WO2025150563A1 - Vibration fluid device - Google Patents

Abstract

Provided is a vibration fluid device that, with a simple structure, prevents unnecessary leakage of vibration and allows visual inspection of the inside of a flow passage. A vibration fluid device 1 comprises: a base body 11; a piezoelectric element 21 that vibrates the base body 11; and a connecting body 31 for attaching the piezoelectric element 21 to the base body 11. The coupling area ratio (Sc/Sp) (%), where Sc is the area of a surface of the connecting body 31, the surface being adjacent to the piezoelectric element 21 and opposing the piezoelectric element 21, and Sp is the area of a surface of the piezoelectric element 21, the surface being adjacent to the connecting body 31 and opposing the connecting body 31, is 50% or less.

Description

vibrating fluid device

The present invention generally relates to a vibrating fluid device that vibrates a pipeline, and more specifically to a vibrating fluid device that uses a piezoelectric element to vibrate a pipeline.

In order to promote fluid mixing and chemical reactions, it is important to make the fluid turbulent. However, as the flow channel diameter decreases with the miniaturization of fluid mixing devices, the flow in the channel tends to become laminar, making it difficult to make the flow turbulent. It has been known that applying mechanical vibrations to the pipe before supplying the fluid to the microchannel can promote fluid mixing and reactions.

Electromagnetic motors are generally used as a source of mechanical vibration. However, electromagnetic methods have problems with large winding losses as they are miniaturized, resulting in extremely low energy efficiency. On the other hand, piezoelectric elements have no windings, have a simple structure, and generate large forces, making them suitable for miniaturization.

　A method of stirring a specimen solution in which a piezoelectric element is used as a source of mechanical vibration to stir a fluid is described in JP 2010-117250 A (Patent Document 1). In this method, an analysis chip to which a specimen solution containing a test substance is applied is placed in a reaction device equipped with a piezoelectric element as a vibration source, and the piezoelectric element is operated to transmit vibrations to the specimen solution, thereby efficiently stirring the specimen solution, aiming to make the reaction uniform and improve the reaction efficiency, and enable quantitative analysis in a short time.

JP 2010-117250 A

When a piezoelectric element is used as a vibration source, a damper is used to prevent vibrations from leaking to areas of the device attached to the piezoelectric element where the vibrations should not be transmitted. However, dampers absorb vibration energy as heat energy, and the generation of this heat energy can be a problem in chemical reactions.

In addition, in Patent Document 1, the specimen is sandwiched between a piezoelectric element and a substrate, but piezoelectric elements are generally opaque, and even piezoelectric elements that are not completely opaque do not transmit enough light. As a result, the state and reaction of the specimen during vibration cannot be visually observed around the piezoelectric element, i.e., the location where the displacement due to vibration is greatest. In addition, it is difficult to irradiate the vibrating specimen with light from outside the flow path.

The object of this invention is to provide a vibration fluid device with a simple configuration that prevents unnecessary leakage due to vibration and allows the inside of the flow path to be visually observed.

As a result of extensive research, the inventors discovered that by setting the base on which the piezoelectric element, the vibration source, is installed so that the displacement due to vibration is relatively small at the installation position of the piezoelectric element and is maximum at a position away from the installation position of the piezoelectric element, it is possible to observe the vibrating fluid from any direction.

Furthermore, the inventor has found that when a piezoelectric element is used as a vibration source, the entire area of the piezoelectric element is usually connected in contact with the base, but the displacement due to vibration at the installation position of the piezoelectric element can be controlled by the ratio of the area of the piezoelectric element to that of the connector that connects the piezoelectric element to the base. According to the inventor's research, when the entire area of the piezoelectric element is brought into contact with the base, as is commonly done in the past, the base and the piezoelectric element behave as one unit, and the part of the base that is in contact with the piezoelectric element also vibrates in accordance with the vibration of the piezoelectric element. However, when the piezoelectric element and the base are brought into contact with each other over a small area, the piezoelectric element and the base behave as separate entities. Therefore, by bringing the piezoelectric element into contact with the base over a small area and further providing areas on the base that are prone to resonate with the piezoelectric element and areas that are unlikely to resonate with the piezoelectric element, it is possible to set vibration areas and damping areas on the base.

Based on these findings, the present invention is configured as follows:

The vibrating fluid device according to the present invention comprises a base and a piezoelectric element that vibrates the base. The piezoelectric element is attached to the base by a connector, and the connector area ratio (Sc/Sp) (%), which is the ratio of the connector area Sc, which is the area of the surface of the piezoelectric element adjacent to the connector and facing the piezoelectric element, to the piezoelectric area Sp, which is the area of the surface of the piezoelectric element adjacent to the connector and facing the piezoelectric element, is 50% or less.

By doing this, when the base is placed in a flow path or a flow path is formed in the base itself, the vibration displacement of the flow path at the installation position of the piezoelectric element can be relatively suppressed, and the vibration displacement of the flow path at the position where the piezoelectric element is not installed can be maximized.

Therefore, according to the present invention, it is possible to provide a vibration fluid device with a simple configuration that prevents unnecessary leakage of vibration and allows the inside of the flow path to be visually observed.

