ZA200605221B - Method of abrading a workpiece - Google Patents

Method of abrading a workpiece Download PDF

Info

Publication number: ZA200605221B
Authority: ZA; South Africa
Prior art keywords: abrasive; workpiece; slurry; sulfate; layer
Prior art date: 2003-11-26

Application number

ZA200605221A

Other languages

English (en)

Inventor

Edward J Woo

Craig F Lamphere

Donna W Bange

Original Assignee

3M Innovative Properties Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2003-11-26

Filing date

2006-06-23

Publication date

2007-12-27

2006-06-23 Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co

2007-12-27 Publication of ZA200605221B publication Critical patent/ZA200605221B/en

Links

238000000034 method Methods 0.000 title claims description 50
239000002131 composite material Substances 0.000 claims description 44
239000007788 liquid Substances 0.000 claims description 22
239000006061 abrasive grain Substances 0.000 claims description 20
239000002002 slurry Substances 0.000 claims description 20
-1 meta 1 Substances 0.000 claims description 19
239000011230 binding agent Substances 0.000 claims description 18
239000003945 anionic surfactant Substances 0.000 claims description 14
239000002245 particle Substances 0.000 claims description 13
QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 12
125000000217 alkyl group Chemical group 0.000 claims description 10
230000008569 process Effects 0.000 claims description 10
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
239000000203 mixture Substances 0.000 claims description 8
BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 7
229910000077 silane Inorganic materials 0.000 claims description 7
230000000379 polymerizing effect Effects 0.000 claims description 6
239000004094 surface-active agent Substances 0.000 claims description 6
239000002243 precursor Substances 0.000 claims description 5
238000000576 coating method Methods 0.000 claims description 4
150000003467 sulfuric acid derivatives Chemical class 0.000 claims description 4
239000006087 Silane Coupling Agent Substances 0.000 claims description 3
125000000129 anionic group Chemical group 0.000 claims description 3
239000011248 coating agent Substances 0.000 claims description 3
239000007822 coupling agent Substances 0.000 claims description 3
239000003973 paint Substances 0.000 claims description 3
239000004033 plastic Substances 0.000 claims description 3
229920003023 plastic Polymers 0.000 claims description 3
241000517645 Abra Species 0.000 claims description 2
150000008051 alkyl sulfates Chemical class 0.000 claims description 2
239000000945 filler Substances 0.000 claims description 2
238000000227 grinding Methods 0.000 claims description 2
229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 2
229920000570 polyether Polymers 0.000 claims description 2
239000002562 thickening agent Substances 0.000 claims description 2
UZZYXUGECOQHPU-UHFFFAOYSA-M n-octyl sulfate Chemical compound CCCCCCCCOS([O-])(=O)=O UZZYXUGECOQHPU-UHFFFAOYSA-M 0.000 claims 2
229940067739 octyl sulfate Drugs 0.000 claims 2
UZZYXUGECOQHPU-UHFFFAOYSA-N sulfuric acid monooctyl ester Natural products CCCCCCCCOS(O)(=O)=O UZZYXUGECOQHPU-UHFFFAOYSA-N 0.000 claims 2
241001132374 Asta Species 0.000 claims 1
239000004721 Polyphenylene oxide Substances 0.000 claims 1
150000001346 alkyl aryl ethers Chemical class 0.000 claims 1
239000003086 colorant Substances 0.000 claims 1
230000008878 coupling Effects 0.000 claims 1
238000010168 coupling process Methods 0.000 claims 1
238000005859 coupling reaction Methods 0.000 claims 1
238000000151 deposition Methods 0.000 claims 1
MOTZDAYCYVMXPC-UHFFFAOYSA-N dodecyl hydrogen sulfate Chemical compound CCCCCCCCCCCCOS(O)(=O)=O MOTZDAYCYVMXPC-UHFFFAOYSA-N 0.000 claims 1
229940043264 dodecyl sulfate Drugs 0.000 claims 1
238000004049 embossing Methods 0.000 claims 1
239000011521 glass Substances 0.000 claims 1
210000000056 organ Anatomy 0.000 claims 1
229920000642 polymer Polymers 0.000 claims 1
239000002904 solvent Substances 0.000 claims 1
239000000126 substance Substances 0.000 description 12
238000012360 testing method Methods 0.000 description 11
101150011439 abr1 gene Proteins 0.000 description 9
BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 9
230000000052 comparative effect Effects 0.000 description 8
229920005989 resin Polymers 0.000 description 8
239000011347 resin Substances 0.000 description 8
RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 7
239000000463 material Substances 0.000 description 7
125000004432 carbon atom Chemical group C* 0.000 description 6
