WO2025207148A1

WO2025207148A1 - Vacuum insulated panel with evacuation tube mounting structure and method

Info

Publication number: WO2025207148A1
Application number: PCT/US2024/052381
Authority: WO
Inventors: Scott V. Thomsen; Christian Bischoff
Original assignee: Luxwall Inc
Current assignee: Luxwall Inc
Priority date: 2024-03-25
Filing date: 2024-10-22
Publication date: 2025-10-02
Anticipated expiration: 2026-09-25

Abstract

A vacuum insulating panel may include: a first substrate; a second substrate; a plurality of spacers provided in a gap between at least the first and second substrates, wherein the gap is at pressure less than atmospheric pressure; an evacuation tube extending at least partly into an aperture in one of the substrates; and an evacuation tube seal at least partially surrounding the tube. Relationship(s) between the tube, and bore(s) in the substrate for mounting the tube, may be designed to reduce tube tilting.

Description

VACUUM INSULATED PANEL WITH EVACUATION TUBE MOUNTING

STRUCTURE AND METHOD

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is related to and claims priority on United States Provisional Application No. 63/569,240, filed March 25, 2024, the disclosure of which is hereby incorporated herein by reference in its entirety for all purposes.

FIELD

Certain example embodiments are generally related to vacuum insulated devices such as vacuum insulating panels that may be used for windows or the like, and/or methods of making same.

BACKGROUND AND SUMMARY

Vacuum insulated panels are known in the art. For example, and without limitation, vacuum insulating panels are disclosed in U.S. Patent Nos. 5,124,185, 5,657,607, 5,664,395, 7,045,181, 7,115,308, 8,821,999, 10,153,389, and 11,124,450, the disclosures of which are all hereby incorporated herein by reference in their entireties.

As discussed and/or shown in one or more of the above patent documents, a vacuum insulating panel typically includes an outboard substrate, an inboard substrate, a hermetic edge seal, a sorption getter, a pump-out port, and spacers (e.g., pillars) sandwiched between at least the two substrates. The gap between the substrates may be at a pressure less than atmospheric pressure to provide insulating properties. Providing a vacuum in the space between the substrates reduces conduction and convection heat transport, and thus provides insulating properties. For example, a vacuum insulating panel provides thermal insulation resistance by reducing convective energy between the two substrates, reducing conductive energy between the two transparent substrates, and reducing radiative energy with a low-emissivity (low-E) coating provided on one of the substrates. Vacuum insulating panels may be used in window applications (e.g., for commercial and/or residential windows), and/or for other applications such as commercial refrigeration and consumer appliance applications.

Conventional vacuum insulating panels have had problems with seal structures for evacuation tubes, leading to breakage and/or cracking of the seal structure thereby losing hermiticity and resulting in pre-mature window failures for example. In certain example embodiments herein, structure(s) and/or method(s) is/are provided to improve evacuation structures such as tube(s), mounting aperture(s), and/or seal(s) therefor.

In certain example embodiments, there may be provided a vacuum insulating panel comprising: a first glass substrate; a second glass substrate; a plurality of spacers provided in a gap between at least the first and second glass substrates, wherein the gap is at pressure less than atmospheric pressure; a first bore, a second bore, and a third bore defined in the first substrate, the first bore being located further from the second substrate than is the third bore, and wherein the second bore is located between at least the first and third bores, wherein the first, second, and third bores have different sizes, wherein at least one diameter and/or width DBI of the first bore is greater than at least one diameter and/or width DB2 of the second bore, and the diameter and/or width DB2 of the second bore is greater than at least one diameter and/or width DBS of the third bore, so that as viewed cross sectionally at at least one location DBI > DB2 > DB3; an evacuation tube, having a tube length TL and an outer size and/or diameter ODT, provided in the first and second bores; a tube seal supported on at least a first support surface at a base of the first bore and surrounding at least a periphery of the evacuation tube as viewed from above; wherein a second support surface, at a base of the second bore, is configured to support at least the evacuation tube; and wherein (DB2 - ODT)/HB2 is no greater than 0.09, where HB2 is a height of the second bore extending from the second support surface to the first support surface.

In certain example embodiments, there may be provided a method of making a vacuum insulating panel comprising: a first glass substrate; a second glass substrate; a plurality of spacers provided in a gap between at least the first and second glass substrates; a first bore, a second bore, and a third bore defined in the first substrate, the first bore being located further from the second substrate than is the third bore, and wherein the second bore is located between at least the first and third bores, wherein at least one diameter and/or width DBI of the first bore is greater than at least one diameter and/or width DB2 of the second bore, and the diameter and/or width DB2 of the second bore is greater than at least one diameter and/or width DB3 of the third bore_; where the method may comprise: providing an evacuation tube, having a tube length TL and an outer diameter and/or size ODT, in the first and second bores of the first glass substrate, so that the evacuation tube is supported by a second support surface at a base of the second bore, and wherein (DB2 - 0DT)/HB2 is no greater than 0.09, where HB2 is a height of the second bore, in order to reduce and/or minimize tilting of the evacuation tube during formation of a tube seal and/or sealing of the tube; using a laser to form the tube seal, the tube seal being supported on at least a first support surface at a base of the first bore; evacuating the gap between at least the first and second glass substrates via the evacuation tube; and sealing an end of the evacuation tube via laser or in any other suitable manner.

In certain example embodiments, there may be provided a vacuum insulating panel comprising: a first substrate; a second substrate; a plurality of spacers provided in a gap between at least the first and second substrates, wherein the gap is at pressure less than atmospheric pressure; a first bore, a second bore, and a third bore defined in the first substrate, the first bore being located further from the second substrate than is the third bore, and wherein the second bore is located between at least the first and third bores, wherein the first, second, and third bores have different sizes, wherein at least one diameter and/or width DBI of the first bore is greater than at least one diameter and/or width DB2 of the second bore_; an evacuation tube, having a tube length TL and an outer size and/or diameter ODT, provided in the first and second bores; a tube seal supported on at least a first support surface at a base of the first bore; wherein a second support surface, at a base of the second bore, is configured to support at least the evacuation tube; and wherein a ratio H_B2/TL is at least about 0.30, where HB2 is a height of the second bore.

In certain example embodiments, there may be provided a method of making a vacuum insulating panel comprising: a first glass substrate; a second glass substrate; a plurality of spacers provided in a gap between at least the first and second glass substrates; a first bore, a second bore, and a third bore defined in the first substrate, the first bore being located further from the second substrate than is the third bore, and wherein the second bore is located between at least the first and third bores, wherein at least one diameter and/or width DBI of the first bore is greater than at least one diameter and/or width DB2 of the second bore, and the diameter and/or width DB2 of the second bore is greater than at least one diameter and/or width DB3 of the third bore_; where the method may comprise: providing an evacuation tube, having a tube length TL, in the first and second bores of the first glass substrate, so that the evacuation tube is supported by a second support surface at a base of the second bore, and wherein a ratio HBZ/TL is at least about 0.30, where HB2 is a height of the second bore, in order to reduce and/or minimize tilting of the evacuation tube during formation of a tube seal and/or sealing of the tube; using a laser to form the tube seal, the tube seal being supported on at least a first support surface at a base of the first bore; evacuating the gap between at least the first and second glass substrates via the evacuation tube; and sealing an end of the evacuation tube via laser or in other suitable manner.

Technical advantage(s), for example, include one or more of: improved evacuation tube seal adhesion, improved evacuation tube seal hermiticity, reduced seal and/or glass breakage, reduced crack formation and propagation between the tube seal and the glass tube and the substrate, improved moisture resistance, improved thermal stability during asymmetric thermal conditions, improved durability, faster manufacturing, and/or reduced tilting of evacuation tube.

BRIEF DESCRIPTION OF THE DRAWINGS

These and/or other aspects, features, and/or advantages will become apparent and more readily appreciated from the following description of various example embodiments, taken in conjunction with the accompanying drawings. Thicknesses of layers/elements, and sizes of components/elements, are not necessarily drawn to scale or in actual proportion to one another, but rather are shown as example representations. Like reference numerals may refer to like parts throughout the several views. Each embodiment herein may be used in combination with any other embodiment(s) described herein.

Fig. 1 is a side cross sectional view of a vacuum insulating unit/panel according to an example embodiment.

Fig. 2 is a side cross sectional view of a vacuum insulating unit/panel according to an example embodiment.

Fig. 3 is a side cross sectional view of a vacuum insulating unit/panel according to an example embodiment.

Fig. 4 is a side cross sectional view of a vacuum insulating unit/panel according to an example embodiment.

Fig. 5 is a side cross sectional view of a vacuum insulating unit/panel according to an example embodiment.

Fig. 6 is a side cross sectional schematic view of a vacuum insulating unit/panel according to an example embodiment, showing a laser being used in forming the edge seal during manufacturing, which may be used in combination with any embodiment herein including those of Figs. 1-16.

Fig. 7 is a schematic top view of a vacuum insulating unit/panel according to an example embodiment, showing a laser used in forming the edge seal during manufacturing, which may be used in combination with any embodiment herein including those of Figs. 1-16.

Fig. 8a is a top view of a ceramic preform to be used for a pump-out tube seal according to an example embodiment, which may be used in combination with any embodiment herein including those of Figs. 1-16.

Fig. 8b is a cross-sectional view of a ceramic preform seal of Fig. 8a, surrounding a pump-out tube, according to an example embodiment, which may be used in combination with any embodiment herein including those of Figs. 1-16.

Fig. 8c is a cross-sectional view of a ceramic preform seal of Fig. 8a, surrounding a pump-out tube, according to another example embodiment, which may be used in combination with any embodiment herein including those of Figs. 1-16.

Fig. 8d is a schematic cross-sectional diagram of the seal preform of any of Figs. 8a-8c being laser sintered/sealed, according to an example embodiment, which may be used in combination with any embodiment herein including those of Figs. 1-16.

Fig. 9 is a side cross-sectional view, e.g., taken along section line A-A in Fig. 7, of an evacuation tube structure according to an example embodiment, prior to laser sintering/sealing of the tube seal preform, which may be used in combination with any embodiment herein including those of Figs. 1-16.

Fig. 10a is a side cross-sectional view, e.g., taken along section line A-A in Fig. 7, of an evacuation tube structure according to an example embodiment, after laser sintering/sealing of the tube seal preform, which may be used in combination with any embodiment herein including those of Figs. 1-16.

Fig. 10b is a side cross-sectional view, e.g., taken along section line A-A in Fig. 7, of an evacuation tube structure according to another example embodiment, after laser sintering/sealing of the tube seal preform, which may be used in combination with any embodiment herein including those of Figs. 1-16.

Figs. 10c and lOd are perspective photographs of an evacuation tube structure according to example embodiments, after laser sintering/sealing of the tube seal preform but before sealing the tip of the tube, which may be used in combination with any embodiment herein including those of Figs. 1-16.

Figs. lOe and lOf are side perspective photographs of an evacuation tube structure according to example embodiments, before and after laser sintering/sealing of the tube seal preform, respectively, which may be used in combination with any embodiment herein including those of Figs. 1-16.

Fig. 10g is a perspective photograph of an evacuation tube structure according to an example embodiment, after laser sintering/sealing of the tube seal preform but before sealing the tip of the tube, which may be used in combination with any embodiment herein including those of Figs. 1-16.

Figs. lOh, lOi, and lOj are perspective photographs of various evacuation tube structures according to various example embodiments, after laser sintering/sealing of the tube seal preform and after laser sealing the tip of the tube, which may be used in combination with any embodiment herein including those of Figs. 1-16.

Fig. 11 is a table/graph showing weight % and mol % of various compounds/elements in a main seal material according to an example embodiment (measured via non-carbon detecting XRF), which main seal material may be used in combination with any embodiment herein including those of Figs. 1-16. Fig. 12 is a table/graph showing weight % and mol % of various compounds/elements in a main seal material according to an example embodiment (measured via carbon detecting XRF), before and after laser treatment using an 808 or 810 nm continuous wave laser for edge seal formation, which main seal material may be used in combination with any embodiment herein including those of Figs. 1-16.

Fig. 13a is a table/graph showing weight % and mol % of various compounds/elements in a primer seal material according to an example embodiment (measured via carbon detecting XRF), before and after substrate tempering, which primer material may be used in combination with any embodiment herein (e.g., for one or both primer layers, and/or for a primer for an evacuation tube seal) including those of Figs. 1- 16.

Fig. 13b is a table/graph showing weight % and mol % of various compounds/elements in a primer seal material according to an example embodiment (measured via fused bead XRF), before and after substrate tempering and laser sealing, which primer material may be used in combination with any embodiment herein (e.g., for one or both primer layers, and/or for a primer for an evacuation tube seal) including those of Figs. 1-16.

Fig. 14 is a table/graph showing an elemental analysis (non-oxide analysis) of weight % and mol % of various elements in each of a main seal material (left side in the figure), a pump-out tube seal material (center in the figure), and a primer seal material (right side in the figure), according to an example embodiment(s) (measured via WDXRF), before and after laser treatment using an 808 or 810 nm continuous wave laser to fire/sinter the main seal layer for seal formation, which various seal materials may be used in combination with any embodiment herein including those of Figs. 1-16.

Fig. 15 is a table/graph showing weight % and mol % of various compounds/elements in a pump-out tube seal material according to an example embodiment (measured via carbon detecting XRF), before and after laser sintering/firing, which pump-out tube seal material may be used in combination with any embodiment herein including those of Figs. 1-16.

Fig. 16 is a flowchart illustrating example steps in making a vacuum insulating panel according to various example embodiments, which may be used in combination with any embodiment herein including those of Figs. 1-16.

