[go: up one dir, main page]

Kim et al., 2022 - Google Patents

A 3-Dof MEMS motion stage for scanning tunneling microscopy

Kim et al., 2022

View PDF
Document ID
1203821408519689095
Author
Kim T
Gorman J
Publication year
Publication venue
2022 IEEE 35th international conference on micro electro mechanical systems conference (MEMS)

External Links

Snippet

Piezoelectric tube scanners used in most conventional scanning tunneling microscopes (STM) are highly resonant mechanisms that require a low-bandwidth controller (< 1 kHz) to minimize ringing, which prohibitively limits scan speed. In addition, hysteresis and creep can …
Continue reading at tsapps.nist.gov (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/16—Probe manufacture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices

Similar Documents

Publication Publication Date Title
Giessibl Advances in atomic force microscopy
Kim et al. A 3-Dof MEMS motion stage for scanning tunneling microscopy
Cusin et al. Compact and precise positioner based on the inchworm principle
Alipour et al. A MEMS nanopositioner with integrated tip for scanning tunneling microscopy
Jansen et al. The black silicon method IV: The fabrication of three-dimensional structures in silicon with high aspect ratios for scanning probe microscopy and other applications
US6156216A (en) Method for making nitride cantilevers devices
Disseldorp et al. MEMS-based high speed scanning probe microscopy
Brugger et al. Microfabricated tools for nanoscience
US20240283378A1 (en) MEMS Nanopositioner and Method of Fabrication
JP2819518B2 (en) Scanning tunnel microscope and manufacturing method thereof
Akiyama et al. Atomic force microscopy using an integrated comb-shape electrostatic actuator for high-speed feedback motion
Lee et al. Switchable cantilever fabrication for a novel time-of-flight scanning force microscope
Chu et al. Microfabricated dynamic scanning force microscope using a three dimensional piezoelectric T-shape actuator
Ji et al. A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor
JPH06258072A (en) Piezoelectric element thin film evaluating apparatus, interatomic force microscope
Toshiyoshi et al. Fabrication of micromechanical tunneling probes and actuators on a silicon chip
Zhang et al. Active CMOS-MEMS conductive probes and arrays for tunneling-based atomic-level surface imaging
Strathearn et al. A distortion-free single-chip atomic force microscope with 2DOF isothermal scanning
Yi et al. A micro active probe device compatible with SOI-CMOS technologies
Kawai et al. Piezoelectric actuator integrated cantilever with tunable spring constant for atom probe
Sarkar et al. Modular MEMS experimental platform for transmission electron microscopy
Genter MEMS-Based Approach to AFM for Topographical and RF Measurements with Nanowire Tips Grown on Cantilevers
Park et al. A novel fabrication process for ultra-sharp, high-aspect ratio nano tips using (111) single crystalline silicon
Buser et al. Micromachined silicon cantilevers and tips for scanning probe microscopy
Shao et al. Mass-Analysis Scanning Force Microscopy with Electrostatic Switching Mechanism