1A and 1B are a perspective view and a front view, respectively, illustrating a vibrating fluid device according to a first embodiment of the present invention. 4 is a diagram showing the outer shape of a connecting body projected onto a piezoelectric element in the vibrating fluid device of the first embodiment. FIG. 3A and 3B are diagrams illustrating examples of a vibration region and a damping region in the vibrating fluid device of the first embodiment. 11A and 11B are a perspective view and a front view, respectively, showing a semi-transparent overall view of a vibrating fluid device according to a second embodiment. 3A and 3B are a perspective view and a front view, respectively, showing a semi-transparent overall view of a vibrating fluid device according to a third A embodiment. 3A and 3B are a perspective view and a front view, respectively, showing a semi-transparent overall view of a vibrating fluid device according to a third embodiment of the present invention. 3A and 3B are a perspective view and a front view, respectively, showing a semi-transparent overall view of a vibrating fluid device according to a third embodiment of the present invention. FIG. 4A is a perspective view showing a schematic view of a vibrating fluid device according to a fourth embodiment of the present invention in a semi-transparent state. 4A is a diagram showing a schematic diagram of the flow velocity at the cross section of the flow path when there is no stirrer in the vibrating fluid device of the 4A embodiment, and FIG. 4B is a diagram showing a schematic diagram of the flow velocity at the cross section of the flow path when there is a stirrer. FIG. 4B is a perspective view showing the entire vibrating fluid device of the fourth B embodiment. 13A and 13B are a perspective view and a front view, respectively, showing a semi-transparent overall view of a vibrating fluid device according to a fifth embodiment. 6A is a perspective view and FIG. 6B is a front view showing a semi-transparent schematic view of a vibrating fluid device according to a 6A embodiment. 6A and 6B are a perspective view and a front view, respectively, showing a semi-transparent overall view of a vibrating fluid device according to a sixth embodiment of the present invention. 6A and 6B are a perspective view and a front view, respectively, showing a semi-transparent overall view of a vibrating fluid device according to a 6C embodiment. 6D is a schematic diagram showing a semi-transparent entire vibrating fluid device according to the embodiment, (A) an oblique view, (B) an enlarged view of a flow stopping portion, and (C) an oblique view from below of a connecting portion of a piezoelectric element. 13A and 13B are a perspective view and a front view, respectively, showing a semi-transparent overall view of a vibrating fluid device according to a seventh embodiment. (A) is an oblique view showing a schematic diagram of the entire vibrating fluid device of the eighth embodiment in a semi-transparent manner, (B) is an enlarged view of a portion having a protrusion protruding into the inside of the flow path, and (C) is a cross-sectional view of a portion having a protrusion protruding into the inside of the flow path. 13A is a schematic perspective view of a vibrating fluid device according to a modified example of the eighth embodiment, in which the entire device is semi-transparent, (B) is a front view, and (C) is a partially enlarged view showing the base body, the vibration damping connecting portion, and the weight. FIG. 23 is a perspective view showing a schematic view, in a semi-transparent state, of a vibrating fluid device according to another modified example of the eighth embodiment. 13A and 13B are a perspective view and a front view, respectively, showing a semi-transparent overall view of a vibrating fluid device according to a ninth embodiment. 1 is a diagram showing the relationship between the ratio (Sc/Sp) of the connector area (Sc) to the piezoelectric element area (Sp) and the amount of displacement due to vibration in the vibrating fluid device of Example 1. FIG. 4 is a vibration displacement diagram showing the displacement due to vibration of the vibrating fluid device of Example 1 by finite element method (FEM) analysis. FIG. 11A and 11B are vibration displacement diagrams showing the displacement due to vibration of the vibrating fluid device of Example 2 by finite element method (FEM) analysis, in which (A) is a perspective view and (B) is a front view. 11A and 11B are vibration displacement diagrams showing the displacement due to vibration of the vibrating fluid device of Example 3A by finite element method (FEM) analysis, in which (A) is a perspective view and (B) is a front view. 11A and 11B are vibration displacement diagrams showing the displacement due to vibration of the vibrating fluid device of Example 3B by finite element method (FEM) analysis, in which (A) the vibration mode of the resonant frequency due to the first piezoelectric element and (B) the vibration mode of the resonant frequency due to the second piezoelectric element are shown. 11A and 11B are vibration displacement diagrams showing the displacement due to vibration of the vibrating fluid device of Example 3C by finite element method (FEM) analysis, in which (A) the vibration mode of the resonant frequency due to the first piezoelectric element and (B) the vibration mode of the resonant frequency due to the second piezoelectric element are shown. 13A and 13B are vibration displacement diagrams showing the displacement due to vibration of the vibrating fluid device of Example 7 by finite element method (FEM) analysis, in which (A) is an overall perspective view and (B) is a front view. FIG. 13 is a vibration displacement diagram showing the displacement due to vibration of the vibrating fluid device of Example 8 by finite element method (FEM) analysis. FIG. 13 is a vibration displacement diagram showing the displacement due to vibration of the vibrating fluid device of Example 9 by finite element method (FEM) analysis.

The vibrating fluid device of the present invention will be described in detail below, with specific examples. Note that the present invention is not limited to the embodiments shown below, and various modifications are possible without departing from the technical concept of the present invention.

In the present invention, the term "fluid" includes liquids, gases, and powders. Furthermore, the term "piezoelectric element" includes piezoelectric ceramics, piezoelectric single crystals, piezoelectric thin films, piezoelectric polymer materials, and the like.

First Embodiment
As shown in Fig. 1, the vibrating fluid device 1 includes a base 11, a piezoelectric element 21 that vibrates the base 11, and a connector 31 for attaching the piezoelectric element 21 to the base 11. The piezoelectric element 21 and the connector 31 are bonded with an adhesive, and the connector 31 is bonded to the base 11 with an adhesive. The base 11 is preferably made of a material that transmits light, such as quartz glass. When the fluid is to be visually confirmed during vibration or when light is irradiated onto the fluid from outside the flow path, it is particularly preferable that the base 11 be made of quartz glass. The connector 31 is made of, for example, brass, and a known connector material for the piezoelectric element 21 can be used.

When vibrating a fluid, the base 11 is brought into contact with the fluid (not shown), and the piezoelectric element 21 acts as a vibration source to vibrate the fluid, thereby directly affecting the behavior of the fluid. As a method for bringing the base 11 into contact with the fluid, for example, the base 11 may be immersed in the fluid in a flow path, or the flow path may be formed by the base 11.

As shown in FIG. 2, in the vibrating fluid device 1 of the present invention, the ratio of the area of the surface of the piezoelectric element 21 adjacent to the connecting body 31 and facing the connecting body 31, i.e., the piezoelectric element area Sp surrounded by the outer shape Lp of the piezoelectric element 21 to the area of the surface of the connecting body 31 adjacent to the piezoelectric element 21 and facing the piezoelectric element 21, i.e., the connecting body area Sc surrounded by the outer shape Lc of the connecting body 31, is a connecting area ratio (Sc/Sp) (%) of 50% or less, and the connecting area ratio (Sc/Sp) is preferably 20% or less, and more preferably 10% or less.

The lower limit of the connection area ratio (Sc/Sp) is set based on the required connection strength, and is, for example, 0.5%.

As shown in FIG. 3, by making the shape, size, and mass of the base 11 different on the left and right sides of the connecting body 31, it is possible to set a vibration region 111 that resonates with the piezoelectric element 21 and a damping region 112 that does not easily resonate with the piezoelectric element 21 within the base 11.

By doing this, when the base 11 is placed in a flow path or a flow path is formed in the base 11 itself, the vibration displacement of the flow path at the installation position of the piezoelectric element 21 can be relatively suppressed, and the vibration displacement of the flow path at the position where the piezoelectric element 21 is not installed can be maximized.

Therefore, according to the present invention, it is possible to provide a vibration fluid device 1 that has a simple configuration, prevents unnecessary leakage of vibration, and allows the inside of the flow path to be visually observed.

Second Embodiment
4, the vibrating fluid device 2 of the second embodiment includes a base 12, a piezoelectric element 22 that vibrates the base 12, and a connector 32 for attaching the piezoelectric element 22 to the base 12. As in the first embodiment, by making the shape, size, and mass of the base 12 different on the left and right sides of the connector 32, it is possible to set, within the base 12, a vibration region 121 that resonates with the piezoelectric element 22 and a damping region 122 that does not easily resonate with the piezoelectric element 22.

The vibrating fluid device 2 of the second embodiment differs from the vibrating fluid device 1 of the first embodiment in that a flow path 42 is formed inside the base body 12. The flow path 42 has two fluid ports 421a, 421b that fluidly connect the inside and outside of the flow path 42, an outlet 422, and a junction 423.

