Wang et al., 2011 - Google Patents
2-DOF kinematic XY stage design based on flexure elementWang et al., 2011
- Document ID
- 10750162905261104764
- Author
- Wang W
- Han C
- Choi H
- Publication year
- Publication venue
- 2011 IEEE International Conference on Mechatronics and Automation
External Links
Snippet
This paper presents a planar motion stage design based on flexure element that allow large ranges of motion along x and y direction without causing over-constraint or significant error motions. From comparing the conventional XY stage with the flexure-based compliant XY …
- 230000003071 parasitic 0 abstract description 15
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