238000005498 polishing Methods 0.000 description 6
229920000728 polyester Polymers 0.000 description 6
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 6
229910010271 silicon carbide Inorganic materials 0.000 description 6
239000002253 acid Substances 0.000 description 5
TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 5
239000003082 abrasive agent Substances 0.000 description 4
238000004519 manufacturing process Methods 0.000 description 4
239000003960 organic solvent Substances 0.000 description 4
WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
101150057659 Mlac1 gene Proteins 0.000 description 3
101100000406 Neosartorya fumigata (strain ATCC MYA-4609 / Af293 / CBS 101355 / FGSC A1100) abr2 gene Proteins 0.000 description 3
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
150000001875 compounds Chemical class 0.000 description 3
229910052751 metal Inorganic materials 0.000 description 3
239000002184 metal Substances 0.000 description 3
238000002360 preparation method Methods 0.000 description 3
230000008439 repair process Effects 0.000 description 3
229910052710 silicon Inorganic materials 0.000 description 3
239000010703 silicon Substances 0.000 description 3
239000011734 sodium Substances 0.000 description 3
229910052708 sodium Inorganic materials 0.000 description 3
239000007921 spray Substances 0.000 description 3
GPRLSGONYQIRFK-MNYXATJNSA-N triton Chemical compound [3H+] GPRLSGONYQIRFK-MNYXATJNSA-N 0.000 description 3
101100161875 Arabidopsis thaliana ACR2 gene Proteins 0.000 description 2
101100495264 Arabidopsis thaliana CDC25 gene Proteins 0.000 description 2
101150115013 DSP1 gene Proteins 0.000 description 2
QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
239000004820 Pressure-sensitive adhesive Substances 0.000 description 2
101100380266 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) ARR2 gene Proteins 0.000 description 2
150000007513 acids Chemical class 0.000 description 2
101150004068 acrB gene Proteins 0.000 description 2
229940048053 acrylate Drugs 0.000 description 2
229910052782 aluminium Inorganic materials 0.000 description 2
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
125000003118 aryl group Chemical group 0.000 description 2
150000001768 cations Chemical class 0.000 description 2
239000000919 ceramic Substances 0.000 description 2
CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 2
229910000422 cerium(IV) oxide Inorganic materials 0.000 description 2
238000007796 conventional method Methods 0.000 description 2
235000014113 dietary fatty acids Nutrition 0.000 description 2
239000002270 dispersing agent Substances 0.000 description 2
150000002170 ethers Chemical class 0.000 description 2
239000004744 fabric Substances 0.000 description 2
239000000194 fatty acid Substances 0.000 description 2
229930195729 fatty acid Natural products 0.000 description 2
239000000835 fiber Substances 0.000 description 2
125000002768 hydroxyalkyl group Chemical group 0.000 description 2
238000007654 immersion Methods 0.000 description 2
WTEVQBCEXWBHNA-YFHOEESVSA-N neral Chemical compound CC(C)=CCC\C(C)=C/C=O WTEVQBCEXWBHNA-YFHOEESVSA-N 0.000 description 2
150000003839 salts Chemical class 0.000 description 2
239000000758 substrate Substances 0.000 description 2
150000003871 sulfonates Chemical class 0.000 description 2
229920001169 thermoplastic Polymers 0.000 description 2
229920002803 thermoplastic polyurethane Polymers 0.000 description 2
239000004416 thermosoftening plastic Substances 0.000 description 2
FLEHQRTTWKDNGI-XTJILODYSA-N (1s,3r)-5-[(2e)-2-[(7ar)-1-[(2s)-5-(cyclopropylamino)pentan-2-yl]-7a-methyl-2,3,3a,5,6,7-hexahydro-1h-inden-4-ylidene]ethylidene]-2-methylidenecyclohexane-1,3-diol Chemical compound C([C@H](C)C1[C@]2(CCCC(/C2CC1)=C\C=C1C[C@@H](O)C(=C)[C@@H](O)C1)C)CCNC1CC1 FLEHQRTTWKDNGI-XTJILODYSA-N 0.000 description 1
LDVVTQMJQSCDMK-UHFFFAOYSA-N 1,3-dihydroxypropan-2-yl formate Chemical compound OCC(CO)OC=O LDVVTQMJQSCDMK-UHFFFAOYSA-N 0.000 description 1
HNSDLXPSAYFUHK-UHFFFAOYSA-N 1,4-bis(2-ethylhexyl) sulfosuccinate Chemical compound CCCCC(CC)COC(=O)CC(S(O)(=O)=O)C(=O)OCC(CC)CCCC HNSDLXPSAYFUHK-UHFFFAOYSA-N 0.000 description 1
NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
102100030613 Carboxypeptidase A1 Human genes 0.000 description 1
241000631130 Chrysophyllum argenteum Species 0.000 description 1
WTEVQBCEXWBHNA-UHFFFAOYSA-N Citral Natural products CC(C)=CCCC(C)=CC=O WTEVQBCEXWBHNA-UHFFFAOYSA-N 0.000 description 1
101100285518 Drosophila melanogaster how gene Proteins 0.000 description 1
HSRJKNPTNIJEKV-UHFFFAOYSA-N Guaifenesin Chemical compound COC1=CC=CC=C1OCC(O)CO HSRJKNPTNIJEKV-UHFFFAOYSA-N 0.000 description 1
