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Chang et al., 2021 - Google Patents

Effects of bias voltage and substrate temperature on the mechanical properties and oxidation behavior of CrSiN films

Chang et al., 2021

Document ID
1054183186544917884
Author
Chang L
Sung M
Chen Y
Publication year
Publication venue
Vacuum

External Links

Snippet

Nanocomposite CrSiN films with a Si content of 14 at.% were fabricated through reactive direct current magnetron cosputtering. The Si content was determined based on the superior mechanical properties and oxidation resistance for CrSiN films reported in a previous study …
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    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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