Williamson et al., 2006 - Google Patents
Comparison of high-voltage ac and pulsed operation of a surface dielectric barrier dischargeWilliamson et al., 2006
- Document ID
- 1282806104998110345
- Author
- Williamson J
- Trump D
- Bletzinger P
- Ganguly B
- Publication year
- Publication venue
- Journal of Physics D: Applied Physics
External Links
Snippet
A surface dielectric barrier discharge (DBD) in atmospheric pressure air was excited either by low frequency (0.3–2 kHz) high-voltage ac or by short, high-voltage pulses at repetition rates from 50 to 600 pulses s− 1. The short-pulse excited discharge was more diffuse and …
- 230000005284 excitation 0 abstract description 66
Classifications
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes, e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
- H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
- H05B41/14—Circuit arrangements
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas- or vapour-discharge lamps
- H01J61/70—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr
- H01J61/80—Lamps suitable only for intermittent operation, e.g. flash lamp
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