101000772551 Homo sapiens Carboxypeptidase A1 Proteins 0.000 description 1
101000619805 Homo sapiens Peroxiredoxin-5, mitochondrial Proteins 0.000 description 1
DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
229920000877 Melamine resin Polymers 0.000 description 1
240000007817 Olea europaea Species 0.000 description 1
229910019142 PO4 Inorganic materials 0.000 description 1
102100022078 Peroxiredoxin-5, mitochondrial Human genes 0.000 description 1
239000004698 Polyethylene Substances 0.000 description 1
239000004743 Polypropylene Substances 0.000 description 1
ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
XDXHAEQXIBQUEZ-UHFFFAOYSA-N Ropinirole hydrochloride Chemical compound Cl.CCCN(CCC)CCC1=CC=CC2=C1CC(=O)N2 XDXHAEQXIBQUEZ-UHFFFAOYSA-N 0.000 description 1
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 description 1
229920013810 TRITON GR-5M Polymers 0.000 description 1
DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 1
NOZAQBYNLKNDRT-UHFFFAOYSA-N [diacetyloxy(ethenyl)silyl] acetate Chemical compound CC(=O)O[Si](OC(C)=O)(OC(C)=O)C=C NOZAQBYNLKNDRT-UHFFFAOYSA-N 0.000 description 1
238000005299 abrasion Methods 0.000 description 1
238000009825 accumulation Methods 0.000 description 1
239000000654 additive Substances 0.000 description 1
125000003342 alkenyl group Chemical group 0.000 description 1
150000003973 alkyl amines Chemical class 0.000 description 1
125000002877 alkyl aryl group Chemical group 0.000 description 1
230000004075 alteration Effects 0.000 description 1
150000001408 amides Chemical class 0.000 description 1
150000001412 amines Chemical class 0.000 description 1
229920003180 amino resin Polymers 0.000 description 1
150000003863 ammonium salts Chemical class 0.000 description 1
239000007864 aqueous solution Substances 0.000 description 1
125000004429 atom Chemical group 0.000 description 1
239000011575 calcium Substances 0.000 description 1
229910052791 calcium Inorganic materials 0.000 description 1
229910052799 carbon Inorganic materials 0.000 description 1
239000003153 chemical reaction reagent Substances 0.000 description 1
239000003795 chemical substances by application Substances 0.000 description 1
WTEVQBCEXWBHNA-JXMROGBWSA-N citral A Natural products CC(C)=CCC\C(C)=C\C=O WTEVQBCEXWBHNA-JXMROGBWSA-N 0.000 description 1
229940000425 combination drug Drugs 0.000 description 1
230000002844 continuous effect Effects 0.000 description 1
229920001577 copolymer Polymers 0.000 description 1
229920006037 cross link polymer Polymers 0.000 description 1
238000005520 cutting process Methods 0.000 description 1
XLJMAIOERFSOGZ-UHFFFAOYSA-M cyanate Chemical compound [O-]C#N XLJMAIOERFSOGZ-UHFFFAOYSA-M 0.000 description 1
238000013461 design Methods 0.000 description 1
239000003599 detergent Substances 0.000 description 1
229910003460 diamond Inorganic materials 0.000 description 1
239000010432 diamond Substances 0.000 description 1
KTQYJQFGNYHXMB-UHFFFAOYSA-N dichloro(methyl)silicon Chemical compound C[Si](Cl)Cl KTQYJQFGNYHXMB-UHFFFAOYSA-N 0.000 description 1
VTEHVUWHCBXMPI-UHFFFAOYSA-N dichloro-bis(prop-2-enyl)silane Chemical compound C=CC[Si](Cl)(Cl)CC=C VTEHVUWHCBXMPI-UHFFFAOYSA-N 0.000 description 1
HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
LIKFHECYJZWXFJ-UHFFFAOYSA-N dimethyldichlorosilane Chemical compound C[Si](C)(Cl)Cl LIKFHECYJZWXFJ-UHFFFAOYSA-N 0.000 description 1
238000003618 dip coating Methods 0.000 description 1
239000000428 dust Substances 0.000 description 1
238000010894 electron beam technology Methods 0.000 description 1
239000003995 emulsifying agent Substances 0.000 description 1
QHZOMAXECYYXGP-UHFFFAOYSA-N ethene;prop-2-enoic acid Chemical compound C=C.OC(=O)C=C QHZOMAXECYYXGP-UHFFFAOYSA-N 0.000 description 1
229920006226 ethylene-acrylic acid Polymers 0.000 description 1
150000004665 fatty acids Chemical class 0.000 description 1
239000006260 foam Substances 0.000 description 1
238000009472 formulation Methods 0.000 description 1
239000003292 glue Substances 0.000 description 1
238000007646 gravure printing Methods 0.000 description 1
125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 1
150000002576 ketones Chemical class 0.000 description 1
229910052744 lithium Inorganic materials 0.000 description 1
238000011068 loading method Methods 0.000 description 1
239000011777 magnesium Substances 0.000 description 1
229910052749 magnesium Inorganic materials 0.000 description 1
239000004579 marble Substances 0.000 description 1
QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
229910052753 mercury Inorganic materials 0.000 description 1