The fluid flows in through inlets 421a and 421b formed near end 122a on the damping region 122 side, merges at junction 423 located near end 121a on the vibration region 121 side, flows toward outlet 422, and flows out from outlet 422. Since no piezoelectric element 32 is installed at junction 423 and vibration is not suppressed, the reaction when the fluids flowing in from inlets 421a and 421b are mixed can be visually observed.

The rest of the configuration and effects of the second embodiment are the same as those of the first embodiment.

<3A embodiment>
5, the vibrating fluid device 3A of the 3A embodiment includes a base 13, a piezoelectric element 23 that vibrates the base 13, and a connector 33 for attaching the piezoelectric element 23 to the base 13. The piezoelectric element 23 and the connector 33 are bonded with an adhesive, and the connector 33 is bonded to the base 13 with an adhesive. As in the first embodiment, by making the shape, size, and mass of the base 13 different on the left and right sides of the connector 33, it is possible to set, within the base 13, a vibration region 131 that resonates with the piezoelectric element 23 and a damping region 132 that does not easily resonate with the piezoelectric element 23.

The vibrating fluid device 3A of the third embodiment differs from the vibrating fluid device 1 of the first embodiment in that the base body 13 is formed in a tubular shape and has a flow path 43 formed therein.

By doing this, if the base 13 is made of a light-transmitting material such as quartz glass, the inside of the flow channel 43 can be viewed from all directions perpendicular to the axis of the flow channel 43, and analysis and chemical synthesis can be performed during vibration by irradiating it with light such as ultraviolet or infrared rays from all perpendicular directions.

The other configurations and effects of the 3A embodiment are the same as those of the first embodiment.

<Third B embodiment>
As shown in Figure 6, the vibrating fluid device 3B of the 3B embodiment comprises a base 13, a first piezoelectric element 231 that vibrates the base 13, a second piezoelectric element 232, a first connecting body 331 for attaching the first piezoelectric element 231 to the base 13, and a second connecting body 332 for attaching the second piezoelectric element 232.

The first direction of the bending motion excited by the first piezoelectric element 231 and the second direction of the bending motion excited by the second piezoelectric element 232 are approximately perpendicular to each other. The frequency of the AC voltage applied to the first piezoelectric element 231 and the frequency of the AC voltage applied to the second piezoelectric element 232 may be approximately the same or different. Furthermore, the phase of the AC voltage applied to the first piezoelectric element 231 and the phase of the AC voltage applied to the second piezoelectric element 232 may be approximately the same or different, or may differ by approximately 90°.

To increase the efficiency of stirring by rotating the fluid, it is desirable for the rotation direction of the fluid to alternate between forward and reverse. This can be achieved by creating a frequency difference between the AC voltage applied to the first piezoelectric element 231 and the AC voltage applied to the second piezoelectric element 232. The rotation direction of the fluid is determined by the relative relationship between the vibration directions of the two piezoelectric elements 231, 232, but because there is a difference in the frequency of both vibrations, the relative directional relationship between the two vibrations changes over time. This is why the rotation direction alternates between forward and reverse.

An explanation will be added to facilitate further understanding. For example, in the case where there is a first piezoelectric element 231 that generates up-and-down vibrations and a second piezoelectric vibrator 232 that generates left-and-right vibrations, when the fluid in the flow path 43 is displaced upward by the first piezoelectric element 231, displaced right by the second piezoelectric element 232 at the next moment, displaced downward by the first piezoelectric element 231 at the next moment, and displaced left by the second piezoelectric element 232 at the next moment, this is considered to be a right rotation (clockwise = forward rotation) when viewed continuously. On the other hand, when the fluid in the flow path 43 is displaced upward by the first piezoelectric element 231, displaced left by the second piezoelectric element 232 at the next moment, displaced downward by the first piezoelectric element 231 at the next moment, and displaced right by the second piezoelectric element 232 at the next moment, this is considered to be a left rotation (counterclockwise = reverse rotation) when viewed continuously. In this way, the difference between clockwise and counterclockwise rotation is due to the difference in the relative direction of the two vibrations. If there is a difference in frequency between the up-down vibration and the left-right vibration, the relative relationship of the vibration directions will change over time, and clockwise and counterclockwise rotations will be repeated alternately over time.

Thus, in the vibrating fluid device, the first direction of vibration caused by bending of the first piezoelectric element 231 and the second direction of vibration caused by bending of the second piezoelectric element 232 are approximately perpendicular to each other, and it is preferable that the frequency of the AC voltage applied to the first piezoelectric element 231 and the frequency of the AC voltage applied to the second piezoelectric element 232 are different.

As in the third embodiment, by making the shape, size, and mass of the base 13 different between the left and right connecting bodies 331, 332, it is possible to set a vibration region 131 that resonates with the piezoelectric elements 231, 232 and a damping region 132 that does not easily resonate with the piezoelectric elements 231, 232 within the flow path 43 of the base 13.

In this way, when the vibrating fluid device has multiple piezoelectric elements, the position and orientation of the piezoelectric elements can be changed as desired.

The other configurations and effects of the 3B embodiment are the same as those of the 3A embodiment.

<3C embodiment>
As shown in Figure 7, the vibrating fluid device 3C of the 3C embodiment comprises a base 13, a first piezoelectric element 231 that vibrates the base 13, a second piezoelectric element 232, a first connecting body 331 for attaching the first piezoelectric element 231 to the base 13, and a second connecting body 332 for attaching the second piezoelectric element 232.

The oscillating fluid device 3C of the 3C embodiment differs from the oscillating fluid device 3B of the 3B embodiment in that the distance between the first piezoelectric element 231 and the second piezoelectric element 232 is increased, and a vibration region 131 that resonates with the piezoelectric elements 231 and 232 is formed between the first piezoelectric element 231 and the second piezoelectric element 232.

The other configurations and effects of the 3C embodiment are the same as those of the 3B embodiment.

<4A embodiment>
8, the vibrating fluid device 4A of the 4A embodiment, like the 3A embodiment, comprises a tubular base 14, a piezoelectric element 24 that vibrates the base 14, and a connector 34 for attaching the piezoelectric element 24 to the base 14, and a flow path 44 is formed inside the base 14. Like the 3A embodiment, by making the shape, size, and mass of the base 14 different on the left and right sides of the connector 34, it is possible to set a vibration region 141 that resonates with the piezoelectric element 24 and a damping region 142 that does not easily resonate with the piezoelectric element 24 within the flow path 44 of the base 14.

The vibrating fluid device 4A of the 4A embodiment differs from the vibrating fluid device 3A of the 3A embodiment in that in the vibrating fluid device 4A, a rod-shaped stirrer 54a is housed in the flow path 44. The cross section of the stirrer 54a housed in the flow path 44 that is perpendicular to the flow path 44 occupies the center of the cross section of the flow path 44 that is perpendicular to the flow path.