DETAILED DESCRIPTION

The following detailed structural and/or functional description(s) is/are provided as examples only, and various alterations and modifications may be made. The example embodiments herein do not limit the disclosure and should be understood to include all changes, equivalents, and replacements within ideas and the technical scope herein. Hereinafter, certain examples will be described in detail with reference to the accompanying drawings. When describing various example embodiments with reference to the accompanying drawings, like reference numerals may refer to like components and a repeated description related thereto may be omitted.

Figs. 1-5 are side cross sectional views each illustrating a vacuum insulating panel 100 according to various example embodiments, Fig. 6 is a side cross sectional view of an example vacuum insulating unit/panel 100 showing a laser 41 used in sinterin g/firing the main seal layer 30 when forming the edge seal 3 during manufacturing (which may be used in combination with any embodiment herein, and laser 51 which generates a donutshaped (or ring-shaped) laser beam 13b to fire/sinter the evacuation tube seal 13, and Fig. 7 is a schematic top view of an example vacuum insulating unit/panel 100 showing a laser 41 used in sintering/firing the main seal layer 30 when forming the edge seal 3 during manufacturing (which may be used in combination with any embodiment herein). It should be noted that, in practice, such vacuum insulating panels/units may be oriented upside down or sideways from the orientations illustrated in Figs. 1-7. Vacuum insulating panel 100 may be used in window applications (e.g., for commercial and/or residential windows), and/or for other applications such as commercial refrigeration and consumer appliance applications.

Referring to Figs. 1-7, each vacuum insulating panel 100 may include al least a first substrate 1 (e.g., glass substrate), a second substrate 2 (e.g., glass substrate), a hermetic edge seal 3 at least partially provided proximate the edge of the panel 100, and a plurality (e.g., an array) of spacers 4 provided between at least the substrates 1 and 2 for spacing the substrates from each other and so as to help provide low-pressure space/gap 5 between at least the substrates. Each glass substrate 1, 2 may be flat, or substantially flat, possibly with non-uniform surface features from thermal heat treatment of the glass, in certain example embodiments. Support spacers 4, sometimes referred to as pillars, may be of any suitable shape (e.g., round, oval, disc-shaped, square, rectangular, rod-shaped, etc.) and may be of or include any suitable material such as stainless steel, aluminum, ceramic, solder glass, metal, and/or glass. Certain example support spacers 4 shown in the figures are substantially circular as viewed from above and substantially rectangular as viewed in cross section, and may have rounded edges. The hermetic edge seal 3 may include one or more of main seal layer 30, upper primer layer 31, and lower primer layer 32. Each “layer” herein may comprise one or more layers. At least one thermal control and/or solar control coating 7, such as a multi-layer low-emittance (low-E) coating, may be provided on at least one of the substrates 1 and 2 in order to further improve insulating properties of the panel. The solar control coating 7 may be provided on substrate 1 or substrate 2, or such a solar control coating may be provided on both substrates 1 and 2. For example, Figs. 1-3 and 6 illustrate such a coating 7 (e.g., low-E coating) provided on substrate 2, whereas Figs. 4-5 illustrate the coating 7 provided on substrate 1. Each substrate 1 and 2 is preferably of or including glass, but may instead be of other material such as plastic or quartz. For example, one or both glass substrates 1 and 2 may be soda- lime-silica based glass substrates, borosilicate glass substrates, lithia aluminosilicate glass substrates, or the like, and may be clear, low iron, or otherwise tinted/colored such as green, grey, bronze, or blue tinted. Substrates 1 and 2, in certain example embodiments, may each have a visible transmission of at least about 40%, more preferably of at least about 50%, and most preferably of from about 60-90%. The vacuum insulating panel 100, in certain example embodiments, may have a visible transmission of at least 40%, more preferably of at least 50%, and most preferably of at least 60%. The substrates 1 and 2 may be substantially parallel (parallel plus/minus ten degrees, more preferably plus/minus five degrees) to each other in certain example embodiments. Substrates 1 and 2 may or may not have the same thickness, and may or may not be of the same size and/or same material, in various example embodiments. When glass is used for substrates 1 and 2, each of the glass substrates may be from about 1-12 mm thick, more preferably from about 2-12 mm thick, more preferably from about 3-8 mm thick, and most preferably from about 4-6 mm thick. When glass is used for substrates 1 and 2, the glass may or may not be tempered (e.g., thermally tempered). Although thermally tempered glass substrates are desirable in certain environments, the glass substrate(s) may be annealed or heat strengthened. As known in the art, thermal tempering of soda-lime- silicate based glass typically involves heating the glass to a temperature of at least 585 degrees C, more preferably to at least 600 degrees C, more preferably to at least 620 degrees C (e.g., to a temperature of from about 620-650 degrees C), and then rapidly cooling the heated glass so as to compress surface regions of the glass to make it stronger. The glass substrates may be thermally tempered to increase compressive surface stress and/or central tension stress, and to impart safety glass properties including small fragmentation upon breakage. When tempered glass substrates 1 and/or 2 are used, the substrate(s) may be tempered (e.g., thermally or chemically tempered) prior to firing/sintering of main edge seal material 30 (e.g., via laser) to form the edge seal 3.

When heat strengthened glass substrates 1 and/or 2 are used, the substrate(s) may be heat strengthened prior to firing/sintering of the main edge seal material 30 (e.g., via laser) to form the edge seal 3. When a vacuum insulated glass panel/unit has one tempered glass substrate and one heat strengthened substrate, the substrate(s) may be tempered (e.g., thermally or chemically tempered) and heat strengthened prior to firing/sintering of the main edge seal material 30 (e.g., via laser) to form the edge seal 3.

In various example embodiments, each vacuum insulating panel 100, still referring to Figs. 1-7, optionally may also include at least one sorption getter 8 (e.g., at least one thin film getter) for helping to maintain the vacuum in low pressure space 5 by using reactive material for soaking up and/or bonding to gas molecules that remain in space 5, thus providing for sorption of gas molecules in low pressure space 5. The getter 8 may be provided directly on either glass substrate 1 or 2, or may be provided on a low-E coating 7 in certain example embodiments. In certain example embodiments, the getter 8 may be laser- activated and/or activated using inductive heating techniques, and/or may be positioned in a trough/recess 9 that may be formed in the supporting substrate (e.g., substrate 2) via laser etching, laser ablating, and/or mechanical drilling.

A vacuum insulating panel 100 may also include an evacuation (e.g., pump-out) tube 12 used for evacuating the space 5 to a pressure(s) less than atmospheric pressure, where the elongated evacuation tube 12 may be closed/sealed after evacuation of the space 5. Pump-out seal 13 may be provided around tube 12, and a cap 14 may be provided over the top of the tube 12 after it is sealed. Elongated evacuation tube 12 may extend part way through the substrate 1, for example part way through a double countersink hole drilled or otherwise formed in the substrate 1 (or 2) as shown in Figs. 9- 10 for example. However, tube 12 may extend all the way through the substrate in alternative example embodiments. Pump-out tube 12 may be of any suitable material, such as glass, metal, ceramic, or the like. In certain example embodiments, the evacuation tube 12 may be located on the side of the vacuum insulating panel 100 configured to face the interior of the building when the panel is used in a commercial and/or residential window. In certain example embodiments, the evacuation (e.g., pumpout tube) 12 may instead be located on the side of the vacuum insulating panel 100 configured to face the exterior of the building. The evacuation tube 12 may be provided in an aperture (e.g., in a double- stepped aperture as shown in Figs. 9-10) defined in either substrate 1 or 2 in various example embodiments. Pump-out seal 13 may be of any suitable material. In certain example embodiments, the pump-out seal 13 may be provided in the form of a substantially donut-shaped pre-form which may be positioned in a recess 15 formed in a surface of the substrate 1 or 2, so as to surround an upper portion of the tube 12, so that the pre-form can be laser treated/fired/sintered (e.g., after formation of the edge seal 3) to provide a seal around the pump-out tube 12. Alternatively, the pump-out seal 13 may be of any suitable material and/or may be dispensed in paste and/or liquid form to surround at least part of the tube 12 and may be sealed before and/or after evacuation of space 5. The pump-out seal material 13 may be directly applied to the glass substrate and/or the tube 12 (e.g., see Figs. 8-10), or to a primer layer (not shown) applied to the glass substrate surface prior to the pump-out seal material being applied to the substrate, in certain example embodiments. After evacuation of space 5, the tip of the tube 12 may be melted via laser to seal same (e.g., to form a laser fused glass dome at the top of the tube, above most or all of the seal material 13, as shown in Figs. lOh-lOj for example), and hermetic sealing of the space 5 in the panel 100 can be provided both by the edge seal 3 and by the sealed upper portion of the pump-out tube 12 together with seal 13 and/or cap 14. In certain example embodiments, as shown in Figs. 1-10 for example, the elongated pump-out tube 12 may be substantially perpendicular (perpendicular plus/minus ten degrees, more preferably plus/minus five degrees) to major surface(s) of the substrates 1 and 2. Any of the elements/components shown in Figs. 1-10 may be omitted in various example embodiments.

The evacuated gap/space 5 between the substrates 1 and 2, in the vacuum insulating panel 100, is at a pressure less than atmospheric pressure. For example, after the edge seal 3 has been formed, the cavity 5 evacuated to a pressure less than atmospheric pressure, and the pump-out tube 12 closed/sealed, the gap 5 between at least the substrates 1 and 2 may be at a pressure no greater than about 1.0 x 10’² Torr, more preferably no greater than about 1.0 x 10^-3 Torr, more preferably no greater than about 1.0 x 10⁴ Torr, more preferably no greater than about 1.0 x 10⁵ Torr, and for example may be evacuated to a pressure no greater than about 1.0 x IO^-6 Torr. The gap 5 may be at least partially filled with an inert gas in various example embodiments. In certain example embodiments, the evacuated vacuum gap/space 5 may have a thickness (in a direction perpendicular to planes of the substrates 1 and 2) of from about 100-1,000 pm, more preferably from about 200-500 pm, and most preferably from about 230-350 pm. Providing a vacuum in the gap/space 5 is advantageous as it reduces conduction and convection heat transport, so as to reduce temperature fluctuations inside buildings and the like, thereby reducing energy costs and needs to heat and/or cool buildings. Thus, panels 100 can provide high levels of thermal insulation.

Example low-emittance (low-E) coatings 7 which may be used in the vacuum insulating panel 100 are described in U.S. Patent Nos. 5,935,702, 6,042,934, 6,322,881, 7,314,668, 7,342,716, 7,632,571, 7,858,193, 7,910,229, 8,951,617, 9,215,760, and 10,759,693, the disclosures of which are all hereby incorporated herein by reference in their entireties. Other low-E coatings may also, or instead, be used. A low-E coating 7 typically includes at least one IR reflecting layer (e.g., of or including silver, gold, or the like) sandwiched between at least first and second dielectric layer(s) of or including materials such as silicon nitride, zinc oxide, zinc stannate, and/or the like. The low-E coating 7, for example, may include one, two, or three of such IR reflecting layers in various example embodiments. A low-E coating 7 may have one or more of: (i) a hemispherical emissivity/emittance of no greater than about 0.20, more preferably no greater than about 0.04, more preferably no greater than about 0.028, and most preferably no greater than about 0.015, and/or (ii) a sheet resistance (R_s) of no greater than about 15 ohms/square, more preferably no greater than about 2 ohms/square, and most preferably no greater than about 0.7 ohms/square, so as to provide for solar control. In certain example embodiments, the low-E coating 7 may be provided on the interior surface of the glass substrate to be closest to the building exterior, which is considered surface two (e.g., see Figs. 2-3), whereas in other example embodiments the low-E coating 7 may be provided on the interior surface of the glass substrate to be closest to the building interior, which is considered surface three (e.g., see Figs. 4-5).

Fig. 1 illustrates an embodiment where the edge seal 3 is provided in the vacuum insulated glass panel 100 at the absolute edge, the seal layers 30, 31 and 32 all have substantially the same width (e.g., between about 6 mm and 12 mm), and a thickness of the main seal layer 30 is less than a thickness of primer layer 31 but greater than a thickness of the other primer layer 32. Fig. 2 illustrates an embodiment where the edge seal 3 is spaced inwardly from the absolute edge of the panel 100, the width of the main seal layer 30 is less than a width(s) of the primer layers 31 and 32, and a thickness of the main seal layer 30 is greater than a thickness of primer layer 31 but less than a thickness of the other primer layer 32. Fig. 3 illustrates an embodiment where the edge seal 3 is spaced inwardly from the absolute edge of the panel 100, the seal layers 30, 31 and 32 all have substantially the same width (e.g., between about 6 mm and 12 mm), and the seal layers 30, 31 and 32 all have substantially the same thickness. Fig. 4 illustrates an embodiment where the edge seal 3 is spaced inwardly from the absolute edge of the panel 100, the width of the main seal layer 30 is less than a width(s) of the primer layers 31 and 32, a thickness of the main seal layer 30 is greater than a thickness of primer layer 31 but less than a thickness of primer layer 32, and the low-E coating 7 is provided on substrate 1 (as opposed to the low-E coating being on substrate 2 in Figs. 1-3). Fig. 5 illustrates an embodiment similar to Fig. 4, except that primer layer 31 is omitted in the Fig. 5 embodiment. Fig. 6 provides an example where a laser beam 40 from laser 41 is being used to heat the edge seal structure for sintering/firing the main seal layer 30 to form the hermetic edge seal 3, and Fig. 7 is a top view illustrating the laser beam 40 proceeding around the entire periphery of the panel along path 42 over the edge seal layers 30-32 to fire/sinter the main edge seal layer 30 in forming the hermetic edge seal 3. The laser beam 40 performs localized heating of the edge seal area, so as to not unduly heat certain other areas of the panel thereby reducing chances of significant de-tempering of the glass substrates. Each of these embodiments may be used in combination with any other embodiment described herein, in whole or in part.