239000005048 methyldichlorosilane Substances 0.000 description 1
239000002480 mineral oil Substances 0.000 description 1
235000010446 mineral oil Nutrition 0.000 description 1
238000002156 mixing Methods 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
239000002105 nanoparticle Substances 0.000 description 1
150000004767 nitrides Chemical class 0.000 description 1
150000002825 nitriles Chemical class 0.000 description 1
239000002736 nonionic surfactant Substances 0.000 description 1
239000004745 nonwoven fabric Substances 0.000 description 1
230000003287 optical effect Effects 0.000 description 1
230000002093 peripheral effect Effects 0.000 description 1
229920001568 phenolic resin Polymers 0.000 description 1
239000005011 phenolic resin Substances 0.000 description 1
239000005054 phenyltrichlorosilane Substances 0.000 description 1
239000010452 phosphate Substances 0.000 description 1
239000004417 polycarbonate Substances 0.000 description 1
229920000515 polycarbonate Polymers 0.000 description 1
229920000647 polyepoxide Polymers 0.000 description 1
229920000573 polyethylene Polymers 0.000 description 1
229920001228 polyisocyanate Polymers 0.000 description 1
239000005056 polyisocyanate Substances 0.000 description 1
229920001155 polypropylene Polymers 0.000 description 1
229920002635 polyurethane Polymers 0.000 description 1
239000004814 polyurethane Substances 0.000 description 1
239000011591 potassium Substances 0.000 description 1
229910052700 potassium Inorganic materials 0.000 description 1
XAEFZNCEHLXOMS-UHFFFAOYSA-M potassium benzoate Chemical compound [K+].[O-]C(=O)C1=CC=CC=C1 XAEFZNCEHLXOMS-UHFFFAOYSA-M 0.000 description 1
QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
230000001105 regulatory effect Effects 0.000 description 1
238000007650 screen-printing Methods 0.000 description 1
APSBXTVYXVQYAB-UHFFFAOYSA-M sodium docusate Chemical compound [Na+].CCCCC(CC)COC(=O)CC(S([O-])(=O)=O)C(=O)OCC(CC)CCCC APSBXTVYXVQYAB-UHFFFAOYSA-M 0.000 description 1
BTURAGWYSMTVOW-UHFFFAOYSA-M sodium dodecanoate Chemical compound [Na+].CCCCCCCCCCCC([O-])=O BTURAGWYSMTVOW-UHFFFAOYSA-M 0.000 description 1
BYKRNSHANADUFY-UHFFFAOYSA-M sodium octanoate Chemical compound [Na+].CCCCCCCC([O-])=O BYKRNSHANADUFY-UHFFFAOYSA-M 0.000 description 1
229940067741 sodium octyl sulfate Drugs 0.000 description 1
159000000000 sodium salts Chemical class 0.000 description 1
FCZYGJBVLGLYQU-UHFFFAOYSA-M sodium;2-[2-[2-[4-(2,4,4-trimethylpentan-2-yl)phenoxy]ethoxy]ethoxy]ethanesulfonate Chemical compound [Na+].CC(C)(C)CC(C)(C)C1=CC=C(OCCOCCOCCS([O-])(=O)=O)C=C1 FCZYGJBVLGLYQU-UHFFFAOYSA-M 0.000 description 1
WFRKJMRGXGWHBM-UHFFFAOYSA-M sodium;octyl sulfate Chemical compound [Na+].CCCCCCCCOS([O-])(=O)=O WFRKJMRGXGWHBM-UHFFFAOYSA-M 0.000 description 1
239000007787 solid Substances 0.000 description 1
229920002994 synthetic fiber Polymers 0.000 description 1
MDDUHVRJJAFRAU-YZNNVMRBSA-N tert-butyl-[(1r,3s,5z)-3-[tert-butyl(dimethyl)silyl]oxy-5-(2-diphenylphosphorylethylidene)-4-methylidenecyclohexyl]oxy-dimethylsilane Chemical compound C1[C@@H](O[Si](C)(C)C(C)(C)C)C[C@H](O[Si](C)(C)C(C)(C)C)C(=C)\C1=C/CP(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 MDDUHVRJJAFRAU-YZNNVMRBSA-N 0.000 description 1
238000010998 test method Methods 0.000 description 1
125000003698 tetramethyl group Chemical group [H]C([H])([H])* 0.000 description 1
229920005992 thermoplastic resin Polymers 0.000 description 1
229920001187 thermosetting polymer Polymers 0.000 description 1
239000004634 thermosetting polymer Substances 0.000 description 1
ORVMIVQULIKXCP-UHFFFAOYSA-N trichloro(phenyl)silane Chemical compound Cl[Si](Cl)(Cl)C1=CC=CC=C1 ORVMIVQULIKXCP-UHFFFAOYSA-N 0.000 description 1
DENFJSAFJTVPJR-UHFFFAOYSA-N triethoxy(ethyl)silane Chemical compound CCO[Si](CC)(OCC)OCC DENFJSAFJTVPJR-UHFFFAOYSA-N 0.000 description 1
CPUDPFPXCZDNGI-UHFFFAOYSA-N triethoxy(methyl)silane Chemical compound CCO[Si](C)(OCC)OCC CPUDPFPXCZDNGI-UHFFFAOYSA-N 0.000 description 1
QQQSFSZALRVCSZ-UHFFFAOYSA-N triethoxysilane Chemical compound CCO[SiH](OCC)OCC QQQSFSZALRVCSZ-UHFFFAOYSA-N 0.000 description 1
YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical compound CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 description 1
229940096522 trimethylolpropane triacrylate Drugs 0.000 description 1
125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
229920002554 vinyl polymer Polymers 0.000 description 1
235000012431 wafers Nutrition 0.000 description 1
238000004078 waterproofing Methods 0.000 description 1
239000002023 wood Substances 0.000 description 1

