Ganji et al., 2009 - Google Patents
High sensitivity and small size MEMS capacitive microphone using a novel slotted diaphragmGanji et al., 2009
- Document ID
- 12196524044403110070
- Author
- Ganji B
- Majlis B
- SMIEEE
- Publication year
- Publication venue
- Microsystem technologies
External Links
Snippet
A novel single-chip microelectromechanical systems (MEMS) capacitive microphone with a slotted diaphragm for sound sensing is developed to minimize the microphone size and improve the sensitivity by decreasing the mechanical stiffness of the diaphragm. The …
- 230000035945 sensitivity 0 title abstract description 28
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
- H04R7/04—Plane diaphragms
- H04R7/06—Plane diaphragms comprising a plurality of sections or layers
- H04R7/10—Plane diaphragms comprising a plurality of sections or layers comprising superposed layers in contact
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