Edge seal 3, which may include one or more of ceramic layers 30-32, may be located proximate the periphery or edge of the vacuum insulated panel 100 as shown in Figs. 1-7. Edge seal 3 may be a ceramic edge seal in certain example embodiments. Referring to Figs. 1-6, in certain example embodiments, layer 30 of the edge seal may be considered a main or primary seal layer, and layers 31 and 32 may be considered primer layers. One or more of seal layers 30-32, of the edge seal 3, may be of or include ceramic frit in certain example embodiments, and/or may be lead-free or substantially lead-free (e.g., no more than about 15 ppm Pb, more preferably no more than about 5 ppm Pb, even more preferably no more than about 2 ppm Pb) in certain example embodiments. In certain example embodiments, each primer layer 31 and 32 may be of a material having a coefficient of thermal expansion (CTE) that is between that of the main seal layer 30 and the closest glass substrate 1, 2. A primer(s) 31 and/or 32 may be omitted in certain example embodiments. In certain example embodiments, primer layers 31 and 32 may be of or include different material(s) compared to the main seal layer 30. In certain example embodiments, primer layer 31 may also be provided in the evacuation tube sealing structure, so as to be located between glass substrate 1 and evacuation tube seal material 13.

The edge seal 3, in certain example embodiments, may be located at an edge- deleted area (where the solar control coating 7 has been removed) of the substrate as shown in Figs. 1-6, so as to reduce chances of corrosion. Thus, the edge seal 3 may be positioned so that it does not overlap the low-E coating 7 in certain example embodiments. The edge seal 3 may be located at the absolute edge of the panel 100 (e.g., Fig. 1), or may be spaced inwardly from the absolute edge of the panel 100 as shown in Figs. 2-7 and 9, in different example embodiments. An outer edge of the hermetic edge seal 3 may be located within about 50 mm, more preferably within about 25 mm, and more preferably within about 15 mm, of an outer edge of at least one of the substrates 1 and/or 2. Thus, an “edge” seal does not necessarily mean that the edge seal 3 is located at the absolute edge or absolute periphery of a substrate(s) or overall panel 100.

The low-E coating 7 may be edge deleted around the periphery of the entire unit so as to remove the low-e coating material from the coated glass substrate. The low-E coating 7 edge deletion width (edge of glass to edge of low-E coating 7), in certain example embodiments, in at least one area may be from about 0-100 mm, with examples being no greater than about 6 mm, no greater than about 10 mm, no greater than about 13 mm, no greater than about 25 mm, with an example being about 16 mm. In certain example embodiments, there may be a gap between the primer seal layers 31 and 32 and/or main layer 30, and the low-E coating 7, of at least about 1.0 mm, and/or of at least about 0.5 mm, so that the low-E coating 7 is not contiguous with the main seal layer 30 and/or the primer seal layers 31 and 32.

Referring to Figs. 1-7 for example, in the manufactured vacuum insulating panel 100, the main seal layer 30 of the edge seal 3 may have an average thickness of from about 30-180 pm, more preferably from about 30-120 pm, more preferably from about 40-100 pm, and most preferably from about 50-85 pm, with an example main seal layer 30 average thickness being from about 60-80 pm. In certain example embodiments, in the manufactured vacuum insulating panel 100, the primer layer 31 of the edge seal 3 may have an average thickness of from about 10-100 pm, more preferably from about 10- 80 pm, more preferably from about 20-70 pm, and most preferably from about 20-55 pm, with an example primer layer 31 average thickness being about 45 pm. In certain example embodiments, in the manufactured vacuum insulating panel 100, the primer layer 32 (opposite the side from which the laser beam 40 is directed) of the edge seal 3 may have an average thickness of from about 80-240 pm, more preferably from about 100-220 pm, more preferably from about 120-200 pm, and most preferably from about 120-170 pm, with an example primer layer 32 average thickness being about 145 pm. In certain example embodiments, the respective thicknesses of each layer 30, 31, and 32 are substantially the same (the same plus/minus 10%, more preferably plus/minus 5%) along the length of the edge seal 3 around the periphery of the entire panel 100.

In certain example embodiments, a vacuum insulating panel 100 having an improved multi-layer perimeter seal structure 3 provides for improved manufacturing of tempered units using localized laser firing and/or methods of making the same. Further details of the edge seal structure, dimensions of the edge seal and other components, characteristics of the edge seal and other components, materials, and the manufacture of the overall panel may be provided in one or more of U.S. Patent Application Serial Nos. 18/376,914, 18/376,473, 18/376,479, 18/376,483, 18/379,275, and 18/510,777, the disclosures of which are all hereby incorporated herein by reference in their entireties. In various example embodiments, laser 41 and/or laser 51 may be selected to emit a laser beam 40 having a wavelength (X) of from about 380 nm to 1064 nm, more preferably from about 550 nm to 1064 nm, more preferably from about 780-1064 nm. Laser 41 and/or laser 51 may be a near IR laser in certain example embodiments. Laser 41 and/or 51 may be a continuous wave laser, a pulsed laser, and/or other suitable laser in various example embodiments. In various example embodiments, the laser 41 and/or laser 51 may be a scanning laser system comprising diode laser, solid state laser (e.g., ND:YAG), gas laser (e.g., CO2 of 9.3-10.6 pm), and/or other laser devices/sources. In certain example embodiments, laser 41 and/or laser 51 may emit a laser beam 40 at or having a wavelength of about 800 nm, 808 nm, 810 nm, 940 nm, or 1090 nm (e.g., YVO4 laser). For example, 808 nm or 810 nm diode lasers; or 914 nm, 940 nm, 1064 nm, or 1342 nm solid state lasers (e.g., YVO4 lasers). In certain example embodiments, more than one laser may be utilized to increase the sealing speed for seal material 30, lower effective laser power levels and/or reduce laser spot size. Two lasers operating in a serial, overlapping manner can increase the effective irradiation spot time to achieve for example 0.5 seconds while achieving for example a 20 mm per second linear laser rate, as an example. Two 9-mm laser diameter beams 40, for example, can operate in a serial fashion for a 0.5 second to 1.0 second irradiation time. Figs. 11-12 and 14 illustrate an example material(s) that may be used for the main seal layer 30 in various example embodiments, including for example in any of the embodiments of Figs. 1-7. However, other suitable materials (vanadium oxide based ceramic materials with little or no Te oxide, solder glass, or the like) may instead be used for layer 30 in various example embodiments. Fig. 11 is a table/graph showing weight % and mol % of various compounds/elements in an example main seal 30 material, prior to sintering of layer 30, according to an example embodiment (measured via non-carbon detecting XRF); Fig. 12 is a table/graph showing weight % and mol % of various compounds/elements in an example main seal 30 material according to an example embodiment (measured via carbon detecting XRF), before and after laser treatment/sintering of the main seal layer 30 for edge seal formation; and the left side of Fig. 14 sets forth a table/graph showing an elemental analysis (non-oxide analysis) of weight % and mol % of various elements in an example main seal 30 material, before and after laser treatment for edge seal formation. Regarding Fig. 14, X-ray Fluorescence (XRF) is a non-destructive technique that can identify and quantify the elemental constituents of a sample using the secondary fluorescence signal produced by irradiation with high energy x-rays, and wavelength dispersive spectrometer (WDXRF) is capable of detecting elements from atomic number (Z) 4 (beryllium) through atomic number 92 (uranium) at concentrations from the low parts per million (ppm) range up to 100% by weight.

This ceramic tellurium (Te) oxide based main seal material, shown in Figs. 11-12 and 14, was used for main seal layer 30 in examples tested for obtaining data herein for various figures/tables unless otherwise specified. This ceramic tellurium (Te) oxide based main seal material, shown in Figs. 11-12 and 14, for example may be considered to have a melting point (Tm) of 390 or 395 degrees C, a softening point (Ts) of 320 degrees C, and a glass transition point (Tg) of 290 degrees C. This material shown in Figs. 11-12 and 14 and described below, used for the main seal layer 30, may also be used for evacuation tube seal material 13, with or without an underlying primer. Table 1 A sets forth example ranges for various elements and/or compounds for this example tellurium (Te) oxide based main seal 30 material according to various example embodiments, for both mol % and weight %, prior to firing/sintering thereof and thus prior to hermetic edge seal 3 formation. In certain example embodiments, the main seal layer 30 may comprise mol% and/or wt.% of the following compounds in one or more of the following orders of magnitude: tellurium oxide > vanadium oxide > aluminum oxide, tellurium oxide > vanadium oxide > silicon oxide, tellurium oxide > vanadium oxide > aluminum oxide > magnesium oxide, and/or tellurium oxide > vanadium oxide > silicon oxide > magnesium oxide, before and/or after firing/sintering of the layer 30. It will be appreciated that other materials may be used together, or in place of, those shown below, and that the example percentages may be different in alternate embodiments.

TABLE 1 A (example material for main seal layer 30 and/or seal layer 13 prior to firing/sintering)

Tellurium Vanadate based and/or inclusive glasses (including tellurium oxide and vanadium oxide), such as those in Table 1 A, in certain example embodiments are ideally suited for seal functionality when utilizing laser irradiation for the firing/sintering of the main seal layer 30 and/or seal layer 13. The base main seal material may comprise tellurium oxide (e.g., a combination of TeO₃, TeCh+t, and TeCU) and vanadium oxide (e.g., a combination of V2O5, VO2, and V2O3) per the weight % and/or mol % described in Table 1 A. In certain example embodiments, it may be desirable to have a higher amount of tellurium oxide compared to vanadium oxide, in order to increase the material density in the sintered state and thus improve hermiticity of the seal. With respect to main seal material(s) in Table 1 A for the main seal layer 30, the Te oxide (e.g., one or more of TeCh, TeOs, TeCh+i, and/or other stoichiometry(ies) involving Te and O) and V oxide (e.g., one or more of VO2, V2O5, V2O3, and/or other stoichiometry(ies) involving V and O) in the material may be made up of about the following stoichiometries before/after sintering as shown below in Table IB (tellurium oxide stoichiometries prior to firing/sintering), Table 1C (tellurium oxide stoichiometries after firing/sintering), Table ID (vanadium oxide stoichiometries prior to firing/sintering), Table IE (vanadium oxide stoichiometries after firing/sintering), respectively, measured via XPS.

TABLE IB (example stoichiometries of Te oxide in material for main seal layer 30 prior to laser firing/sintering) TABLE 1C (example stoichiometries of Te oxide in material for main seal layer 30 and/or seal 13 after laser firing/sintering)

TABLE ID (example stoichiometries of V oxide in material for main seal layer 30 prior to laser firing/sintering)

TABLE IE (example stoichiometries of V oxide in material for main seal layer 30 and/or seal layer 13 after laser firing/sintering)

For example, the “Example” column in Table IB indicates that 57% of the Te present in the material prior to sintering/firing was in an oxidation state of TeCU, 42% of the Te present in the material prior to sintering/firing was in an oxidation state of TeCL, and 1% of the Te present in the material prior to sintering/firing was in an oxidation state of TeCL+i. And the “Example” column in Table 1C indicates that after the laser firing/sintering of the main seal layer 30 just 14% of the Te present in the main seal layer 30 material was in an oxidation state of TeCh, but 81% of the Te present in the material was in an oxidation state of TeCL, and 5% of the Te present in the material prior to sintering/firing was in an oxidation state of TeCh+i. Accordingly, in certain example embodiments, it will be appreciated that the laser firing/sintering of the main seal layer 30 may cause much of the TeC to transform/convert into TeOa and TeCh+i, which is advantageous because it increases the material’s absorption in the near infrared (e.g., 808 or 810 nm for example, which may be used for the laser during sintering/firing) which provides for increased heating efficiency and reducing the chances of significantly detempering the glass substrate(s) due to improved heating efficiency during the firing/sintering.

This main seal material(s) from Table 1 and Figs. 11-12, 14, or substantially the same material or a similar material, may also be used for the evacuation tube seal 13, with or without a primer, in certain example embodiments, although other types of seals may also be used such as vanadium oxide based ceramic sealing glass or solder glass. Other compounds may also be provided in this main seal 30 material and/or seal material 13, including but not limited to, on a weight and/or mol basis, for example one or more of: 0-15% (more preferably 1-10%) tungsten oxide; 0-15% (more preferably 1-10%) molybdenum oxide; 0-60% (or 38-52%) zinc oxide; 0-15% (more preferably 0-10%) copper oxide, and/or other elements shown in the figures.

Table 2 sets forth example ranges for various elements and/or compounds for this example tellurium oxide-based material for main seal layer 30 and/or seal layer 13 according to various example embodiments, for both mol % and weight %, after firing/sintering thereof and thus after hermetic edge seal 3 formation. It will be appreciated that other materials may be used together, or in place of, those shown below, and that the example percentages may be different in alternate embodiments.

TABLE 2 (example material for main seal layer 30 and/or seal layer 13 after laser firing/sintering)

Other compounds may also be provided in or for this material, including but not limited to, on a weight or mol basis, for example one or more of: 0-15% (more preferably 1-10%) tungsten oxide; 0-15% (more preferably 1-10%) molybdenum oxide; 0-60% (or 38-52%) zinc oxide; 0-15% (more preferably 0-10%) copper oxide, and/or other elements shown in the figures. Certain elements may change during firing/sintering, and certain elements may at least partially burn off during processing prior to formation of the final edges seal 3.