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
- B24D3/346—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties utilised during polishing, or grinding operation

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Polishing Bodies And Polishing Tools (AREA)
Mechanical Treatment Of Semiconductor (AREA)

ZA200605221A 2003-11-26 2006-06-23 Method of abrading a workpiece ZA200605221B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US72376503A	2003-11-26	2003-11-26

Publications (1)

Publication Number	Publication Date
ZA200605221B true ZA200605221B (en)	2007-12-27

Family

ID=34592371

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
ZA200605221A ZA200605221B (en)	2003-11-26	2006-06-23	Method of abrading a workpiece

Country Status (7)

Country	Link
US (1)	US7278904B2 (de)
EP (1)	EP1697084A1 (de)
JP (1)	JP2007514553A (de)
CN (1)	CN1886232A (de)
BR (1)	BRPI0416947A (de)
WO (1)	WO2005053904A1 (de)
ZA (1)	ZA200605221B (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20070243798A1 (en) *	2006-04-18	2007-10-18	3M Innovative Properties Company	Embossed structured abrasive article and method of making and using the same
US7410413B2 (en) *	2006-04-27	2008-08-12	3M Innovative Properties Company	Structured abrasive article and method of making and using the same
US7985269B2 (en) *	2006-12-04	2011-07-26	3M Innovative Properties Company	Nonwoven abrasive articles and methods of making the same
US8038750B2 (en) *	2007-07-13	2011-10-18	3M Innovative Properties Company	Structured abrasive with overlayer, and method of making and using the same
WO2009129384A2 (en) *	2008-04-18	2009-10-22	Saint-Gobain Abrasives, Inc.	Hydrophilic and hydrophobic silane surface modification of abrasive grains
JPWO2010098278A1 (ja) *	2009-02-24	2012-08-30	ニッタ・ハース株式会社	金属膜研磨用組成物
DE102009030297B3 (de) *	2009-06-24	2011-01-20	Siltronic Ag	Verfahren zum Polieren einer Halbleiterscheibe
US8348723B2 (en) *	2009-09-16	2013-01-08	3M Innovative Properties Company	Structured abrasive article and method of using the same
US8408627B2 (en) *	2009-12-15	2013-04-02	3M Innovative Properties Company	Pick up truck, rail cap assembly with lighting system and method of use
JP5896925B2 (ja) *	2010-02-24	2016-03-30	ビーエーエスエフソシエタス・ヨーロピアＢａｓｆＳｅ	研磨物品、その製造方法及びその使用方法
JP5617387B2 (ja) *	2010-07-06	2014-11-05	富士電機株式会社	垂直磁気記録媒体用基板の製造方法、および、該製造方法により製造される垂直磁気記録媒体用基板
CN103339218A (zh) *	2010-12-30	2013-10-02	圣戈班磨料磨具有限公司	涂覆的磨料聚集体及含其的产品
WO2013049526A2 (en)	2011-09-29	2013-04-04	Saint-Gobain Abrasives, Inc.	Abrasive products and methods for finishing hard surfaces
WO2013106575A1 (en)	2012-01-10	2013-07-18	Saint-Gobain Abrasives, Inc.	Abrasive products and methods for finishing coated surfaces
GB2515946B (en)	2012-03-16	2017-11-15	Saint Gobain Abrasives Inc	Abrasive products and methods for finishing surfaces
US8968435B2 (en)	2012-03-30	2015-03-03	Saint-Gobain Abrasives, Inc.	Abrasive products and methods for fine polishing of ophthalmic lenses
US20150060400A1 (en) *	2012-04-18	2015-03-05	Fujimi Incorporated	Polishing composition
WO2014016941A1 (ja) *	2012-07-26	2014-01-30	岩本宏憲	Ｐｃ製ライトカバーのリペア方法
SG11201502225XA (en) *	2012-09-21	2015-05-28	3M Innovative Properties Co	Incorporating additives into fixed abrasive webs for improved cmp performance
DE102013103643B4 (de)	2013-04-11	2019-11-07	Lukas-Erzett Vereinigte Schleif- Und Fräswerkzeugfabriken Gmbh & Co. Kg	Schleifwerkzeug und Verwendung eines Schleifwerkzeuges
SG11201510027RA (en)	2013-06-07	2016-01-28	3M Innovative Properties Co	Method of forming a recess in a substrate, abrasive wheel, and cover
US10343260B2 (en)	2014-02-14	2019-07-09	3M Innovative Properties Company	Abrasive article and method of using the same
WO2015157412A1 (en)	2014-04-10	2015-10-15	Shell Oil Company	A method of making a supported gas separation membrane
KR102547022B1 (ko) *	2016-12-22	2023-06-22	쓰리엠 이노베이티브 프로퍼티즈 컴파니	다수의 색을 갖는 수지 접합된 연마 물품
US10547059B2 (en)	2018-02-21	2020-01-28	Duracell U.S. Operations, Inc.	Sulfate and sulfonate based surfactants for alkaline battery anode
CN110421494B (zh) *	2019-08-05	2020-06-12	衢州学院	一种基于溶胶凝胶法的树脂金属复合镜面磨削砂轮及其制备方法