It is known that when a flow path pipe is forcibly displaced using a piezoelectric element, the fluid follows the principle of the so-called forced vortex. As shown in FIG. 9(A), when no stirrer is housed in flow path 44, the flow velocity of the fluid in flow path 44 (arrow) is greater on the outside and smaller on the inside, and the flow velocity is zero at the center of the flow path (flow path axis). On the other hand, as shown in FIG. 9(B), when stirrer 54a is housed in flow path 44 so that the cross section perpendicular to flow path 44 of stirrer 54a occupies the center of the cross section perpendicular to flow path 44 of stirrer 54a, stirrer 54a occupies the area in the center of the flow path where the flow velocity is zero, and the area where the flow velocity is zero can be eliminated.

By doing this, the fluid can be stirred more effectively.

The rest of the configuration and effects of the 4A embodiment are the same as those of the 3A embodiment.

<Fourth B embodiment>
As shown in Figure 10, the vibrating fluid device 4B of the 4B embodiment, like the 4A embodiment, comprises a tubular base 14, a piezoelectric element 24 that vibrates the base 14, and a connector 34 for attaching the piezoelectric element 24 to the base 14, and a flow path 44 is formed inside the base 14, and a stirrer 54b is housed within the flow path 44.

The oscillating fluid device 4B of the 4B embodiment differs from the oscillating fluid device 4A of the 4A embodiment in that the agitators 54b in the oscillating fluid device 4B are spherical rather than rod-shaped, and there are multiple agitators.

In this way, the shape and number of the stirrers 54b can be cylindrical, prismatic, spherical, or other, and can be set according to the properties and purpose of the fluid to be stirred. The stirrers may also be grooved.

The other configurations and effects of the 4B embodiment are the same as those of the 4A embodiment.

Fifth Embodiment
11 , like the vibrating fluid device 2 of the second embodiment, the vibrating fluid device 5 of the fifth embodiment includes a base 15, a piezoelectric element 25 that vibrates the base 15, a connector 35 for attaching the piezoelectric element 25 to the base 15, and a flow path 45 formed inside the base 15. The flow path 45 has two fluid ports 451 a, 451 b that fluidly communicate the inside and outside of the flow path 45, an outlet 452, and a junction 453.

The fifth embodiment of the oscillating fluid device 5 differs from the second embodiment of the oscillating fluid device 2 in that a stirrer 55 is housed within the junction 453.

The vibrating fluid device 5 of the fifth embodiment further includes a weight 65 having a mass. The weight 65 is attached to the base 15 by any method, such as by adhesive or screw fastening, so as to support from below the side of the base 15 on which the inlets 451a, 451b and the outlet 452 are formed. Any known adhesive can be used, for example an epoxy adhesive.

By adjusting the shape, size, and mass of the weight 65, it is possible to more easily and stably set within the base 15 a vibration region 151 that resonates with the piezoelectric element 25 and a damping region 152 that does not easily resonate with the piezoelectric element 25.

The fluid flows in through inlets 421a and 421b formed near end 152a on the damping region 152 side, merges at junction 453 located near end 151a on the vibration region 151 side, flows toward outlet 452, and flows out from outlet 452. Since no piezoelectric element 35 is installed at junction 453 and vibration is not suppressed, the reaction when the fluids flowing in from inlets 451a and 451b are mixed can be visually observed.

The stirrer 55 is housed in the confluence 453 of the flow paths 45 in the vibration region 151, allowing the fluid to be stirred more effectively.

The rest of the configuration and effects of the fifth embodiment are the same as those of the second embodiment.

<6A embodiment>
As shown in Figure 12, the vibrating fluid device 6A of the 6A embodiment, like the vibrating fluid device 4B of the 4B embodiment, comprises a tubular base 16, a piezoelectric element 26 that vibrates the base 16, and a connector 36 for attaching the piezoelectric element 26 to the base 16, and a flow path 46 is formed inside the base 16, and a plurality of spherical stirrers 56 are housed within the flow path 46.

The vibrating fluid device 6A of the 6A embodiment further includes a weight 66 having a mass as an example of a vibration damping section. The weight 66 is attached to the base 16 on the side opposite the piezoelectric element 26 on which the stirrer 56 is housed, by any method such as adhesive or screw fastening. Any known adhesive can be used, for example, an epoxy adhesive.

By adjusting the shape, size, and mass of the weight 66, it is possible to more easily and stably set a vibration region 161 that resonates with the piezoelectric element 26 and a damping region 162 that does not easily resonate with the piezoelectric element 26 within the flow path 46 of the base 16.

By placing the weight 66 on the opposite side to the stirrer 56, the portion housing the stirrer 56 can be made into a vibration region 161, and the fluid can be stirred more effectively in the vibration region 161.

The other configurations and effects of the 6A embodiment are the same as those of the 4B embodiment.

<6B embodiment>
As shown in Fig. 13, the vibrating fluid device 6B of the 6B embodiment includes a tubular base 16, a first piezoelectric element 261 for vibrating the base 16, a second piezoelectric element 262, a first connector 361 for attaching the first piezoelectric element 261 to the base 16, and a second connector 362 for attaching the second piezoelectric element 262. A flow path 46 is formed in the base 16, and a stirrer 56 is housed in the flow path 46. A weight 66 is attached to the base 16 on the side opposite to the side where the stirrer 56 is housed with respect to the piezoelectric element 26 by any method, such as adhesive or screw fastening. A known adhesive can be used, for example, an epoxy adhesive.

The weight 66 makes the side of the weight 66 relative to the piezoelectric elements 261, 262 into a damping region 162, and the portion housing the stirrer 56 into a vibration region 161, allowing the fluid to be stirred more effectively in the vibration region 161.

The other configurations and effects of the 6B embodiment are the same as those of the 6A embodiment.

<6C embodiment>
14 , the vibrating fluid device 6C of the 6C embodiment, like the vibrating fluid device 6B of the 6B embodiment, includes a tubular base 16, a first piezoelectric element 261 that vibrates the base 16, a second piezoelectric element 262, a first connector 361 for attaching the first piezoelectric element 261 to the base 16, and a second connector 362 for attaching the second piezoelectric element 262. A flow path 46 is formed in the base 16, and a stirrer 56 is housed in the flow path 46.

The oscillating fluid device 6C of the 6C embodiment differs from the oscillating fluid device 6B of the 6B embodiment in that the distance between the first piezoelectric element 261 and the second piezoelectric element 262 is increased, weights 66 are attached to the outside of the first piezoelectric element 261 and the outside of the second piezoelectric element 262, and the stirrer 56 is housed in the flow path 46 between the first piezoelectric element 261 and the second piezoelectric element 262.

In the vibrating fluid device 6C, a vibration region 161 that resonates with the piezoelectric elements 261, 262 is formed between the first piezoelectric element 261 and the second piezoelectric element 262 by two weights 66, and a damping region 162 is formed outside the first piezoelectric element 261 and outside the second piezoelectric element 262.

The other configurations and effects of the 6C embodiment are the same as those of the 6B embodiment.

