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Matsumoto et al., 2015 - Google Patents

Nitric acid oxidation of Si method for improvement of crystalline Si solar cell characteristics by surface passivation effect

Matsumoto et al., 2015

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Document ID
12226084915833147135
Author
Matsumoto T
Hirose R
Shibata F
Ishibashi D
Ogawara S
Kobayashi H
Publication year
Publication venue
Solar Energy Materials and Solar Cells

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We have investigated effects of formation of an ultrathin silicon dioxide (SiO 2) layer using the nitric acid oxidation of Si (NAOS) method and the subsequent ammonia (NH 3) plasma treatment on single crystalline Si solar cell characteristics and the surface chemical …
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