Family Cites Families (85)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5262073A (en) *	1978-08-30	1993-11-16	Mobil Oil Corporation	Lubricant composition
US4842903A (en) *	1988-04-12	1989-06-27	Ashland Oil, Inc.	Wax, sulfonate, dispersing oil, sepiolite clay compositions for protective soft coatings
US5014468A (en) *	1989-05-05	1991-05-14	Norton Company	Patterned coated abrasive for fine surface finishing
EP0509058A4 (en) *	1990-01-05	1993-11-18	Maspar Computer Corporation	Router chip with quad-crossbar and hyperbar personalities
US5152917B1 (en) *	1991-02-06	1998-01-13	Minnesota Mining & Mfg	Structured abrasive article
US5378251A (en) *	1991-02-06	1995-01-03	Minnesota Mining And Manufacturing Company	Abrasive articles and methods of making and using same
US5107626A (en) *	1991-02-06	1992-04-28	Minnesota Mining And Manufacturing Company	Method of providing a patterned surface on a substrate
US5437754A (en) *	1992-01-13	1995-08-01	Minnesota Mining And Manufacturing Company	Abrasive article having precise lateral spacing between abrasive composite members
US5286782A (en) *	1992-08-31	1994-02-15	E. I. Du Pont De Nemours And Company	Coating composition of an acrylic polymer, polyol and polyisocyanate crosslinking agent
US5354797A (en) *	1992-08-31	1994-10-11	E. I. Du Pont De Nemours And Company	Coating composition of hydroxy functional acrylic polymer, polyol and polyisocyanate crosslinking agent
ATE159883T1 (de) *	1992-12-17	1997-11-15	Minnesota Mining & Mfg	Aufschlaemmungen mit reduzierter viskositaet, daraus hergestellte schleifgegenstaende und verfahren zur herstellung der gegenstaende
US5342419A (en) *	1992-12-31	1994-08-30	Minnesota Mining And Manufacturing Company	Abrasive composites having a controlled rate of erosion, articles incorporating same, and methods of making and using same
US5435816A (en) *	1993-01-14	1995-07-25	Minnesota Mining And Manufacturing Company	Method of making an abrasive article
KR100327295B1 (ko) *	1993-05-26	2002-08-13	미네소타 마이닝 앤드 매뉴팩춰링 캄파니	가공부재의표면을연마하는방법
US5709598A (en) *	1993-06-02	1998-01-20	Dai Nippon Printing Co., Ltd.	Abrasive tape and method of producing the same
ES2109709T3 (es) *	1993-06-17	1998-01-16	Minnesota Mining & Mfg	Articulos abrasivos con diseño y metodos de fabricacion y empleo de los mismos.
US5549962A (en) *	1993-06-30	1996-08-27	Minnesota Mining And Manufacturing Company	Precisely shaped particles and method of making the same
US5489235A (en) *	1993-09-13	1996-02-06	Minnesota Mining And Manufacturing Company	Abrasive article and method of making same
SG64333A1 (en) *	1993-09-13	1999-04-27	Minnesota Mining & Mfg	Abrasive article method of manufacture of same method of using same for finishing and a production tool
US5658184A (en) *	1993-09-13	1997-08-19	Minnesota Mining And Manufacturing Company	Nail tool and method of using same to file, polish and/or buff a fingernail or a toenail
US5632668A (en) *	1993-10-29	1997-05-27	Minnesota Mining And Manufacturing Company	Method for the polishing and finishing of optical lenses
US5453312A (en) *	1993-10-29	1995-09-26	Minnesota Mining And Manufacturing Company	Abrasive article, a process for its manufacture, and a method of using it to reduce a workpiece surface
US5454844A (en) *	1993-10-29	1995-10-03	Minnesota Mining And Manufacturing Company	Abrasive article, a process of making same, and a method of using same to finish a workpiece surface
US5346556A (en) *	1993-11-01	1994-09-13	Xerox Corporation	Lathing and cleaning process for photoreceptor substrates
CA2134156A1 (en) *	1993-11-22	1995-05-23	Thomas P. Klun	Coatable compositions, abrasive articles made therefrom, and methods of making and using same
US5580647A (en) *	1993-12-20	1996-12-03	Minnesota Mining And Manufacturing Company	Abrasive articles incorporating addition polymerizable resins and reactive diluents
EP0745020B1 (de) *	1994-02-22	1999-07-28	Minnesota Mining And Manufacturing Company	Schleifartikel, verfahren zum herstellen derselben, und verfahren zum anwenden desselben bei endbearbeitung
BR9509116A (pt) *	1994-09-30	1997-11-18	Minnesota Mining & Mfg	Artigo abrasivo revestido processos para produzir o mesmo e processo para desbastar uma peça dura
WO1996027189A1 (en) *	1995-03-02	1996-09-06	Minnesota Mining And Manufacturing Company	Method of texturing a substrate using a structured abrasive article
US5837763A (en) *	1995-06-07	1998-11-17	Amcol International Corporation	Compositions and methods for manufacturing waxes filled with intercalates and exfoliates formed with oligomers and polymers
US6046110A (en) *	1995-06-08	2000-04-04	Kabushiki Kaisha Toshiba	Copper-based metal polishing solution and method for manufacturing a semiconductor device
EP0846041B1 (de) *	1995-08-11	2003-04-23	Minnesota Mining And Manufacturing Company	Verfahren zur herstellung eines beschichteten schleifartikels mit verschiedenen scheuereigenschaften
US5958794A (en) *	1995-09-22	1999-09-28	Minnesota Mining And Manufacturing Company	Method of modifying an exposed surface of a semiconductor wafer
US5975987A (en) *	1995-10-05	1999-11-02	3M Innovative Properties Company	Method and apparatus for knurling a workpiece, method of molding an article with such workpiece, and such molded article
EP0961670B1 (de)	1995-10-20	2003-07-02	Minnesota Mining And Manufacturing Company	Anorganische phosphate enthaltende schleifartikel
US5702811A (en) *	1995-10-20	1997-12-30	Ho; Kwok-Lun	High performance abrasive articles containing abrasive grains and nonabrasive composite grains
US5643669A (en) *	1996-02-08	1997-07-01	Minnesota Mining And Manufacturing Company	Curable water-based coating compositions and cured products thereof
US5700302A (en) *	1996-03-15	1997-12-23	Minnesota Mining And Manufacturing Company	Radiation curable abrasive article with tie coat and method
WO1997042003A1 (en) *	1996-05-03	1997-11-13	Minnesota Mining And Manufacturing Company	Method and apparatus for manufacturing abrasive articles