<6D embodiment>
As shown in Fig. 15, the vibrating fluid device 6D of the 6D embodiment includes a tubular base 16, a first piezoelectric element 261 for vibrating the base 16, a second piezoelectric element 262, a first connecting body 361 for attaching the first piezoelectric element 261 to the base 16, and a second connecting body 362 for attaching the second piezoelectric element 262. The connecting bodies 361 and 362 are formed in a ring shape, and an adhesive 362a is interposed between the connecting bodies 361 and 362 and the piezoelectric elements 261 and 262. A known adhesive can be used as the adhesive, and for example, an epoxy adhesive can be used. The piezoelectric element 261 and the connecting body 361 are bonded with an adhesive, the base 16 is passed through the annular portion of the connecting body 361, and the connecting body 361 and the base 16 are also bonded with an adhesive. A flow path 46 is formed in the base 16, and a stirrer 56 is accommodated in the flow path 46. The distance between the first piezoelectric element 261 and the second piezoelectric element 262 is widened, and weights 66 are attached to the outside of the first piezoelectric element 261 and the outside of the second piezoelectric element 262 by any method such as adhesive or screw fastening, and the stirrer 56 is accommodated in the flow path 46 between the first piezoelectric element 261 and the second piezoelectric element 262. A known adhesive can be used, for example, an epoxy adhesive. The two weights 66 form a vibration region 161 that resonates with the piezoelectric elements 261 and 262 between the first piezoelectric element 261 and the second piezoelectric element 262, and a damping region 162 is formed on the outside of the first piezoelectric element 261 and the outside of the second piezoelectric element 262.

The vibrating fluid device 6D of the 6D embodiment differs from the vibrating fluid device 6C of the 6C embodiment in that the flow path 46 has a convex portion 76 downstream of the stirrer 56 in the fluid flow direction as a flow stopper with an inner diameter smaller than the maximum diameter of the stirrer 56. This makes it possible to prevent the stirrer 56 from moving away from the vibration region 171 where the vibration displacement is large.

The other configurations and effects of the 6D embodiment are the same as those of the 6C embodiment.

Seventh Embodiment
16, the vibrating fluid device 7 of the seventh embodiment includes a base 17, a piezoelectric element 27 that vibrates the base 17, a connector 37 for attaching the piezoelectric element 27 to the base 17, and a flow path 47 formed inside the base 17. The flow path 47 has two inlets 471a, 471b that fluidly communicate the inside and outside of the flow path 47, an outlet 472, and a junction 473. A stirrer 57 is housed inside the junction 473.

The vibrating fluid device 7 further includes a weight 67 as an example of a vibration-damping part having mass. The weight 67 is frame-shaped and is attached to the base 17 by any method, such as adhesive or screw fastening, so as to sandwich and support the entire circumference of the base 17 from above and below. Any known adhesive can be used, such as an epoxy adhesive. The two fluid ports 471a, 471b and the flow outlet 472 are formed outside the weight 67, and the confluence 473 is formed inside the frame of the weight 67.

By adjusting the shape, size, and mass of the weight 67, it is possible to more easily and stably set within the base 17 a vibration region 171 that resonates with the piezoelectric element 27 and a damping region 172 that does not easily resonate with the piezoelectric element 27. In this embodiment, the vibration region 171 is formed in the center of the base 17, and the damping region 172 is formed on the periphery.

The fluid flows in through inlets 471a and 471b formed in the damping region 172, merges at a junction 473 located in the vibration region 171, flows toward an outlet 472 formed in the damping region 172, and flows out through the outlet 472. Since no piezoelectric element 37 is installed at the junction 473 and vibration is not suppressed, the reaction when the fluids flowing in from the inlets 471a and 471b are mixed can be visually observed.

The stirrer 57 is housed in the confluence 473 of the flow paths 47 in the vibration region 171, allowing the fluid to be stirred more effectively.

The rest of the configuration and effects of the seventh embodiment are the same as those of the fifth embodiment.

Eighth Embodiment
As shown in Fig. 17, the vibrating fluid device 8 of the eighth embodiment includes a tubular base body 18, a first piezoelectric element 281 for vibrating the base body 18, a second piezoelectric element 282, a first connecting body 381 for attaching the first piezoelectric element 281 to the base body 18, and a second connecting body 382 for attaching the second piezoelectric element 282, as in the vibrating fluid device 6D of the sixth embodiment. The connecting bodies 381 and 382 are formed in a cylindrical shape, and an adhesive is interposed between the connecting bodies 381 and 382 and the piezoelectric elements 281 and 282. A known adhesive can be used as the adhesive, for example, an epoxy adhesive can be used. The connecting bodies 381 and 382 and the base body 18 are also bonded with an adhesive. A flow path 48 is formed in the base body 18.

The first piezoelectric element 281 and the second piezoelectric element 282 are arranged on either side of the midpoint 484 between the inlet 481 and the outlet 482 of the flow path 48. The weights 681, 682 are attached to the outside of the first piezoelectric element 281 and the outside of the second piezoelectric element 282 by any method, such as adhesive or screw fastening. Any known adhesive can be used, for example, an epoxy adhesive. The two weights 681, 682 form a vibration region 181 between the first piezoelectric element 281 and the second piezoelectric element 282 that resonates with the piezoelectric elements 281, 282, and a damping region 182 is formed on the outside of the first piezoelectric element 281 and the outside of the second piezoelectric element 282.

Unlike the 6D embodiment, no stirrer is housed in the flow path 48 of the vibrating fluid device 8 of the 8th embodiment. At the midpoint 484 between the inlet 481 and the outlet 482 of the flow path 48, the inner wall of the flow path 48 has a protrusion 78 that protrudes into the flow path 48.

Furthermore, unlike the 6D embodiment, the vibrating fluid device 8 of the 8th embodiment includes vibration-damping connectors 881, 882 for connecting the base 18 and the weights 681, 682, and the area over which the vibration-damping connectors 881, 882 and the base 18 face each other, or the area over which the vibration-damping connectors 881, 882 and the weights 681, 682 face each other, is smaller than the area over which the base 18 faces the weights 681, 682. The vibration-damping connectors 881, 882 are formed from a material having the same thermal expansion coefficient as the material of the weights 681, 682. The vibration-damping connectors 881, 882 and the weights 681, 682 are attached by any method, such as by adhesive or screw fastening. A known adhesive can be used, for example, an epoxy-based adhesive.

In the eighth embodiment of the vibrating fluid device 8, as a modified example different from that shown in FIG. 17, as shown in FIG. 18, the vibration-damping connectors 881, 882 of the vibrating fluid device 8B do not have to be attached to the center of the upper surface of the weights 681, 682. The vibration-damping connectors 881, 882 may be attached to any position on the upper surface of the weights 681, 682, such as the end of the upper surface of the weights 681, 682.