In certain example embodiments, the material for the main seal layer 30 and/or seal 13 may include filler. The amount of filler may, for example, be from 1-25 wt.% and may have an average grain size (d50) of 5-30 pm, for example an average d50 grain size from about 5-20 pm, more preferably from about 5-15 pm, and most preferably less than about 10 pm. Mixtures of two or more grain size distributions (e.g., coarse: d50=15-25 pm and fine: d50=l-10 pm) may be used. The filler may, for example, comprise one or more of zirconyl phosphates, dizirconium diorthophosphates, zirconium tungstates, zirconium vanadates, aluminum phosphate, cordierite, eucryptite, ekanite, alkaline earth zirconium phosphates such as (Mg, Ca, Ba, Sr) Zr4 P5O 24, either alone or in combination. Filler in a range of 20-25 wt. % may be used in layer 30 in certain example embodiments. Main seal layer 30, and/or the primer layer(s) 31 and/or 32, is/are lead-free and/or substantially lead-free in certain example embodiments.

Table 3 sets forth example ranges for various elements for this example tellurium oxide based main seal 30 material and/or seal material 13 according to various example embodiments, using elemental analysis (non-oxide analysis) for both mol % and weight %, prior to firing/sintering thereof and thus prior to hermetic edge seal 3 formation. Fig. 14 also provides an elemental analysis for various example seal materials, including for Te oxide based main seal and/or pump-out tube seal layers 30 and 13. In certain example embodiments, the main seal layer 30 and/or the pump-out seal layer 13 may comprise mol% and/or wt.% of the following elements in one or more of the following orders of magnitude: Te > V > Al, Te > V > Si, Te > V > Al > Mg, Te > O > V, Te > O > V > Al, and/or Te > V > Si > Mg, before and/or after firing/sintering of the layer (e.g., see also Fig. 14). It will be appreciated that other materials may be used together, or in place of, those shown below, and that the example percentages may be different in alternate embodiments. The elemental Te/V ratio in the main seal layer 30 and/or seal layer 13, after sinterin g/firing and in terms of weight %, may be from about 1.5:1 to 5:1, more preferably from about 2:1 to 4:1, and most preferably from about 2.5:1 to 3.5:1. The elemental Te/Al ratio in the main seal layer 30 and/or seal layer 13, after firing/sintering thereof and in terms of weight %, may be from about 5:1 to 35:1, more preferably from about 8:1 to 20:1, and most preferably from about 9:1 to 15:1. The elemental Si/Mg ratio in the main seal layer 30 and/or seal layer 13, after firing/sintering thereof and in terms of weight %, may be from about 1:1 to 35:1, more preferably from about 2:1 to 10:1, and most preferably from about 3: 1 to 7: 1. It has been found that one or more of these ratios is technically advantageous for achieving desirable melting points, softening points, and/or thermal diffusivity.

TABLE 3 (elemental analysis - example main seal 30 material and/or seal material 13 prior to laser firing/sintering)

Other compounds may also be provided in this material (e.g., see Figs. 14 and 15).

Table 4 sets forth example ranges for various elements for this example tellurium oxide based main seal 30 material and/or seal 13 according to various example embodiments, using elemental analysis (non-oxide analysis) for both mol % and weight %, after firing/sintering thereof and thus after formation of the seal (e.g., see also Fig. 14). It will be appreciated that other materials may be used together, or in place of, those shown below, and that the example percentages may be different in alternate embodiments.

TABLE 4 (elemental analysis - example main seal 30 material and/or seal 13 after laser firing/sintering)

This material may also be used for the pump-out seal 13, with or without a primer, in certain example embodiments, although other types of seals may also be used such as vanadium oxide based ceramic sealing glass or solder glass. Other compounds may also be provided in this material (e.g., see Fig. 14).

Figs. 13-14 illustrate an example material(s) that may be used for the primer layer(s) 31 and/or 32, or for a primer layer(s) located between the tube seal material 13 and the glass substrate 1 proximate the evacuation tube, in various example embodiments, including for example in any of the embodiments herein. However, other suitable materials, such as solder glass, other materials comprising bismuth oxide, and so forth, may be used for primer layers in various example embodiments. Fig. 13a is a table/graph showing weight % and mol % of various compounds/elements in a primer seal 31 and/or 32 material according to an example embodiment (measured via carbon detecting XRF), before and after laser treatment for edge seal formation, which primer material may be used in combination with any embodiment herein (e.g., for one or both primer layers); Fig. 13b is a table/graph illustrating example primer material according to an example embodiment (measured via fused bead XRF); and the right side of Fig. 14 sets forth a table/graph showing an elemental analysis (non-oxide analysis) of weight % and mol % of various elements in an example primer material, before and after laser treatment for edge seal formation. This primer material, shown in Figs. 13-14, for example may be considered to have a melting point (Tm) of 620 degrees C, a softening point (Ts) of 551 degrees C, and a glass transition point (Tg) of 486 degrees C.

Table 5 sets forth example ranges for various elements and/or compounds for example primer material according to various example embodiments, for both mol % and weight %, prior to firing/sintering. In certain example embodiments, one or both of the primer layers 31 and/or 32 may comprise mol% and/or wt.% of the following compounds in one or more of the following orders of magnitude: boron oxide > bismuth oxide > silicon oxide, bismuth oxide > silicon oxide > boron, boron oxide > bismuth oxide > silicon oxide > titanium oxide, bismuth oxide > silicon oxide > boron oxide > titanium oxide, boron oxide > silicon oxide > titanium oxide > bismuth oxide, and/or silicon oxide > boron oxide > bismuth oxide, before and/or after formation of the hermetic edge seal 3. It will be appreciated that other materials may be used together, or in place of, those shown below, and that the example percentages may be different in alternate embodiments.

TABLE 5 (example primer material prior to firing/sintering)

It is noted that “stoichiometry” as used herein covers, for example, oxygen coordination and oxygen state. Other compounds may also be provided in the primer material (e.g., see Figs. 13-14). For example, on a weight basis, the primer material for one or both layers 31 and/or 32 may further comprise one or more of: 0-20% (or 1-7%) zinc oxide; 0-15% (or 2-7%) aluminum oxide; 0-10% (or 0-5%) magnesium oxide; 0-10% (or 0-5%) chromium oxide; 0-10% (or 0-5%) iron oxide; 0-20% (or 1-8%) sodium oxide; carbon dioxide; and/or other elements shown in the figures (e.g., see Figs. 13a-13b).

Table 6 sets forth example ranges for various elements and/or compounds for this example primer layer 31 and/or 32 material according to various example embodiments, for both mol % and weight %, after firing/sintering thereof and after hermetic edge seal 3 formation. It will be appreciated that other materials may be used together, or in place of, those shown below, and that the example percentages may be different in alternate embodiments.

TABLE 6 (example primer material after edge seal formation)

Other compounds may also be provided in this primer material, as discussed above and/or shown in the figures. And such primer material may also be used under seal layer 13 in certain example embodiments. Certain elements may change during firing/sintering, and certain elements may at least partially burn off during processing prior to formation of the final edges seal 3. It will be appreciated that, as with other layers discussed herein, other materials may be used together, or in place of, those shown above and/or below, and that the example weight/mol percentages may be different in alternate embodiments. The ceramic sealing glass primer materials for layer(s) 31 and/or 32 are lead-free and/or substantially lead-free in certain example embodiments.

Table 7 sets forth example ranges for various elements for the example primer material according to various example embodiments, using elemental analysis (non-oxide analysis) for both mol % and weight %, after firing/sintering thereof and thus after hermetic edge seal 3 formation. Fig. 14 also provides an elemental analysis for various example seal materials, including the primer material at the right side thereof. In certain example embodiments, one or both of primer layers 31 and/or 32 may comprise mol% of the following elements in one or more of the following orders of magnitude: B > Bi, O > B > Bi, O > B > C, O > B > Si > Bi, and/or B > Si > Bi > Ti, before and/or after firing/sintering of the layer and formation of the edge seal 3 (e.g., see also Fig. 14). It will be appreciated that other materials may be used together, or in place of, those shown below, and that the example percentages may be different in alternate embodiments.

TABLE 7 (elemental analysis - example primer material after firing/sintering and after edge seal formation)

The primer materials in Figs. 13-14 and Table 7 may be considered to be boron- based, given that excluding oxygen, silicon, and carbon, boron has the largest magnitude in terms of mol% before and/or after firing/sintering. While other materials (e.g., bismuth based primers, solder glass, etc.) may be used for layer(s) 31 and/or 32 in certain example embodiments, boron-based material such as in Figs. 13-14 and Table 7 may be desirable for use as primer layer(s) 31 and/or 32 in certain example embodiments, for example when laser heating is used for sintering/firing the main seal layer 30, as follows. Bismuth based primers, with little to no boron in terms of mol%, have been found to block large amounts of energy from the laser 41 so that it does not reach main seal layer 30 during firing/sintering of that layer. It has been found that by reducing Bi, and increasing B, in terms of mol%, the primer layer(s) 31 and/or 32 can be more transmissive of certain laser energy (e.g., from a near-IR laser, such as 808 or 810 nm) thereby allowing the main seal layer 30 to be more efficiently and quickly heated and sintered/fired without significantly de-tempering the glass substrate(s) 1 and/or 2. Thus, the boron-based (mol%) material(s) of Figs. 13-14 and Table 7 may be used for one or both primer layer 31 and/or 32 in certain example embodiments, for instance when laser heating is used that impinges upon a primer layer. In certain example embodiments, one or both primer layer(s) 31 and/or 32 may comprise, in terms of mol%, the material of Table 7. In certain example embodiments, on an elemental basis (not including oxides) and in terms of mol%, primer layer(s) 31 and/or 32 may have a ratio B/Bi, of boron (B) to bismuth (Bi), of from about 1.1 to 10.0, more preferably from about 2.0 to 6.0, and most preferably from about 2.5 to 4.5 (with an example being about 3.7), after firing/sintering of the main seal layer 30 and/or primer(s). In certain example embodiments, in terms of mol% after sintering/firing of layer 30, primer layer(s) 31 and/or 32 may comprise at least two times as much B as Bi, more preferably at least about three times as much B as Bi, and/or may comprise at least about two time as much B oxide as Bi oxide, more preferably at least about three, four, or five times as much B oxide as Bi oxide. Such a primer (e.g., 31) is thus able to allow sufficient near-IR energy from the laser (e.g., at 808 or 810 nm) to pass so that the main seal layer 30 can be efficiently and quickly fired/sintered, without significantly de-tempering glass and/or inducing significant transient thermal stress.

Fig. 8a is a top view of a ceramic substantially donut-shaped (or substantially ringshaped) preform 13 to be used for a seal around evacuation/pump-out tube 12 according to an example embodiment, which may be used in combination with any embodiment herein including those of Figs. 1-16. Figs. 8b-8c are a cross-sectional views of example ceramic preforms 13 of Fig. 8a according to example embodiments, and Fig. 8d is a schematic cross- sectional diagram of preform seal of Figs. 8a-8c being laser fired/sintered around the pump-out tube according to an example embodiment. As shown in Fig. 8a, the preform 13 may be formed substantially in a shape of a donut or ringshaped, as viewed from above and/or below, prior to being inserted into the countersunk recess 15 (e.g., double countersunk drilled hole shown in Figs. 9-10) surrounding the pump-out tube 12, as shown in Figs. 1-7 and 9-10 for example. The donut shape is advantageous in that it increases irradiation surface area at a given geometric configuration, allowing for the preform to be quickly sintered/fired without exposing the adjacent glass to significant de-tempering. As shown in Fig. 8b and 8d, a sidewall 13a of the preform 13 may be angled to expose more surface area of the preform to impingement by a substantially donut-shaped (or substantially ring-shaped) laser beam 13b from above, generated by laser 51 (e.g., see Figs. 6, 8b, 8d). Sidewall(s) 13a of the preform may or may not be angled relative to the vertical, in different example embodiments. Fig. 8b shows an example embodiment where the sidewall 13a of the preform is so angled, whereas Fig. 8c shows another example embodiment where the sidewall 13a of the preform is substantially vertically oriented (vertical +/- 10 degrees, more preferably +/- 5 degrees). In certain example embodiments, the acute angle which the sidewall 13a may form with the bottom surface 13c of the preform may be from about 10-85 degrees, more preferably from about 50-85 degrees, more preferably from about 50-70 degrees, with an example being 52.5 degrees as shown in Fig. 8b for example, to expose more seal material surface area to the laser beam 13b thereby allowing for the preform to be more quickly sintered/fired without exposing the surrounding glass to significant de-tempering. This allows heat from the laser to be more efficiently transferred to the interfaces between the tube and the preform, and between the preform and the substrate. Preform 13 and evacuation tube 12 are concentric, or substantially concentric, in certain example embodiments. Thus, in certain example embodiments, the size (e.g., outer diameter) of the top wall 13d of preform 13 may be smaller than the size (e.g., outer diameter) of the bottom wall 13c of the preform (e.g., see Fig. 8b). Top wall 13d and bottom wall 13c of the preform, prior to laser sintering/firing, are substantially parallel to each other in certain example embodiments (e.g., see Figs. 8b-8d). In certain example embodiments, the size (e.g., outer diameter) of the upper surface 13d or top wall may be from about 3-9 mm, more preferably from about 5-7 mm; an outer diameter (OD) of the tube 12 may be from about 2-7 mm, more preferably from about 2-6 mm, more preferably from about 2-4 mm; an inner diameter (ID) of the hollow tube 12 may be from about 1.5-5 mm, more preferably from about 2-4 mm, more preferably from about 2.2-3.2 mm; and/or the height/thickness of the preform 13 may be from about 0.5 to 12.0 mm, more preferably from about 0.5 to 3.0 mm, and most preferably from about 1.0 to 1.4 mm. Example IDs for the hollow tube 12 are about 2.2 mm and 3.2 mm, and example ODs for the tube 12 are about 3 mm, about 4 mm, and about 5 mm (e.g., a hollow evacuation tube 12 with about an OD of about 3 mm and an ID of about 2.2 mm; or a hollow tube 12 with an OD of about 4 mm and an ID of about 3.2 mm). Example thickness of the wall of glass/ceramic hollow tube 12 may be from about 0.2 to 0.8 mm, more preferably from about 0.3 to 0.6, more preferably from about 0.3 to 0.5, with an example being about 0.4 mm, in various example embodiments. While glass/ceramic tubes 12 are preferred in certain example embodiments, using hollow evacuation tubes 12 of other materials (e.g., metal(s), metal oxide(s), etc.) is also possible in certain example embodiments.