DE69627538T2 (de) *	1996-05-03	2004-04-08	Minnesota Mining And Manufacturing Company, St. Paul	Nichtgewebte schleifmittel
US5667542A (en) *	1996-05-08	1997-09-16	Minnesota Mining And Manufacturing Company	Antiloading components for abrasive articles
AU2079597A (en) *	1996-05-08	1997-11-26	Minnesota Mining And Manufacturing Company	Abrasive article comprising an antiloading component
US6080215A (en) *	1996-08-12	2000-06-27	3M Innovative Properties Company	Abrasive article and method of making such article
US6475253B2 (en) *	1996-09-11	2002-11-05	3M Innovative Properties Company	Abrasive article and method of making
US6503136B1 (en) *	1996-09-24	2003-01-07	Dymon, Inc.	All purpose cleaner and polish in abrasive applicator
US5876268A (en)	1997-01-03	1999-03-02	Minnesota Mining And Manufacturing Company	Method and article for the production of optical quality surfaces on glass
US5863306A (en) *	1997-01-07	1999-01-26	Norton Company	Production of patterned abrasive surfaces
US5833724A (en) *	1997-01-07	1998-11-10	Norton Company	Structured abrasives with adhered functional powders
US5851247A (en) *	1997-02-24	1998-12-22	Minnesota Mining & Manufacturing Company	Structured abrasive article adapted to abrade a mild steel workpiece
US6231629B1 (en) *	1997-03-07	2001-05-15	3M Innovative Properties Company	Abrasive article for providing a clear surface finish on glass
US5888119A (en) *	1997-03-07	1999-03-30	Minnesota Mining And Manufacturing Company	Method for providing a clear surface finish on glass
US6194317B1 (en) *	1998-04-30	2001-02-27	3M Innovative Properties Company	Method of planarizing the upper surface of a semiconductor wafer
US5908477A (en) *	1997-06-24	1999-06-01	Minnesota Mining & Manufacturing Company	Abrasive articles including an antiloading composition
US5946991A (en) *	1997-09-03	1999-09-07	3M Innovative Properties Company	Method for knurling a workpiece
US5942015A (en) *	1997-09-16	1999-08-24	3M Innovative Properties Company	Abrasive slurries and abrasive articles comprising multiple abrasive particle grades
US5928394A (en) *	1997-10-30	1999-07-27	Minnesota Mining And Manufacturing Company	Durable abrasive articles with thick abrasive coatings
US6039775A (en) *	1997-11-03	2000-03-21	3M Innovative Properties Company	Abrasive article containing a grinding aid and method of making the same
AU756298B2 (en) *	1998-02-06	2003-01-09	E.I. Du Pont De Nemours And Company	Silicon reactive oligomers and coating compositions made therefrom
US6139594A (en) *	1998-04-13	2000-10-31	3M Innovative Properties Company	Abrasive article with tie coat and method
US6217432B1 (en) *	1998-05-19	2001-04-17	3M Innovative Properties Company	Abrasive article comprising a barrier coating
US6017872A (en) *	1998-06-08	2000-01-25	Ecolab Inc.	Compositions and process for cleaning and finishing hard surfaces
US6048375A (en) *	1998-12-16	2000-04-11	Norton Company	Coated abrasive
US6238449B1 (en) *	1998-12-22	2001-05-29	3M Innovative Properties Company	Abrasive article having an abrasive coating containing a siloxane polymer
US6048677A (en) *	1998-12-28	2000-04-11	Eastman Kodak Company	Abrasive lubricant layer for photographic element
US6056794A (en) *	1999-03-05	2000-05-02	3M Innovative Properties Company	Abrasive articles having bonding systems containing abrasive particles
US6238592B1 (en) *	1999-03-10	2001-05-29	3M Innovative Properties Company	Working liquids and methods for modifying structured wafers suited for semiconductor fabrication
ATE308591T1 (de) *	1999-03-17	2005-11-15	Du Pont	Klarlackzusammensetzung mit hohem feststoffgehalt
US6551933B1 (en) *	1999-03-25	2003-04-22	Beaver Creek Concepts Inc	Abrasive finishing with lubricant and tracking
US6458018B1 (en) *	1999-04-23	2002-10-01	3M Innovative Properties Company	Abrasive article suitable for abrading glass and glass ceramic workpieces
US6293980B2 (en) *	1999-12-20	2001-09-25	Norton Company	Production of layered engineered abrasive surfaces
WO2001053040A1 (en) *	2000-01-19	2001-07-26	Rodel Holdings, Inc.	Printing of polishing pads
US6638327B2 (en) *	2000-03-02	2003-10-28	3M Innovative Properties Company	Method for repairing and lustering defects on hydrophilic coat surface
US6432181B1 (en) *	2000-03-03	2002-08-13	Resource Development, L.L.C.	Silicone compositions, methods of making and using VOC free, non-flammable creams, pastes and powders to render nonporous surfaces water, soil and stain repellent
KR100733948B1 (ko) *	2000-04-28	2007-07-02	쓰리엠 이노베이티브 프로퍼티즈 캄파니	유리 연삭을 위한 연마 제품 및 방법
US6638144B2 (en) *	2000-04-28	2003-10-28	3M Innovative Properties Company	Method of cleaning glass
US20020090901A1 (en) *	2000-11-03	2002-07-11	3M Innovative Properties Company	Flexible abrasive product and method of making and using the same
US20030022604A1 (en) *	2001-05-07	2003-01-30	3M Innovative Properties Company	Abrasive product and method of making and using the same
US20030207659A1 (en) *	2000-11-03	2003-11-06	3M Innovative Properties Company	Abrasive product and method of making and using the same
US6645624B2 (en)	2000-11-10	2003-11-11	3M Innovative Properties Company	Composite abrasive particles and method of manufacture
KR20040002907A (ko) *	2001-04-12	2004-01-07	로델 홀딩스 인코포레이티드	계면활성제를 갖는 연마 조성물
US6846232B2 (en) *	2001-12-28	2005-01-25	3M Innovative Properties Company	Backing and abrasive product made with the backing and method of making and using the backing and abrasive product
US6949128B2 (en) *	2001-12-28	2005-09-27	3M Innovative Properties Company	Method of making an abrasive product
CA2367812A1 (en) *	2002-01-15	2003-07-15	Robert F. Smith	Abrasive article with hydrophilic/lipophilic coating
US7553345B2 (en) *	2002-12-26	2009-06-30	Kao Corporation	Polishing composition
US6910951B2 (en) *	2003-02-24	2005-06-28	Dow Global Technologies, Inc.	Materials and methods for chemical-mechanical planarization