As a further modified example of the vibrating fluid device 8B of the eighth embodiment, as shown in FIG. 19, in the vibrating fluid device 8C, as in the third embodiment, the first direction of the bending motion excited by the first piezoelectric element 281 and the second direction of the bending motion excited by the second piezoelectric element 282 are substantially perpendicular to each other. The frequency of the AC voltage applied to the first piezoelectric element 281 and the frequency of the AC voltage applied to the second piezoelectric element 282 may be substantially the same or different. The phase of the AC voltage applied to the first piezoelectric element 281 and the phase of the AC voltage applied to the second piezoelectric element 282 may be substantially the same or different, or may differ by approximately 90°. The weights 681 and 682 are also attached at positions and orientations rotated 90° from each other around the flow path axis, and the vibration damping connecting parts 881 and 882 are also attached at positions and orientations rotated 90° from each other around the flow path axis.

In this way, when the vibrating fluid device has multiple weights, the positions and orientations of the weights can be changed as desired.

The rest of the configuration and effects of the eighth embodiment are the same as those of the sixth embodiment.

Ninth embodiment
20, the vibrating fluid device 9 of the ninth embodiment includes a base 19, piezoelectric elements 291, 292 that vibrate the base 19, connectors 391, 392 for attaching the piezoelectric elements 291, 292 to the base 19, and a flow path 49 formed inside the base 19. The flow path 49 has two inlets 491a, 491b that fluidly communicate between the inside and outside of the flow path 49, an outlet 492, and a junction 493.

The vibrating fluid device 9 further includes weights 691, 692 as an example of a vibration-damping section having mass. Unlike the seventh embodiment, the weights 691, 692 are not frame-shaped, but are attached to the base 19 so as to support both ends of the base 19 from below. The two fluid ports 491a, 491b, the outlet 492, and the junction 493 are formed inside the weights 691, 692. Also, unlike the seventh embodiment, the vibrating fluid device 9 of the ninth embodiment includes vibration-damping connecting sections 891, 892 for connecting the base 19 and the weights 691, 692, and the area where the vibration-damping connecting sections 691, 692 and the base 19 face each other, or the area where the vibration-damping connecting sections 891, 892 and the weights 69 face each other, is smaller than the area where the base 19 and the weights 691, 692 face each other. The vibration-damping connections 891, 892 are made of a material that has the same thermal expansion coefficient as the material of the weights 691, 692.

Unlike the seventh embodiment, the flow path 49 of the vibrating fluid device 9 of the ninth embodiment does not house a stirrer.

By adjusting the shape, size, and mass of the weights 691, 692, it is possible to more easily and stably set within the base 19 a vibration region 191 that resonates with the piezoelectric element 29 and a damping region 192 that does not easily resonate with the piezoelectric elements 291, 292. In this embodiment, the vibration region 191 is formed in the center of the base 19, and the damping region 192 is formed at the end.

The fluid flows in through inlets 491a and 491b formed in the damping region 192, joins at a junction 493 located in the vibration region 191, flows toward an outlet 492 formed in the damping region 192, and flows out through the outlet 492. Since no piezoelectric elements 291 and 292 are installed at the junction 493 and vibration is not suppressed, the reaction when the fluids flowing in from the inlets 491a and 491b are mixed can be visually observed.

The rest of the configuration and effects of the ninth embodiment are the same as those of the seventh embodiment.

The present invention can be summarized as follows:

(1) A vibrating fluid device comprising a base, a piezoelectric element for vibrating the base, and a connector for attaching the piezoelectric element to the base, in which the connector area ratio (Sc/Sp) (%) is 50% or less, as the ratio of the connector area Sc, which is the area of the surface of the connector adjacent to the piezoelectric element and facing the piezoelectric element, to the piezoelectric area Sp, which is the area of the surface of the piezoelectric element adjacent to the connector and facing the piezoelectric element.

(2) A vibrating fluid device as described in (1) in which the connection area ratio is 20% or less.

(3) A vibrating fluid device as described in (1) in which the connection area ratio is 10% or less.

(4) A vibrating fluid device as described in (1), in which a flow path is formed inside the base.

(5) A vibrating fluid device as described in (4), in which the inner wall of the flow path has a protrusion that protrudes into the flow path.

(6) The vibrating fluid device described in (4), in which the substrate is flat.

(7) A vibrating fluid device as described in (4) that includes a stirrer housed within the flow path.

(8) A vibrating fluid device as described in (7), in which the cross section of the stirrer housed in the flow path perpendicular to the flow path occupies the center of the cross section of the flow path perpendicular to the flow path.

(9) A vibrating fluid device as described in (7), in which the flow path has a flow stopper portion downstream of the stirrer in the flow direction of the fluid, the flow stopper portion having an inner diameter smaller than the maximum diameter of the stirrer.

(10) A vibrating fluid device according to any one of (1) to (9), comprising a vibration damping section for suppressing vibration of a portion of the base body.

(11) A vibrating fluid device as described in (10) that includes a vibration-damping connection part for connecting the base and the vibration-damping part, and the area where the vibration-damping connection part faces the base or the area where the vibration-damping connection part faces the vibration-damping part is smaller than the area where the base and the vibration-damping part face each other.

(12) A vibrating fluid device as described in (11), in which the vibration-damping connection part is formed from a material having the same thermal expansion coefficient as the material of the vibration-damping part.

(13) A vibrating fluid device as described in (10) that is provided with a viewing section for viewing the flow path, and the vibration damping section is disposed on the opposite side of the piezoelectric element to the viewing section.

(14) A vibrating fluid device according to any one of (1) to (9), in which the piezoelectric element is configured to vibrate so as to bend the substrate.

(15) A vibrating fluid device according to any one of (1) to (9), in which the piezoelectric element is configured to vibrate in a bending manner.

(16) A vibrating fluid device as described in (1), comprising a plurality of piezoelectric elements, the plurality of piezoelectric elements including a first piezoelectric element and a second piezoelectric element, the flow path having a midpoint, and the first piezoelectric element and the second piezoelectric element being disposed on either side of the midpoint.

(17) A vibrating fluid device as described in (16), in which the number of first piezoelectric elements and the number of second piezoelectric elements are each one.

(18) A vibrating fluid device as described in (6), in which the vibration surface of the piezoelectric element is approximately parallel to the surface of the plate-shaped substrate.

We will now explain in more detail the vibrating fluid device of the present invention by showing specific manufacturing examples and test results.

Example 1
In the vibrating fluid device 1 of the first embodiment shown in Fig. 1, the base body 11 was formed of quartz glass with a length of 80 mm, a width of 27 mm, and a thickness of 1.2 mm. The piezoelectric element 21 used was a piezoelectric ceramic with a metal plate bonded thereto, which is generally used for piezoelectric buzzers. The piezoelectric ceramic had an outer diameter of φ20 mm, a thickness of 0.24 mm, and was polarized in the thickness direction. Two metal plates were bonded together, and each of the two metal plates was made of brass, had an outer diameter of φ27 mm, and a thickness of 0.3 mm. The same piezoelectric element was used in the following examples.

The brass connector 31 used had a thickness of 1 mm. The connector 31 was positioned so that the distance from the connector center to the tip 111a of the vibration region 111 of the base 11 (width of the vibration region) was 32.5 mm, and the distance from the connector center to the tip 112a of the damping region 112 of the base 11 (width of the damping region) was 47.5 mm.