Evacuation tube 12 may be inserted through the central aperture defined in preform 13, either before or after the preform 13 is positioned in recess 15. Figs. 8b-8c, for example, show the tube inserted through the aperture in the preform 13 prior to the tube 12 and preform 13 being positioned in recess 15. Alternatively, the preform 13 and tube 12 may be inserted into recess 15 in separate steps, in either order, in which case the tube 12 is not inserted through the aperture in the preform 13 until after at least one of the preform and tube has been positioned at least partially in recess 15 in glass substrate 1. Figs. 9-10 are consistent with these example embodiments.

Evacuation tube seal preform 13 may be of or including the same material discussed herein used for main seal layer 30 in certain example embodiments, although it may be made of different materials (e.g., see example materials for preform seal 13 in Figs. 11, 12 and 14, and in Tables 1A-1E and Table 2 above). Alternatively, the pumpout tube seal preform 13 may be of or include the material shown in Fig. 15 in other example embodiments, which is also based on tellurium oxide and vanadium oxide. For example, in certain example embodiments, the main seal layer 30 may utilize at least polypropylene (PP) carbonate as a binder, whereas the perform 13 may instead utilize material such as ethyl cellulose as a binder due to its cold pressing and preform nature. Perform 13 may be inserted into recess 15, with or without a previously inserted primer layer similar to 31 and/or 32, although in certain example embodiments no primer is used so that the preform 13 may directly contact the glass at the bottom of the recess 15. The preform and resulting seal 13 may be made of other suitable materials in various example embodiments. The material for the pump-out tube seal may be cold pressed to form the substantially disc-shaped preform 13, with the cold pressed preform 13 then being inserted into the recess 15 together with, before, or after, the evacuation/pump-out tube 12 (e.g., see Figs. 7-10). Preform 13 may be partially melted to the adjacent glass substrate 1 in the countersunk recess/hole 15 during a main binder burnout and/or preglaze step. Thereafter, the main seal layer 13 may be fired/sintered. Before or after sintering/firing of main seal layer 30, preform 13 may be sintered/fired via laser sintering or other type(s) of heating. In certain example embodiments, the laser sintering/firing of the preform 13 may be done in multiple steps, such as a first step (e.g., 3.47A/power 26W) from about 20-40 seconds, and a second step (e.g., 3.65A/power 28W) for about 3- 10 seconds. In an example embodiment, the preform 13 may be laser fired/sintered using an example lasing time (e.g., 53W at 5.98A) via a dwell time of from about 20-80 seconds, for an example preform thickness(es) of from about 1 to 2.5 mm, and/or shear strength test results were well above a threshold of 1.0 MPa for samples with no stressor and/or water immersion stressor. In an example embodiment, preform seal 13 may be sintered/fired using a different laser than used for sintering seal layer 30, such as a laser used with optics to allow a substantially collimated donut-shaped and/or ring-shaped laser beam 13b (e.g., having a cross-section substantially in the form and/or shape of the preform shown in Fig. 8d as viewed from above) to heat the preform 13 without significantly heating the tube 12. In certain example embodiments, as shown in Fig. 8d, the donut-shaped laser beam 13b may be spaced apart from and not directly impinge upon the tube 12 during sintering/firing of the preform to form the final seal 13. After the main seal layer 30 and perform seal 13 have been sintered/fired, the mated unit may be evacuated to low pressure via pump-out tube 12, the getter 8 activated such as via laser, and the tip of pump out tube 12 may be closed off/sealed via heating such as via laser. The mated unit may then be cooled and a protective cap 14 may be applied over the sealed tube 12. Fig. 9 is a side cross-sectional view, e.g., taken along section line A-A in Fig. 7, of an evacuation tube structure according to an example embodiment, prior to laser sintering/sealing of the tube seal preform 13, which may be used in combination with any embodiment herein including those of Figs. 1-16. Fig. 9 illustrates the evacuation tube 12 and ceramic seal preform 13 at least partially mounted in the recess 15 of the glass substrate, with the tube 12 extending through the central aperture in preform 13. Recess 15, in substrate 1, includes an upper bore (e.g., first bore) Bl having a height HBI and a diameter or width DBI, a central bore (e.g., second bore) B2 having a height HB2 and a diameter or width DB2, and a lower bore (e.g., third bore) B3 having a height HTS and a diameter or width DBS. In certain example embodiments, such as shown in Fig. 10, HB2 > HBI and HB2 > HTS, where HBI, HB2, and HTS are heights of the first Bl, second B2, and third B3 bores, respectively. Two or all three of upper bore Bl, central bore B2, and/or lower bore B3 may be concentric, or substantially concentric, in certain example embodiments, as shown in the figures, with the central apertures of the respective bores Bl, B2, and B3 aligning or substantially aligning with each other. The sidewalls of bores Bl, B2, and B3 may be substantially vertical (vertical plus/minus ten degrees, more preferably plus/minus five degrees) in certain example embodiments, or alternatively may be substantially angled in certain instances. The sidewalls of bores Bl, B2, and/or B3 may be substantially parallel (parallel plus/minus ten degrees, more preferably plus/minus five degrees) to each other in certain example embodiments, and/or may be substantially perpendicular to the major surfaces of substrate 1 (e.g., glass substrate) in certain example embodiments. The central and lower bores, B2 and B3, are configured so that the bottom surface of the evacuation tube 12 rests on and is supported by (e.g., directly on, or indirectly on) tube shelf/ledge 52. Tube shelf (TS) 52, which is a tube support surface/shelf and/or a support step, is formed the bottom of central bore B2, and is at the top of bottom bore B3 and is oriented so as to be substantially parallel to the major surfaces of substrate 1, as best shown in Figs. 9-10. Tube supporting shelf 52 of bore B2, in certain example embodiments, has a width (WTS) of at least about 0.5 mm, more preferably at least about 0.6 mm, more preferably at least about 0.7 mm, and most preferably at least about 0.75 mm (e.g., 0.85 mm), which is technically advantageous with respect to supporting tube 12, allowing a gap G1 to be provided between the tube 12 and the sidewall of central bore B2, and being sufficiently sized to reduce tilting of tube 12. While support surface 52 is configured to support at least the evacuation tube 12, the tube may or may not be in contact with the support surface/shelf 52 depending on how far into recess 15 the tube 12 has been inserted. In a similar manner, shelf 53 of bore Bl, which is a support surface/shelf for preform 13, is formed the bottom of upper bore Bl, and is at the top of central bore B2 and is oriented so as to support preform 13 and be substantially parallel to the major surfaces of substrate 1 and to shelf 52, as best shown in Figs. 9-10. The upper, central, and lower bores Bl, B2 and B3 may be formed in substrate 1 in any suitable manner, such as via one or more of mechanical drilling (e.g., using diamond-tipped drill bits), waterjet, laser drilling, laser processing, punching, or the like. As viewed from above, the upper, central, and lower bores Bl, B2 and B3, respectively, may be of any suitable shape, such as circular, oval, rectangular, or the like, in various example embodiments.

Referring to Figs. 1-10, and perhaps as best shown in Figs. 9-10, in certain example embodiments, as viewed cross-sectionally one location, multiple locations, or all locations, the diameter or width DBI of upper bore Bl is greater than the diameter or width DB2 of central bore B2, and the diameter or width DB2 of central bore B2 is greater than the diameter or width DBS of lower bore B3 (DBI > DB2 > DB3). In certain example embodiments, an average diameter or width DBI of upper bore Bl is at least about 1 mm greater (more preferably at least about 2 mm greater, and most preferably at least about 3 mm greater) than the diameter or width DB2 of central bore B2. In certain example embodiments, an average diameter or width DB2 of central bore B2 is at least about 0.5 mm greater (more preferably at least about 0.70 mm greater, and most preferably at least about 0.80 mm greater) than the diameter or width DB3 of lower bore B3. DBI may be substantially the same size throughout upper bore Bl, or may vary in size at different locations in the bore Bl, depending upon the shape and formation of bore Bl. Likewise, DB2 may be substantially the same size throughout bore B2, or may vary in size at different locations in the bore B2, depending upon the shape and formation of bore B2; and DB3 may be substantially the same size throughout bore B3, or may vary in size at different locations in the bore B3, depending upon the shape and formation of bore B3. In certain example embodiments, a ratio DBI/DB2 of the diameter or width DBI of upper bore Bl/ the diameter or width DB2 of central bore B2, may be from about 1.2 to 5.0, more preferably from about 1.5 to 4.0, more preferably from about 1.7 to 2.6, more preferably from about 1.9 to 2.3, with an example being about 2.2 (e.g., if DBI is about 6.7 mm, and DB2 is about 3.1 mm). In certain example embodiments, ratio DBI/DB2 of the diameter or width DBI of upper bore Bl/the diameter or width DB2 of central bore B2, may be at least about 1.8, more preferably at least about 2.0, and more preferably at least about 2.1. Such ratios, and a large size (DBI) of the upper bore Bl, are technically advantageous at least because, in certain example embodiments, this allows the preform 13 to be supported in the bore in a manner where the preform 13, before and after laser sintering/firing, does not contact the sidewall 61 (e.g., vertical or angled sidewall) of the bore B 1 which has surprisingly and unexpectedly been found to improve durability and reduce tube 12 breakage and seal failures. In certain example embodiments, a ratio DB2/DB3 of the diameter or width DB2 of central bore B2Z the diameter or width DB of lower bore B3, may be from about 1.1 to 3.0, more preferably from about 1.2 to 2.3, more preferably from about 1.3 to 2.0, more preferably from about 1.3 to 1.6, with an example being about 1.4 (e.g., if DB2 is about 3.1 mm, and DB3 is about 2.2 mm). In certain example embodiments, a ratio WTS/DB3 of the width WTS of tube shelf 52 to the diameter or width DB3 of lower bore B3, may be at least 0.10, more preferably at least about 0.15, and more preferably at least about 0.18, with an example being about 0.20, and/or Gap G1 has a width of from about 0.02 to 0.20 mm, more preferably from about 0.03 to 0.10 mm, and most preferably from about 0.03 to 0.07 mm, with an example being about 0.05 mm, to provide for adequate tube support and to reduce tilting of tube 12. In certain example embodiments, gap G1 provided between at least the tube seal 13 and the second support surface 52 of the first glass substrate 1 may partially or entirely surround the tube 12 as viewed from above, and for example may substantially surround the tube as viewed from above which may cover situations where a sidewall of the tube 12 may contact the glass substrate 1 at only a small location to avoid further tilt.

Structure is provided for reducing tilting of tube 12 in recess 15. In certain example embodiments, it is desirable to reduce tube tilting so that the top of the tube can be aligned with and sealed, following evacuation, with a donut-shaped laser beam 13b, or any other suitable shaped/type of laser beam, from a laser 51. Unintended tilting of the tube can result in misalignment with such a laser beam 13b from laser 51, which may cause damage to the surrounding areas and/or failure to seal the top of the tube 12 following evacuation of gap 5. Elongated hollow tube 12 may have a tube length TL of from about 4 to 10 mm, more preferably from about 5 to 8 mm, and most preferably from about 5-7 mm (e.g., about 6 mm), in certain example embodiments. In certain example embodiments, it may be desirable to have tube 12 substantially vertical (e.g., vertical +/- 10 degrees, more preferably +/- 5 degrees), and so that the tube’s central aperture is substantially concentric with at least one of bores Bl, B2 and/or B3. In certain example embodiments, it has been found that when bores Bl, B2, B3, shelves 52, 53, and tube 12 are designed so that (DB2 - ODT)/HB2 is no greater than 0.09, more preferably no greater than 0.07, more preferably no greater than 0.06, and most preferably no greater than 0.05, tube tilting can be sufficiently reduced. It is noted that DB2 is the diameter or width of central bore B2 in which the tube 12 is partially located, ODT is the outer diameter of the tube 12, and HB2 is the height of central bore B2 (e.g., see Figs. 9-10). For example, (DB2 - ODT)/HB2 is 0.44 when DB2 is 3.1 mm, ODT is 3.0 mm, and HB2 is 2.25 mm. It has also been found that tube tilting can be reduced by configuring the bores and tube so that a ratio H_B2/T_L is at least 0.30, more preferably at least 0.35, more preferably at least 0.37, where HB2 is the height of central bore B2 and TL is the length of tube 12 (e.g., see Figs. 9-10). The higher this ratio HB2/TL, the less tube tilling. For example, HB2/TL would be 0.375 when HB2 is 2.25 mm and TL is 6.0 mm. Fig. 9 illustrates, according to an example embodiment, the evacuation tube 12 and seal preform 13 in the recess 15, prior to laser sintering/sealing of the tube seal preform 13. Tube 12 is supported by both tube shelf/step 52 at the bottom of the tube, and by perform 13 around the periphery of the tube 12. Preform 13 is resting on and supported by (e.g., directly on, or indirectly on) shelf/step 53 which is the base of the upper bore Bl. Shelves 52 and 53 are substantially parallel to each other in certain example embodiments, and may be concentric as viewed from above. Upper bore Bl is sufficiently sized so that the preform 13 does not contact the sidewall 61 of the upper bore Bl. Gap G2 between the peripheral edge 13a of the preform 13 and the sidewall 61 of the upper bore Bl may be at least about 0.10 mm, more preferably at least about 0.15 mm, more preferably at least about 0.20 mm, in order to reduce chances of seal and/or tube failures/breakage. Preform 13 may be partially melted to the adjacent glass substrate 1 on shelf 53 in bore Bl and/or to the tube 12 during a main binder burnout and/or preglaze heating step, prior to laser firing/sintering. In certain example embodiments, additional bore(s) may be provided.

