer silicon nitride microbellows have been …
- 239000012528 membrane 0 abstract description 28
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Yang et al. | Micro bellow actuators | |
| US6146543A (en) | Microbellows actuator | |
| Su et al. | A high frequency high flow rate piezoelectrically driven MEMS micropump | |
| Yang et al. | Design, fabrication, and testing of micromachined silicone rubber membrane valves | |
| Li et al. | Development of large flow rate, robust, passive micro check valves for compact piezoelectrically actuated pumps | |
| Roberts et al. | A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems | |
| Li et al. | Fabrication of a high frequency piezoelectric microvalve | |
| Wang et al. | A parylene micro check valve | |
| US7008193B2 (en) | Micropump assembly for a microgas chromatograph and the like | |
| Bütefisch et al. | Novel micro-pneumatic actuator for MEMS | |
| Yang et al. | A MEMS thermopneumatic silicone rubber membrane valve | |
| Wu et al. | A solid hydraulically amplified piezoelectric microvalve | |
| Luharuka et al. | A bistable electromagnetically actuated rotary gate microvalve | |
| Lee et al. | Fabrication, characterization, and computational modeling of a piezoelectrically actuated microvalve for liquid flow control | |
| Camon et al. | Fabrication, simulation and experiment of a rotating electrostatic silicon mirror with large angular deflection | |
| Klink et al. | Wafer bonding with an adhesive coating | |
| Saggere et al. | Design, fabrication, and testing of a piezoelectrically driven high flow rate micro-pump | |
| Hagood et al. | Microhydraulic transducer technology for actuation and power generation | |
| Roberts et al. | A high-frequency, high-stiffness piezoelectric actuator for microhydraulic applications | |
| Roberts | Design, modeling, fabrication, and testing of a piezoelectric microvalve for high pressure, high frequency hydraulic applications. | |
| Nachef et al. | Microvalves for natural-gas analysis with poly ether ether ketone membranes | |
| Yang et al. | A piezoelectric microvalve for micropropulsion | |
| Roberts et al. | A high-frequency, high-stiffness piezoelectric micro-actuator for hydraulic applications | |
| Benard et al. | TiNi shape-memory alloy actuated micropump with fluid isolation | |
| Yang et al. | Piezoelectrically actuated microvalves for micropropulsion applications |