The outer diameter of the connector 31 was changed, and the displacement (relative displacement) of the tip 112a of the damping region 112 and the vibration displacement diagram (displacement diagram by finite element method FEM analysis) were investigated when the displacement of the tip 111a of the vibration region 111 was set to 1. The results are shown in Figures 21 and 22. Note that when the piezoelectric element area Sp = (13.5 x 13.5 x π) ^mm2 and the outer diameter of the connector is 2 mm, the connector area Sc = (1 x 1 x π) ^mm2. , the connection area ratio Sc/Sp (%) of the connection body area Sc to the piezoelectric element area Sp is (1×1×π)/(13.5×13.5×π)×100=0.55%, when the outer diameter of the connection body is 8 mm, the connection area ratio Sc/Sp (%) is (4×4×π)/(13.5×13.5×π)×100=8.78%, when the outer diameter of the connection body is 12 mm, the connection area ratio Sc/Sp (%) is (6×6×π) When the outer diameter of the connector is 20 mm, the connection area ratio Sc/Sp (%) is (10×10×π)/(13.5×13.5×π)×100=54.87%, and when the outer diameter of the connector is 27 mm, the connection area ratio Sc/Sp (%) is (13.5×13.5×π)/(13.5×13.5×π)×100=100.00%.

As shown in Figures 21 and 22, when the connected area ratio (Sc/Sp) (%), which is the ratio of the piezoelectric element area Sp surrounded by the outer shape Lp of the piezoelectric element 21 to the connected body area Sc surrounded by the outer shape Lc of the connected body 31, is 50% or less, the relative displacement amount decreases as the connected body area Sc to the piezoelectric element area Sp becomes smaller. When the connected body area Sc to the piezoelectric element area Sp is 20% or less, the relative displacement amount is 0.1 or less. When the connected body area Sc to the piezoelectric element area Sp is 10% or less, the relative displacement amount becomes even lower.

The smaller the relative displacement, the greater the displacement of the vibration region and the smaller the displacement of the damping region. Therefore, the ratio of the connecting body area Sc to the piezoelectric element area Sp is 50% or less, preferably 20% or less, and more preferably 10% or less.

In this specification, in the FEM analysis, the entire periphery of the analysis model is treated as a free end condition. No constraint conditions are included. Therefore, the areas where vibration is stationary are not due to constraints, and this shows that with such an appropriate configuration, a stationary region can be created even in a state of free vibration.

Example 2
In the vibrating fluid device 2 of the second embodiment shown in FIG. 4, the base 12 was made of quartz glass with a length of 80 mm, a width of 27 mm, and a thickness of 1.2 mm. The piezoelectric element 22 was the same as the piezoelectric element 11 of Example 1. The brass connector 32 had a diameter of 2 mm and a thickness of 1 mm. The distance from the connection center of the connector 32 to the tip 121a of the vibration region 121 of the base 12 was 32.5 mm, and the distance from the connection center of the connector 32 to the tip 122a of the damping region 122 of the base 12 was 47.5 mm. The connection area ratio (Sc/Sp)% as the ratio of the connector area Sc to the piezoelectric element area Sp was (1×1×π)/(13.5×13.5×π)×100=0.55%. A vibration displacement diagram (displacement diagram by finite element method FEM analysis) of the vibrating fluid device 2 is shown in FIG. 23.

As shown in Figure 23, the vibration displacement was greatest at the junction 423 of the flow path 42.

Example 3A
In the vibration fluid device 3A of the third embodiment shown in FIG. 5, the base 13 was formed of a quartz glass tube having a length of 80 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric element 23 was the same as the piezoelectric element 11 of the first embodiment. The connecting body 32 was made of brass, had an outer diameter of φ2 mm, and a thickness (length from the outer surface of the base 13 to the piezoelectric element 23) of 0.5 mm. The distance from the connecting center of the connecting body 33 to the tip 131a of the vibration region 131 of the base 13 was 32.5 mm, and the distance from the connecting center of the connecting body 33 to the tip 132a of the damping region 132 of the base 13 was 47.5 mm. The connecting area ratio (Sc/Sp)% was (1×1×π)/(13.5×13.5×π)×100=0.55%. An AC voltage of 2220 Hz was applied to the piezoelectric element 23. FIG. 24 shows a vibration displacement diagram (a displacement diagram based on finite element method FEM analysis) of the vibrating fluid device 3A.

As shown in FIG. 24, by applying an AC electric field to the piezoelectric element 23, a large vibration displacement can be excited in the vertical direction at one end of the tube, making the side where this end is located a vibration region 131, while at the other end of the tube the vibration displacement is suppressed, making the side where this end is located a damping region 132.

Example 3B
In the vibrating fluid device 3B of the third embodiment shown in FIG. 6, the base 13 was formed of a quartz glass tube having a length of 100 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric elements 231 and 232 were both the same as the piezoelectric element 11 of the first embodiment. The connectors 331 and 332 were both made of brass, had an outer diameter of φ2 mm, and a thickness (length from the outer surface of the base 13 to the piezoelectric element 231 or the piezoelectric element 232) of 0.5 mm. The distance from the connection center of the first connector 331 to the tip 131a of the vibration region 131 of the base 13 was 32.5 mm, and the distance from the connection center of the first connector 331 to the tip 132a of the damping region 132 of the base 13 was 47.5 mm. The interval (pitch) between the first piezoelectric element 231 and the second piezoelectric element 232, i.e., the distance between the connection center of the first connecting body 331 and the connection center of the second connecting body 332, was 28 mm. The connection area ratio (Sc/Sp)% was (1×1×π)/(13.5×13.5×π)×100=0.55%. An AC electric field was applied to each of the piezoelectric elements 231 and 232. A vibration displacement diagram (displacement diagram by finite element method FEM analysis) of the vibrating fluid device 3A is shown in FIG. 25.

As shown in Figure 25 (A), a resonance analysis was performed when an AC electric field was applied to the first piezoelectric element 231 (no electric field was applied to the second piezoelectric element 232). A large vibration displacement could be excited in the vertical direction at one end of the tube, and the side where this end was located could be made into a vibration region 131, while the vibration displacement was suppressed at the other end of the tube, and the side where this end was located could be made into a damping region 132. End 131a of vibration region 131 has a resonance frequency of this vibration mode at 2193 Hz.

As shown in Figure 25 (B), a resonance analysis was performed when an AC electric field was applied to the second piezoelectric element 232 (no electric field was applied to the first piezoelectric element 231). A large vibration displacement could be excited in the vertical direction at one end of the tube, and the side where this end was located could be made into a vibration region 131, while the vibration displacement was suppressed at the other end of the tube, and the side where this end was located could be made into a damping region 132. End 131a of vibration region 131 has a resonance frequency of this vibration mode at 2260 Hz.