Figs. 10a and 10b are side cross-sectional views of various example embodiments, e.g., taken along section line A-A in Fig. 7, of an evacuation tube structure after laser sintering/sealing of the tube seal preform 13, which may be used in combination with any embodiment herein including those of Figs. 1-16. Thus, while Fig. 9 illustrates an example panel prior to laser sintering/sealing of the tube seal preform 13, Figs. lOa-lOb illustrate various example embodiments of the panel after the preform 13 has been laser fired/sintered to form the seal 13 around the evacuation tube 12. The cross-sectional shape of the final seal 13 around the evacuation tube 12 is slightly different in Fig. 10b, compared to Fig. 10a, but they are similar in many respects. It can be seen in Figs. 10a- 10b, that the preform and laser processing are designed so that the laser beam 13b from laser 51 impinging upon the preform 13 (e.g., see the laser 51 and donut-shaped/ring- shaped laser beam 13b in Figs. 6 and 8d) causes the seal material of the preform when laser heated to wick upwardly along the outer periphery of tube 12 and form a desirable shape and hermetic seal 13, such as via a capillary effect. Alternatively, instead of using a donut- shaped laser beam, a spot laser may be manipulated/moved to circle the tube 12 to sinter the tube seal material and form the tube seal 13.

Such laser sintering, and materials used and processing techniques, are why the shape of post-laser fired/sintered seal 13 in Figs. 10a- 10b is very different than its shape in Fig. 9 prior to laser firing/sintering of the seal material. In Fig. 9, it can be seen that prior to being laser fired/sintered, the top surface 13d of the preform 13 had an original preform height (OPH). As shown in Figs. 10a- 10b, the laser sintering/firing of the preform caused the seal material 13 to wick upwardly along the tube 12 by an amount corresponding to height HI, so that the upper surface of the seal material 13 in Figs. 10a- 10b after laser firing/sintering thereof is at a height along the tube 12 that is greater than the original preform height (OPH) by vertical distance HI which may be referred to as a hike amount. Figs. lOe-lOf illustrate an example of the preform 13 (black ion color in Figs. lOe-lOf) prior to laser sintering/firing (Fig. lOe) compared to after laser sintering/firing thereof (Fig. 1 Of), with the height difference of the black seal material between Figs. lOe and lOf being the hike/wick amount HI. It can be seen in Figs. 9 and lOa-lOj that the preform 13 may be substantially disc-shaped with substantially parallel upper and lower surfaces prior to laser sintering/firing (e.g., see Figs. 9 and lOe), and substantially bubble-shaped after the laser sintering/firing with an outer surface that is at least partially convex and is upward sloping toward an upper portion of the tube 12 (e.g., see Figs. 10a- lOd and lOf-lOj). The hike/wick amount HI, in certain example embodiments, may be from about 0.35 to 2.20 mm, more preferably from about 0.4 to 2.0 mm, more preferably from about 0.45 to 1.6 mm, more preferably from about 0.75 to 1.25 mm, with example hike amounts being about 0.45, 0.58, 0.66, 0.81, 1.34, and 1.44 mm at various locations around the periphery of the tube. In certain example embodiments, post evacuation the tube height above the glass substrate 1 may be from about 1.5 to 5.0 mm, more preferably from about 2.0 to 4.0 mm, and most preferably from about 2.2 to 2.8 mm. The laser sintering/firing of the seal material 13 causes the seal material to bond more completely to the glass substrate 1 and the glass tube 12, to form the hermetic seal 13 around the periphery of the evacuation tube 12 and with the recess 15 in the glass substrate 1. It can be seen in Figs. lOa-lOd, for example, that the evacuation tube 12 has a first end and a second end opposite the first end, and that the tube seal 13 is spaced apart from and does not contact each of the first end and the second end of the evacuation tube. In certain example embodiments, the top of the seal material 13 does not reach the top of evacuation tube 12, and may be spaced away from the top of the tube 12 by at least about 0.3 mm, more preferably by at least about 0.5 mm, and possibly by at least about 1.0 mm (e.g., see Figs. 10a- lOd and lOf-lOj). In certain example embodiments, the bottom of the seal material 13 does not reach the bottom end of evacuation tube 12, and may be spaced away from the bottom end of the tube 12 by at least about 0.5 mm, more preferably by at least about 1.0 mm, and possibly by at least about 1.5 mm (e.g., see Figs. 10a- 10b). It has been found that tube and/or seal failures can be reduced by spacing the tube seal 13 away from both ends of the tube 12.

Tube seal 13 may be tellurium oxide based, vanadium oxide based, or may be of any other suitable material. Example materials for tube seal 13 are provided herein, both in tables above and in Figs. 11-12 and 14-15.

While the preform 13 is substantially disc-shaped, with a hole through it, prior to laser sintering/firing as shown in Figs. 8a-8c, 9, lOe, after the laser sintering/firing the seal is/becomes substantially bubble-shaped as shown in Figs. lOa-lOd and lOf-lOj. The laser heating of the seal material 13, in certain example embodiments, may cause some bubble-like features (e.g., voids) to form in the seal material 13, which may have a bearing on the hiking/wicking distance up the tube. The bubble-shaped nature of the seal 13 following laser firing/sintering of the seal material (e.g., see Figs. lOa-lOd and lOf- lOj), is due at least to the laser processing, and the material and shape of the ceramic preform 13 prior to lasering. The preform and hermetic seal 13 may be black colored in certain example embodiments (e.g., see Figs. lOc-lOj), or may be any other suitable color, transparent, or opaque. Figs. lOh, lOi, and lOj are perspective photographs of various evacuation tube structures according to various example embodiments, after laser sintering/sealing of the tube seal preform and after laser sealing the tip of the tube, which may be used in combination with any embodiment herein including those of Figs. 1-16.

As shown in Figs. 10a- lOd and lOf-lOj, in certain example embodiments, at least part of the upwardly sloping outer peripheral surface, in the middle 50% of the laser sintered/fired seal 13 with respect to height, is convex in shape relative to the tube when sloping upwardly. Moreover, in certain example embodiments, as shown in Figs. 10a- lOd and lOf-lOj, the middle 50% with respect to height of the upwardly sloping outer peripheral surface of laser sintered/fired seal 13 does not contain any concave shaped portion in certain example embodiments. Moreover, in certain example embodiments, as shown in Figs. 10a- lOd and lOf, the upper 80% with respect to height of the upwardly sloping outer peripheral surface of laser sintered/fired seal 13 does not contain any concave shaped portion in certain example embodiments.

Figs. lOa-lOd and lOf-lOj illustrate that the seal material 13, after the laser sintering/firing which caused the material 13 to wick/hike up the tube by an amount HI, comprises an outer peripheral sidewall/surface 65 that is at least partially convex and at least part of which is upward sloping toward an upper portion of the tube 12 (e.g., see Figs. 10a- lOd and lOf-lOj). Example hike/wick amounts HI, in certain example embodiments, may be about 0.45, 0.58, 0.66, 0.81, 1.34, and 1.44 mm at various locations around the periphery of the tube. The laser firing/sintering of the seal material 13 may also cause the outer peripheral portion of the seal material proximate the base thereof to contract and possibly move further inwardly away from outer wall 61 of upper bore Bl. In certain example embodiments, the seal material 13 is spaced inwardly from and does not contact outer wall 61 of upper bore Bl, both before and after laser firing/sintering of the seal material 13, which reduces seal failures and tube breakage failures. The laser firing/sintering of the seal material may also cause some of the seal material 13 to seep downwardly into gap G1 as shown in Figs. lOa-lOb. However, in certain example embodiments, at least about 30% (more preferably at least about 40%, more preferably at least about 50%, more preferably at least about 60%, and most preferably at least about 70%) of the volume of gap G1 below seal 13 and between the tube 12 and the outer surface of bore B2 is free of and/or not filled with seal material 13, which has been found to reduce seal failures and tube breakage failures.

In certain example embodiments, due to the wicking/hiking of seal material up the tube because of the laser firing/sintering thereof, at least part of the outer sidewall/surface 65 of the laser- sintered/fired seal 13 in the upper 30% of the seal forms an angle 0 of from about 20-80 degrees, more preferably from about 30-80 degrees, more preferably from about 40-80 degrees, more preferably from about 40-75 degrees, more preferably from about 45-70 degrees, and most preferably from about 50-65 degrees, with the lengthwise outer surface of the evacuation tube 12 (e.g., see Figs. lOa-lOd and lOf-lOj). Example angles 0, at various locations around the periphery of the tube 12, may be about 23 degrees, 33 degrees, 43 degrees, 61 degrees, and 69 degrees. For example, for a given panel, angle 0 may be about 43 degrees on one side of the tube and about 33 degrees on the opposite side of the tube. As another example, for a given panel, angle 0 may be about 23 degrees on one side of the tube and about 69 degrees on the opposite side of the tube.

In certain example embodiments, at least about 50% (more preferably at least about 75%, and most preferably at least about 80%) of the outer peripheral sidewall/surface 65 of the laser fired/sintered seal 13 is upwardly sloping away from support surface 53 of the glass substrate 1. In certain example embodiments, at least part of the outer peripheral sidewall/surface 65 of the laser- sintered/fired seal 13 may form at least one of: (a) an angle a of from about 30-90 degrees, more preferably from about 30- 75 degrees, more preferably from about 30-65 degrees, and most preferably from about 40-60 degrees, with the lengthwise outer surface of the evacuation tube 12; and/or (b) an angle 0 of from about 30-80 degrees, more preferably from about 40-75 degrees, and most preferably from about 45-65 degrees, with the supporting base surface 53 of upper bore Bl (e.g., see Figs. lOa-lOd and lOf-lOj). In certain example embodiments, laser firing/sintering of the seal material 13 may also cause the outer peripheral portion of the seal material proximate the base thereof to contract and possibly move further inwardly away from outer wall 61 of upper bore Bl. In other words, in certain example embodiments, in general the laser firing and/or sintering of the seal material 13 may cause the seal material to contract inwardly and/or wick up the tube - not flow outwardly. In certain example embodiments, at the base of seal material the interior side of the upwardly extending wall of the laser- sin tered/fired seal 13, in at least part of the bottom 5% and/or 10% of the seal 13, may form an angle £ of from about 60-150 degrees, more preferably from about 60-140 degrees, more preferably from about 70-130 degrees, more preferably from about 75-120 degrees, and most preferably from about 90-110 degrees, with the base surface 53 of upper bore Bl (e.g., see Figs. 10a- 10b). This has been found to improve durability, adhesion, and/or manufacturability, and reduce seal and/or tube failures. Example angles £, at various locations around the periphery of the tube 12, may be about 88 degrees, 89 degrees, 92 degrees, 97 degrees, and 117 degrees. For example, for a given panel, angle £ may be about 89 degrees on one side of the tube and about 92 degrees on the opposite side of the tube. As another example, for a given panel, angle £ may be about 89 degrees on one side of the tube and about 117 degrees on the opposite side of the tube.

Example technical advantage(s) regarding the above seal/bore/tube features shown in one or more of Figs. lOa-lOj, for example, may include one or more of: improved evacuation tube seal adhesion, improved evacuation tube seal hermiticity, reduced seal and/or glass breakage, reduced crack formation and propagation between the tube seal and the glass tube and the substrate, improved moisture resistance, improved thermal stability during asymmetric thermal conditions, improved durability, faster manufacturing, and/or reduced tilting of evacuation tube 12. Fig. 16 is a flowchart illustrating example steps in making a vacuum insulating panel according to various example embodiments, which may be used in combination with any embodiment herein. Steps 201-204 apply to one of the two substrates, while steps 205-209 apply to the other one of the substrates, and steps 210-213 apply when the substrates are mated to each other via clamping, sealing, and/or the like. For example details regarding various steps 201-213, see one or more of U.S. Patent Application Serial Nos. 18/376,914, 18/376,473, 18/376,479, 18/376,483, 18/379,275, and 18/510,777, the disclosures of which are all hereby incorporated herein by reference in their entireties.

In an example embodiment, there may be provided a vacuum insulating panel comprising: a first glass substrate (e.g., 1); a second glass substrate (e.g., 2); a plurality of spacers (e.g., 4) provided in a gap (e.g., 5) between at least the first and second glass substrates, wherein the gap (e.g., 5) is at pressure less than atmospheric pressure; a first bore (e.g., Bl), a second bore (e.g., B2), and a third bore (e.g., B3) defined in the first substrate (e.g., 1), the first bore being located further from the second substrate than is the third bore, and wherein the second bore is located between at least the first and third bores, wherein the first, second, and third bores have different sizes, wherein at least one diameter and/or width DBI of the first bore (e.g., Bl) is greater than at least one diameter and/or width DB2 of the second bore (e.g., B2), and the diameter and/or width DB2 of the second bore is greater than at least one diameter and/or width DB3 of the third bore (e.g., B3), so that as viewed cross sectionally at at least one location DBI > DB2 > DB3; an evacuation tube (e.g., 12), having a tube length TL and an outer size and/or diameter ODT, provided in the first and second bores; a tube seal (e.g., 13) supported on at least a first support surface (e.g., 53) at a base of the first bore and surrounding at least a periphery of the evacuation tube as viewed from above; wherein a second support surface (e.g., 52), at a base of the second bore (e.g., B2), is configured to support at least the evacuation tube (e.g., 12); and wherein (DB2 - ODT)/HB2 is no greater than 0.09, where HB2 is a height of the second bore (e.g., B2) extending from the second support surface (e.g., 52) to the first support surface (e.g., 53). In the vacuum insulating panel of the immediately preceding paragraph, (DB2 - 0DT)/HB2 may be no greater than 0.07, more preferably no greater than 0.06, more preferably no greater than 0.05.