2004
- 2004-11-05 BR BRPI0416947-6A patent/BRPI0416947A/pt not_active Application Discontinuation
- 2004-11-05 CN CNA200480035000XA patent/CN1886232A/zh active Pending
- 2004-11-05 EP EP04800862A patent/EP1697084A1/de not_active Withdrawn
- 2004-11-05 WO PCT/US2004/037120 patent/WO2005053904A1/en not_active Application Discontinuation
- 2004-11-05 JP JP2006541229A patent/JP2007514553A/ja not_active Withdrawn
- 2004-11-05 US US10/982,503 patent/US7278904B2/en not_active Expired - Lifetime
2006
- 2006-06-23 ZA ZA200605221A patent/ZA200605221B/en unknown

Also Published As

Publication number	Publication date
US7278904B2 (en)	2007-10-09
EP1697084A1 (de)	2006-09-06
US20050113005A1 (en)	2005-05-26
WO2005053904A1 (en)	2005-06-16
BRPI0416947A (pt)	2007-02-13
CN1886232A (zh)	2006-12-27
JP2007514553A (ja)	2007-06-07

Publication	Publication Date	Title
ZA200605221B (en)	2007-12-27	Method of abrading a workpiece
EP2477789B1 (de)	2014-07-09	Strukturiertes schleifmittel und verfahren zu seiner verwendung
JP6899219B2 (ja)	2021-07-07	複数の研磨要素の異なるセットを有する研磨材
US8425278B2 (en)	2013-04-23	Structured abrasive article and method of using the same
CN101272883B (zh)	2011-12-07	适形研磨制品及其制备和使用方法
JP4801116B2 (ja)	2011-10-26	抗目つまり処理
JP6317842B1 (ja)	2018-04-25	研磨パッド及びその製造方法
JP4554942B2 (ja)	2010-09-29	目詰まり防止処理剤
US6638144B2 (en)	2003-10-28	Method of cleaning glass
US9221151B2 (en)	2015-12-29	Abrasive articles including a blend of abrasive grains and method of forming same
JP2002355763A (ja)	2002-12-10	合成砥石
US20210024799A1 (en)	2021-01-28	Structured abrasives containing polishing materials for use in the home
EP1276592B1 (de)	2005-01-26	Verfahren zum polieren und reinigen von glas
WO2018093652A1 (en)	2018-05-24	Structured abrasive article including features with improved structural integrity
JP2002292556A (ja)	2002-10-08	シリコンウエハ鏡面研磨用スラリー、砥石、パッド及び研磨液、並びにこれらを用いたシリコンウエハの鏡面研磨方法
WO2024069578A1 (en)	2024-04-04	Supersize coating composition, abrasive article, and method of making abrasive article
JPH0639736A (ja)	1994-02-15	研磨布紙