[go: up one dir, main page]

Idogaki et al., 1996 - Google Patents

Bending and expanding motion actuators

Idogaki et al., 1996

Document ID
10640388274275210299
Author
Idogaki T
Tominaga T
Senda K
Ohya N
Hattori T
Publication year
Publication venue
Sensors and Actuators A: Physical

External Links

Snippet

Two types of bending and expanding motion actuators which are composed of multilayered PZT unimorph cells have been developed. Each PZT unimorph cell's electrode is divided into three sectors and the facing sectors are connected to one another. The bending and …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/09—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators
    • H01L41/0926—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders

Similar Documents

Publication Publication Date Title
Idogaki et al. Bending and expanding motion actuators
Kim et al. Piezoelectric energy harvesting with a clamped circular plate: analysis
KR100286486B1 (en) Elastomeric Micro Electromechanical Systems
Ataka et al. Fabrication and operation of polyimide bimorph actuators for a ciliary motion system
EP1145417B1 (en) Polymer microactuator array with macroscopic force and displacement
Ebefors et al. A robust micro conveyer realized by arrayed polyimide joint actuators
Fujita Microactuators and micromachines
Jacobsen et al. The wobble motor: an electrostatic, planetary-armature, microactuator
US6093995A (en) Hybrid motor
Yamaguchi et al. Distributed electrostatic micro actuator
US10804818B2 (en) Triboelectric generator and network for mechanical energy harvesting
WO2004027832A2 (en) Bending actuators and sensors constructed from shaped active materials and methods for making the same
Kim et al. Piezoelectric energy harvesting using a diaphragm structure
CN100385700C (en) Curved electro-active actuators
Rogacheva et al. Electromechanical analysis of a symmetric piezoelectric/elastic laminate structure: theory and experiment
CN102522916B (en) Nano-motor based on frictional force variation
Baginsky et al. MEMS based on thin ferroelectric layers
Dyatlov et al. Planar electrostatic micromotors on the basis of the ferroelectric films
Fearing Micro-actuators for micro-robots: Electric and magnetic
Brei et al. Deflection performance of a bi-directional distributed polymeric piezoelectric micromotor
Glumac et al. A planar unimorph-based actuator with large vertical displacement capability. I. Experiment
Pelrine et al. Artificial muscle for small robots and other micromechanical devices
Tominaga et al. A bending and expanding motion actuator
Moskalik et al. Deflection-voltage model and experimental results for polymeric piezoelectric c-block actuators
Simu Piezoactuators for miniature robots