In the vacuum insulating panel of any of the preceding two paragraphs, a gap may be provided between at least the tube seal and the second support surface of the first glass substrate, wherein the gap between the tube seal and the second support surface of the first glass substrate may be positioned between at least a sidewall of the tube and a sidewall of the second bore which extends from the second support surface, and wherein at least about 30% (more preferably at least about 40%, more preferably at least about 50%, most preferably at least about 60%) of volume of the gap between the tube seal and the second support surface is free of and/or not filled with seal material of the tube seal. The gap provided between at least the tube seal and the second support surface of the first glass substrate may be mostly an air gap. At at least one location viewed cross- sectionally, the gap provided between at least the tube seal and the second support surface may have a width of from about 0.02 to 0.20 mm, more preferably from about 0.03 to 0.10 mm. The gap provided between at least the tube seal and the second support surface may substantially entirely surrounds the tube as viewed from above.

In the vacuum insulating panel of any of the preceding three paragraphs, at least part of an outer peripheral sidewall of the tube seal may be inclined and form an angle a of from about 30-75 degrees with a lengthwise outer surface of the evacuation tube.

In the vacuum insulating panel of any of the preceding four paragraphs, DBI may be at least about 2 mm greater than DB2.

In the vacuum insulating panel of any of the preceding five paragraphs, DB2 may be at least about 0.5 mm greater than DB3. In the vacuum insulating panel of any of the preceding six paragraphs, a ratio DBI/D_B2 may be at least about 1.8.

In the vacuum insulating panel of any of the preceding seven paragraphs, at at least one location proximate a base of the tube seal, at least part of an interior of a peripheral sidewall of the tube seal may form an angle e of from about 60-150 degrees, more preferably from about 70-130 degrees, with the first support surface of the first glass substrate.

In the vacuum insulating panel of any of the preceding eight paragraphs, a ratio H_B2/TL may be at least about 0.30, more preferably at least about 0.35, most preferably at least about 0.37.

In the vacuum insulating panel of any of the preceding nine paragraphs, the tube seal may comprise ceramic material and/or may be laser sintered.

In the vacuum insulating panel of any of the preceding ten paragraphs, the first and second support surfaces may be substantially parallel to each other.

In the vacuum insulating panel of any of the preceding eleven paragraphs, the first, second, and third bores may be substantially concentric.

In the vacuum insulating panel of any of the preceding twelve paragraphs, it is possible that the tube seal need not physically contact any outer sidewall of the first bore at an outer periphery of the first support surface.

In the vacuum insulating panel of any of the preceding thirteen paragraphs, the tube seal may be substantially bubble- shaped.

In the vacuum insulating panel of any of the preceding fourteen paragraphs, the second support surface may contact the evacuation tube. In the vacuum insulating panel of any of the preceding fifteen paragraphs, the tube seal may comprise from about 20-80 wt.% tellurium oxide, the tellurium oxide comprising TeCb and TeOs, and wherein the tube seal may comprise more TeCh than TeO4 by wt.%.

In the vacuum insulating panel of any of the preceding sixteen paragraphs, the tube seal may comprise tellurium oxide, and wherein from about 60-95% of Te in the tube seal may be in a form of TeCh.

In the vacuum insulating panel of any of the preceding seventeen paragraphs, the tube seal may comprise tellurium oxide, and wherein a ratio TcO^TcO? in the tube seal may be from about 0.05 to 0.40.

In the vacuum insulating panel of any of the preceding eighteen paragraphs, the tube seal may comprise tellurium oxide and vanadium oxide, and wherein the tube seal by wt.% may comprise more tellurium oxide than vanadium oxide.

In the vacuum insulating panel of any of the preceding nineteen paragraphs, the first and second glass substrates may comprise tempered glass substrates or heat strengthened glass substrates.

In the vacuum insulating panel of any of the preceding twenty paragraphs, the panel may be configured for use in a window.

In the vacuum insulating panel of any of the preceding twenty-one paragraphs, the panel may further comprise an edge seal.

In the vacuum insulating panel of any of the preceding twenty-two paragraphs, the evacuation tube may comprise glass and/or metal, and wherein an end and/or tip of the evacuation tube may be sealed such as via laser. In the vacuum insulating panel of any of the preceding twenty-three paragraphs, the tube seal may: (a) comprise a layer comprising an oxide of Te that directly contacts the first glass substrate with no primer layer being located therebetween; (b) comprise a layer comprising an oxide of Te, and a primer layer provided between the layer comprising the oxie of Te and one or both of the tube and the first substrate; or (c) may comprise solder glass or any other suitable material.

In the vacuum insulating panel of any of the preceding twenty-four paragraphs, the following relationship may be realized: HB2 > HBI and HB2 > HTS, where HBI, HB2, and HTS are heights of the first, second, and third bores, respectively.

In the vacuum insulating panel of any of the preceding twenty-five paragraphs, DBI may be a substantially a same size throughout the first bore, and/or DB2 may be substantially a same size throughout the second bore.

In the vacuum insulating panel of any of the preceding twenty-six paragraphs, the first, second, and third bores may be substantially circular in shape, or substantially rectangular (e.g., square) in shape, as viewed from above.

In the vacuum insulating panel of any of the preceding twenty-seven paragraphs, DBI may be substantially the same size throughout the upper bore or may vary in size at different locations in the upper bore, depending upon the shape and formation of the upper bore (e.g., Bl); DB2 may be substantially the same size throughout the central bore (e.g., B2) or may vary in size at different locations in the central bore, depending upon the shape and formation of the central bore; and/or DB3 may be substantially the same size throughout lower bore (e.g., B3) or may vary in size at different locations in the lower bore, depending upon the shape and formation of the lower bore.

In the vacuum insulating panel of any of the preceding twenty-eight paragraphs, the first, second, and third bores may be substantially circular in shape, substantially oval in shape, or substantially rectangular in shape, or any other suitable shape, as viewed from above.

In a method of making the vacuum insulating panel of any of the preceding twenty-nine paragraphs, the method may include: using a laser to form (e.g., sinter) the tube seal, the tube seal being supported on at least a first support surface at a base of the first bore; evacuating the gap between at least the first and second glass substrates via the evacuation tube; and/or sealing an end of the evacuation tube (e.g., via a laser).

In an example embodiment, there may be provided a vacuum insulating panel comprising: a first substrate (e.g., 1); a second substrate (e.g., 2); a plurality of spacers (e.g., 4) provided in a gap (e.g., 5) between at least the first and second substrates, wherein the gap (e.g., 5) is at pressure less than atmospheric pressure; a first bore (e.g., Bl), a second bore (e.g., B2), and a third bore (e.g., B3) defined in the first substrate (e.g., 1), the first bore being located further from the second substrate than is the third bore, and wherein the second bore is located between at least the first and third bores, wherein the first, second, and third bores have different sizes, wherein at least one diameter and/or width DBI of the first bore (e.g., Bl) is greater than at least one diameter and/or width DB2 of the second bore (e.g., B2)_; an evacuation tube (e.g., 12), having a tube length TL and an outer size and/or diameter ODr, provided in the first and second bores; a tube seal (e.g., 13) supported on at least a first support surface (e.g., 53) at a base of the first bore; wherein a second support surface (e.g., 52), at a base of the second bore (e.g., B2), is configured to support at least the evacuation tube (e.g., 12); and wherein a ratio H_B2/T_L is at least about 0.30, where HB2 is a height of the second bore (e.g., B2).

In the vacuum insulating panel of the immediately preceding paragraph, the ratio H_B2/TL may be at least about 0.35, more preferably at least about 0.37.

In the vacuum insulating panel of any of the preceding two paragraphs, optionally (DB2 - ODT)/HB2 may be no greater than 0.09, more preferably no greater than 0.07, and even more preferably no greater than 0.05. In the vacuum insulating panel of any of the preceding three paragraphs, a gap (e.g., Gl) may be provided between at least the tube seal (e.g., 13) and the second support surface (e.g., 52) of the first substrate, wherein the gap (e.g., Gl) between the tube seal and the second support surface of the first substrate may be positioned between at least a sidewall of the tube (e.g., 12) and a sidewall (e.g., 57) of the second bore which extends from the second support surface, and wherein at least about 30% (more preferably at least about 40%, more preferably at least about 50%, more preferably at least about 60%) of volume of the gap between the tube seal and the second support surface may be free of and/or not filled with seal material of the tube seal. At at least one location viewed cross- sectionally, the gap (e.g., Gl) provided between at least the tube seal and the second support surface may have a width of from about 0.02 to 0.20 mm.

In the vacuum insulating panel of any of the preceding four paragraphs, at least part of an outer peripheral sidewall of the tube seal may be inclined and form an angle a of from about 30-75 degrees with a lengthwise outer surface of the evacuation tube.

In the vacuum insulating panel of any of the preceding five paragraphs, a ratio DBI/D_B2 may be at least about 1.8.

In the vacuum insulating panel of any of the preceding six paragraphs, at at least one location proximate a base of the tube seal, at least part of an interior of a peripheral sidewall of the tube seal may form an angle & of from about 60-150 degrees, more preferably of from about 70-130 degrees, with the first support surface of the first substrate.

In the vacuum insulating panel of any of the preceding seven paragraphs, the first, second, and third bores may be substantially concentric.

In the vacuum insulating panel of any of the preceding eight paragraphs, the tube seal may comprise from about 20-80 wt.% tellurium oxide, the tellurium oxide comprising TeC and TeOs, and wherein the tube seal may comprise more TeO?, than TeO4 by wt.%.

In the vacuum insulating panel of any of the preceding nine paragraphs, the tube seal may comprise tellurium oxide, and wherein a ratio TeO^TeCh in the tube seal may be from about 0.05 to 0.40.

In the vacuum insulating panel of any of the preceding ten paragraphs, the tube seal may comprise tellurium oxide and vanadium oxide, and wherein the tube seal by wt.% may comprise more tellurium oxide than vanadium oxide.

In the vacuum insulating panel of any of the preceding eleven paragraphs, the first and/or second substrates may comprise tempered glass substrate(s) or heat strengthened glass substrate(s).

In the vacuum insulating panel of any of the preceding twelve paragraphs, the panel may be configured for use in a window.

In the vacuum insulating panel of any of the preceding thirteen paragraphs, the following relationship may be realized: HB2 > HBI and HB2 > HTS, where HBJ , HB2, and HTS are heights of the first, second, and third bores, respectively.

In the vacuum insulating panel of any of the preceding fourteen paragraphs, DBI may be a substantially a same size throughout the first bore, and/or DB2 may be substantially a same size throughout the second bore.

In the vacuum insulating panel of any of the preceding fifteen paragraphs, the first, second, and third bores may be substantially circular in shape, or substantially rectangular (e.g., square) in shape, or any other suitable shape, as viewed from above.

It is to be understood that a singular form of a noun corresponding to an item may include one or more of the things, unless the relevant context clearly indicates otherwise. As used herein, "A or B", "at least one of A and B", "at least one of A or B", "A, B or C", "at least one of A, B and C", and "A, B, or C," each of which may include any one of the items listed together in the corresponding one of the phrases, or all possible combinations thereof. Terms such as “first”, “second”, or “first” or “second” may simply be used to distinguish the component from other components in question, and do not limit the components in other aspects (e.g., importance or order). Terms, such as “first”, “second”, and the like, may be used herein to describe various components. Each of these terminologies is not used to define an essence, order or sequence of a corresponding component but used merely to distinguish the corresponding component from other component(s). For example, a "first" component may be referred to as a "second" component, and similarly, the "second" component may be referred to as the "first" component. “Or” as used herein may cover both “and” and “or.”

It should be noted that if it is described that one component is "connected", "coupled", or "joined" to another component, at least a third component(s) may be "connected", "coupled", and "joined" between the first and second components, although the first component may be directly connected, coupled, or joined to the second component. Thus, terms such as “connected” and “coupled” cover both direct and indirectly connections and couplings.

The singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises/comprising" and/or "includes/including" when used herein, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components and/or populations thereof.

The word “about” as used herein means the identified value plus/minus 5%.

“On” as used herein covers both directly on, and indirectly on with intervening element(s) therebetween. Thus, for example, if element A is stated to be “on” element B, this covers element A being directly and/or indirectly on element B. Likewise, “supported by” as used herein covers both in physical contact with, and indirectly supported by with intervening element(s) therebetween.

Each embodiment herein may be used in combination with any other embodiment(s) described herein.

While the disclosure has been illustrated and described with reference to various example embodiments, it will be understood that the various embodiments are intended to be illustrative, not limiting. It will further be understood by those skilled in the art that various changes in form and detail may be made without departing from the true spirit and full scope of the disclosure, including the appended claims and their equivalents. It will also be understood that any of the embodiment(s) described herein may be used in combination with any other embodiment(s) described herein.

