Zorman, 2009 - Google Patents
Silicon carbide as a material for biomedical microsystemsZorman, 2009
View PDF- Document ID
- 11442498682262282819
- Author
- Zorman C
- Publication year
- Publication venue
- 2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS
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Silicon Carbide (SiC) is emerging as an enabling material for biomedical microsystems due to its unique combination of electrical, mechanical and chemical properties combined with its compatibility with Si micromachining techniques. This paper presents an overview of the …
- 229910010271 silicon carbide 0 title abstract description 137
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