Claims

1. A vacuum insulating panel comprising: a first glass substrate; a second glass substrate; a plurality of spacers provided in a gap between at least the first and second glass substrates, wherein the gap is at pressure less than atmospheric pressure; a first bore, a second bore, and a third bore defined in the first substrate, the first bore being located further from the second substrate than is the third bore, and wherein the second bore is located between at least the first and third bores, wherein the first, second, and third bores have different sizes, wherein at least one diameter and/or width DBI of the first bore is greater than at least one diameter and/or width DB2 of the second bore, and the at least one diameter and/or width DB2 of the second bore is greater than at least one diameter and/or width DB3 of the third bore, so that as viewed cross sectionally for at least one location DBI > DB2 > DB3; an evacuation tube, having a tube length TL and an outer size and/or diameter ODT, provided in the first and second bores; a tube seal supported on at least a first support surface at a base of the first bore and surrounding at least a periphery of the evacuation tube as viewed from above; wherein a second support surface, at a base of the second bore, is configured to support at least the evacuation tube; and wherein (DB2 - ODT)/HB2 is no greater than 0.09, where HB2 is a height of the second bore extending from the second support surface to the first support surface.

2. The vacuum insulating panel of claim 1, wherein (DB2 - 0DT)/HB2 is no greater than 0.07.

3. The vacuum insulating panel of any preceding claim, wherein (DB2 - ODT)/HB2 is no greater than 0.06.

4. The vacuum insulating panel of any preceding claim, wherein (DB2 - ODT)/HB2 is no greater than 0.05.

5. The vacuum insulating panel of any preceding claim, wherein a gap is provided between at least the tube seal and the second support surface of the first glass substrate, wherein the gap between the tube seal and the second support surface of the first glass substrate is positioned between at least a sidewall of the tube and a sidewall of the second bore which extends from the second support surface, and wherein at least about 30% of volume of the gap between the tube seal and the second support surface is free of and/or not filled with seal material of the tube seal.

6. The vacuum insulating panel of claim 5, wherein at least about 40% of volume of the gap between the tube seal and the second support surface is free of and/or not filled with seal material of the tube seal.

7. The vacuum insulating panel of any of claims 5-6, wherein at least about 50% of volume of the gap between the tube seal and the second support surface is free of and/or not filled with seal material of the tube seal.

8. The vacuum insulating panel of any of claims 5-7, wherein the gap provided between at least the tube seal and the second support surface of the first glass substrate is mostly an air gap.

9. The vacuum insulating panel of any of claims 5-8, wherein, for at least one location viewed cross-sectionally, the gap provided between at least the tube seal and the second support surface has a width of from about 0.02 to 0.20 mm.

10. The vacuum insulating panel of any of claims 5-9, wherein, for at least one location viewed cross-sectionally, the gap provided between at least the tube seal and the second support surface has a width of from about 0.03 to 0.10 mm.

11. The vacuum insulating panel of any of claims 5-10, wherein the gap provided between at least the tube seal and the second support surface substantially entirely surrounds the tube as viewed from above.

12. The vacuum insulating panel of any preceding claim, wherein at least part of an outer peripheral sidewall of the tube seal is inclined and forms an angle a of from about 30-75 degrees with a lengthwise outer surface of the evacuation tube.

13. The vacuum insulating panel of any preceding claim, wherein DBI is at least about 2 mm greater than DB2.

14. The vacuum insulating panel of any preceding claim, wherein DB2 is at least about 0.5 mm greater than DB3.

15. The vacuum insulating panel of any preceding claim, wherein a ratio DBI/DB2 is at least about 1.8.

16. The vacuum insulating panel of any preceding claim, wherein for at least one location proximate a base of the tube seal, at least part of an interior of a peripheral sidewall of the tube seal forms an angle & of from about 60-150 degrees with the first support surface of the first glass substrate.

17. The vacuum insulating panel of claim 16, wherein at the location proximate the base of the tube seal, an interior of the peripheral sidewall of the tube seal forms an angle & of from about 70-130 degrees with the first support surface of the first glass substrate.

18. The vacuum insulating panel of any preceding claim, wherein a ratio HB /TL is at least about 0.30.

19. The vacuum insulating panel of any preceding claim, wherein a ratio HB /TL is at least about 0.35.

20. The vacuum insulating panel of any preceding claim, wherein a ratio HB2/TL is at least about 0.37.

21. The vacuum insulating panel of any preceding claim, wherein the tube seal comprises ceramic material and is laser sintered.

22. The vacuum insulating panel of any preceding claim, wherein the first and second support surfaces are substantially parallel to each other.

23. The vacuum insulating panel of any preceding claim, wherein the first, second, and third bores are substantially concentric.

24. The vacuum insulating panel of any preceding claim, wherein the tube seal does not physically contact any outer sidewall of the first bore at an outer periphery of the first support surface.

25. The vacuum insulating panel of any preceding claim, wherein the tube seal is substantially bubble-shaped.

26. The vacuum insulating panel of any preceding claim, wherein the second support surface contacts the evacuation tube.

27. The vacuum insulating panel of any preceding claim, wherein the tube seal comprises from about 20-80 wt.% tellurium oxide, the tellurium oxide comprising TeO4 and TeCh, and wherein the tube seal comprises more TeO? than TeCU by wt.%.

28. The vacuum insulating panel of any preceding claim, wherein the tube seal comprises tellurium oxide, and wherein from about 60-95% of Te in the tube seal is in a form of TeCh.

29. The vacuum insulating panel of any preceding claim, wherein the tube seal comprises tellurium oxide, and wherein a ratio TeO^TeO? in the tube seal is from about 0.05 to 0.40.

30. The vacuum insulating panel of any preceding claim, wherein the tube seal comprises tellurium oxide and vanadium oxide, and wherein the tube seal by wt.% comprises more tellurium oxide than vanadium oxide.

31. The vacuum insulating panel of any preceding claim, wherein the first and second glass substrates comprise tempered glass substrates or heat strengthened glass substrates.

32. The vacuum insulating panel of any preceding claim, wherein the panel is configured for use in a window.

33. The vacuum insulating panel of any preceding claim, wherein the panel further comprises an edge seal.

34. The vacuum insulating panel of any preceding claim, wherein the evacuation tube comprises glass, and wherein an end and/or tip of the evacuation tube is sealed.

35. The vacuum insulating panel of any preceding claim, wherein the tube seal comprises a layer comprising an oxide of Te that directly contacts the first glass substrate with no primer layer being located therebetween.

36. The vacuum insulating panel of any of claims 1-34, wherein the tube seal comprises a layer comprising an oxide of Te, and a primer layer provided between the layer comprising the oxie of Te and one or both of the tube and the first substrate.

37. The vacuum insulating panel of any preceding claim, wherein HB2 > HBI, and HB2 > HTS, where HBI, HB2, and HTS are heights of the first, second, and third bores, respectively.

38. The vacuum insulating panel of any preceding claim, wherein DBI is substantially a same size throughout the first bore.

39. The vacuum insulating panel of any preceding claim, wherein DB2 is substantially a same size throughout the second bore.

40. The vacuum insulating panel of any preceding claim, wherein the first, second, and third bores are substantially circular in shape as viewed from above.

41. The vacuum insulating panel of any of claims 1-39, wherein the first, second, and third bores are substantially rectangular in shape as viewed from above.

42. A method of making a vacuum insulating panel comprising: a first glass substrate; a second glass substrate; a plurality of spacers provided in a gap between at least the first and second glass substrates; a first bore, a second bore, and a third bore defined in the first substrate, the first bore being located further from the second substrate than is the third bore, and wherein the second bore is located between at least the first and third bores, wherein at least one diameter and/or width DBI of the first bore is greater than at least one diameter and/or width DB2 of the second bore, and the at least one diameter and/or width DB2 of the second bore is greater than at least one diameter and/or width DB3 of the third bore_; the method comprising: providing an evacuation tube, having a tube length TL and an outer diameter and/or size ODT, at least partially in the first and second bores of the first glass substrate, so that the evacuation tube is supported by a second support surface at a base of the second bore, and wherein (DB2 - ODT)/HB2 is no greater than 0.09, where HB2 is a height of the second bore, in order to reduce and/or minimize tilting of the evacuation tube during formation of a tube seal and/or sealing of the tube; using at least a laser to form the tube seal, the tube seal being supported on at least a first support surface at a base of the first bore; evacuating the gap between at least the first and second glass substrates via the evacuation tube; and sealing an end of the evacuation tube.

43. A vacuum insulating panel comprising: a first substrate; a second substrate; a plurality of spacers provided in a gap between at least the first and second substrates, wherein the gap is at pressure less than atmospheric pressure; a first bore, a second bore, and a third bore defined in the first substrate, the first bore being located further from the second substrate than is the third bore, and wherein the second bore is located between at least the first and third bores, wherein the first, second, and third bores have different sizes, wherein at least one diameter and/or width DBI of the first bore is greater than at least one diameter and/or width DB2 of the second bore_; an evacuation tube, having a tube length TL and an outer size and/or diameter ODT, provided at least partially in the first and second bores; a tube seal supported on at least a first support surface at a base of the first bore; wherein a second support surface, at a base of the second bore, is configured to support at least the evacuation tube; and wherein a ratio HB /TL is at least about 0.30, where HB2 is a height of the second bore.

44. The vacuum insulating panel of claim 43, wherein the ratio HB2 TL is at least about 0.35.

45. The vacuum insulating panel of any of claims 43-44, wherein a ratio HB2/TL is at least about 0.37.

46. The vacuum insulating panel of any of claims 43-45, wherein (DB2 - ODT)/HB2 is no greater than 0.09.

47. The vacuum insulating panel of any of claims 43-46, wherein (DB2 - ODT)/HB2 is no greater than 0.07.

48. The vacuum insulating panel of any of claims 43-47, wherein (DB2 - ODT)/HB2 is no greater than 0.05.

49. The vacuum insulating panel of any of claims 43-48, wherein a gap is provided between at least the tube seal and the second support surface of the first substrate, wherein the gap between the tube seal and the second support surface of the first substrate is positioned between at least a sidewall of the tube and a sidewall of the second bore which extends from the second support surface, and wherein at least about 30% of volume of the gap between the tube seal and the second support surface is free of and/or not filled with seal material of the tube seal.

50. The vacuum insulating panel of claim 49, wherein at least about 50% of volume of the gap between the tube seal and the second support surface is free of and/or not filled with seal material of the tube seal.

51. The vacuum insulating panel of any of claims 49-50, wherein, fort at least one location viewed cross-sectionally, the gap provided between at least the tube seal and the second support surface has a width of from about 0.02 to 0.20 mm.

52. The vacuum insulating panel of any of claims 43-51, wherein at least part of an outer peripheral sidewall of the tube seal is inclined and forms an angle a of from about 30-75 degrees with a lengthwise outer surface of the evacuation tube.

53. The vacuum insulating panel of any of claims 43-52, wherein a ratio DBI/DB2 is at least about 1.8.

54. The vacuum insulating panel of any of claims 43-53, wherein for at least one location proximate a base of the tube seal, at least part of an interior of a peripheral sidewall of the tube seal forms an angle e of from about 60-150 degrees with the first support surface of the first substrate.

55. The vacuum insulating panel of claim 54, wherein at the location proximate the base of the tube seal, an interior of the peripheral sidewall of the tube seal forms an angle e of from about 70-130 degrees with the first support surface of the first substrate.

56. The vacuum insulating panel of any of claims 43-55, wherein the first, second, and third bores are substantially concentric.

57. The vacuum insulating panel of any of claims 43-56, wherein the tube seal comprises from about 20-80 wt.% tellurium oxide, the tellurium oxide comprising TeO4 and TeO?, and wherein the tube seal comprises more TeO? than TeCU by wt.%.

58. The vacuum insulating panel of any of claims 43-57, wherein the tube seal comprises tellurium oxide, and wherein a ratio TeO^TeCh in the tube seal is from about 0.05 to 0.40.

59. The vacuum insulating panel of any of claims 43-58, wherein the tube seal comprises tellurium oxide and vanadium oxide, and wherein the tube seal by wt.% comprises more tellurium oxide than vanadium oxide.

60. The vacuum insulating panel of any of claims 43-59, wherein the first and second substrates comprise tempered glass substrates or heat strengthened glass substrates.

61. The vacuum insulating panel of any of claims 43-60, wherein the panel is configured for use in a window.

62. The vacuum insulating panel of any of claims 43-61, wherein HB2 > HBI and HB2 > HTS, where HBI, HB2, and HTS are heights of the first, second, and third bores, respectively.

63. The vacuum insulating panel of any of claims 43-62, wherein the first, second, and third bores are substantially circular in shape as viewed from above.

64. A method of making a vacuum insulating panel comprising: a first glass substrate; a second glass substrate; a plurality of spacers provided in a gap between at least the first and second glass substrates; a first bore, a second bore, and a third bore defined in the first substrate, the first bore being located further from the second substrate than is the third bore, and wherein the second bore is located between at least the first and third bores, wherein at least one diameter and/or width DBI of the first bore is greater than at least one diameter and/or width DB2 of the second bore, and the diameter and/or width DB2 of the second bore is greater than at least one diameter and/or width DB3 of the third bore_; the method comprising: providing an evacuation tube, having a tube length TL, in the first and second bores of the first glass substrate, so that the evacuation tube is supported by a second support surface at a base of the second bore, and wherein a ratio HB2/TL is at least about 0.30, where HB2 is a height of the second bore, in order to reduce and/or minimize tilting of the evacuation tube during formation of a tube seal and/or sealing of the tube; using a laser to form the tube seal, the tube seal being supported on at least a first support surface at a base of the first bore; evacuating the gap between at least the first and second glass substrates via the evacuation tube; and sealing an end of the evacuation tube.