When a phase difference of approximately 90° is provided between the first piezoelectric element 231 and the second piezoelectric element 232, and an AC signal of approximately 2227 Hz, which is the intermediate frequency between the resonant frequencies of the two, is applied, a rotational motion occurs at the end 131a of the vibration region 131 of the tube of the base 13. (In the case of a phase difference of approximately -90°, reverse rotation occurs.) In this way, the vibration displacement is large, and the fluid is oscillated and stirred within the flow path 43 of the vibration region 131 where the rotational motion occurs. The vibration displacement is small at the other end, the end 132a of the damping region 132, so this end 132a can be used as a holding part for the base 13.

Example 3C
In the vibrating fluid device 3C of the third embodiment shown in FIG. 7, the base 13 was formed of a quartz glass tube having a length of 150 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric elements 231 and 232 were both the same as the piezoelectric element 11 of the first embodiment. The connectors 331 and 332 were both made of brass, had an outer diameter of φ2 mm, and a thickness (length from the outer surface of the base 13 to the piezoelectric element 231 or the piezoelectric element 232) of 0.5 mm. The distance from the connection center of the first connector 331 to the tip 131a of the vibration region 131 of the base 13 was 42.5 mm, and the distance from the connection center of the first connector 331 to the tip 132a of the damping region 132 of the base 13 was 107.5 mm. The interval (pitch) between the first piezoelectric element 231 and the second piezoelectric element 232, i.e., the distance between the connection center of the first connecting body 331 and the connection center of the second connecting body 332, was 65 mm. The connection area ratio (Sc/Sp)% was (1×1×π)/(13.5×13.5×π)×100=0.55%. An AC electric field was applied to each of the piezoelectric elements 231 and 232. A vibration displacement diagram (displacement diagram by finite element method FEM analysis) of the vibrating fluid device 3A is shown in FIG. 26.

As shown in FIG. 26(A), by applying an AC electric field to the first piezoelectric element 231 (at this time, no electric field is applied to the second piezoelectric element 232), when viewed from the direction indicated by the arrow X in FIG. 26(A), the center of the base 13 vibrates so as to be displaced alternately diagonally downward to the left and upward to the right. It is believed that the reason that the vibration does not occur simply in the up and down direction is due to the influence of the second piezoelectric element 232. Meanwhile, the displacement at both ends of the base 13 is small. A large vibration displacement in the up and down direction can be excited in the center of the base 13, and the center can be made into a vibration region 131, while the vibration displacement is suppressed at the ends of the tube, and the ends can be made into damping regions 132. The end 131a of the vibration region 131 has a resonant frequency of this vibration mode at 3163 Hz.

As shown in FIG. 26(B), by applying an AC electric field to the second piezoelectric element 232 (at this time, no electric field is applied to the first piezoelectric element 231), the center of the base 13 vibrates so as to be displaced alternately diagonally downward to the right and upward to the left from the direction indicated by the arrow X in FIG. 26(B). It is believed that the influence of the first piezoelectric element 231 is the reason why the vibration does not occur simply in the horizontal direction. On the other hand, the displacement at both ends of the base 13 is small. A large vibration displacement in the vertical direction can be excited in the center of the base 13, and the center can be made into a vibration region 131, while the vibration displacement is suppressed at the ends of the tube, and the ends can be made into damping regions 132. The end 131a of the vibration region 131 has a resonant frequency of this vibration mode at 3143 Hz.

When a phase difference of approximately 90° is provided between the first piezoelectric element 231 and the second piezoelectric element 232, and an AC signal of approximately 3153 Hz, which is the intermediate frequency between the resonant frequencies of the two, is applied, a rotational motion occurs in the vibration region 131 of the tube of the base 13. (In the case of a phase difference of approximately -90°, reverse rotation occurs.) In this way, the vibration displacement is large, and the fluid is oscillated and stirred within the flow path 43 of the vibration region 131 where the rotational motion occurs. Since the vibration displacement is small at the end 132a of the damping region 132, the end 132a can be used as a holding portion of the base 13.

Example 4A
In the vibration fluid device 4A of the 4A embodiment shown in FIG. 8, the base 14 was formed of a quartz glass tube having a length of 80 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric element 24 was the same as the piezoelectric element 11 of Example 1. The connector 34 was made of brass, had an outer diameter of φ2 mm, and a thickness (length from the outer surface of the base 14 to the piezoelectric element 24) of 0.5 mm. The distance from the connection center of the connector 34 to the tip 141a of the vibration region 141 of the base 14 was 32.5 mm, and the distance from the connection center of the connector 34 to the tip 142a of the damping region 142 of the base 14 was 47.5 mm. The stirrer 54a was made of quartz glass and formed into a rod (cylindrical) having a length of 10 mm and a diameter of 1 mm. The connection area ratio (Sc/Sp) % was (1×1×π)/(13.5×13.5×π)×100=0.55%.

Example 4B
In the vibration fluid device 4B of the fourth embodiment shown in FIG. 10, the base 14 was formed of a quartz glass tube having a length of 80 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric element 24 was the same as the piezoelectric element 11 of the first embodiment. The connector 34 was made of brass, had an outer diameter of φ2 mm, and a thickness (length from the outer surface of the base 14 to the piezoelectric element 24) of 0.5 mm. The distance from the connection center of the connector 34 to the tip 141a of the vibration region 141 of the base 14 was 32.5 mm, and the distance from the connection center of the connector 34 to the tip 142a of the damping region 142 of the base 14 was 47.5 mm. The stirrer 54a was made of quartz glass and formed into a sphere with a diameter of 1 mm. The connection area ratio (Sc/Sp)% was (1×1×π)/(13.5×13.5×π)×100=0.55%.

Example 5
In the vibrating fluid device 5 of the fifth embodiment shown in FIG. 11, the base 15 was formed of quartz glass with a length of 80 mm, a width of 27 mm, and a thickness of 1.2 mm. The piezoelectric element 25 was the same as the piezoelectric element 11 of Example 1. The brass connector 35 had a diameter of 2 mm and a thickness of 1 mm. The distance from the connection center of the connector 35 to the tip 151a of the vibration region 151 of the base 15 was 32.5 mm, and the distance from the connection center of the connector 32 to the tip 152a of the damping region 152 of the base 15 was 47.5 mm. The stirrer 55 was made of quartz glass and formed into a rod (cylindrical) with a length of 15 mm and a diameter of 0.5 mm. The weight 65 was made of brass and had a length of 40 mm, a width of 10 mm, and a thickness of 5 mm. The connection area ratio (Sc/Sp) % was (1×1×π)/(13.5×13.5×π)×100=0.55%.

Example 6A
In the vibrating fluid device 6A of the 6A embodiment shown in FIG. 12, the base 16 was formed of a quartz glass tube having a length of 80 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric element 26 was the same as the piezoelectric element 11 of Example 1. The connecting body 36 was made of brass, had an outer diameter of φ2 mm, and a thickness (length from the outer surface of the base 16 to the piezoelectric element 26) of 0.5 mm. The distance from the connecting center of the connecting body 36 to the tip 161a of the vibration region 161 of the base 16 was 32.5 mm, and the distance from the connecting center of the connecting body 36 to the tip 162a of the damping region 162 of the base 16 was 47.5 mm. The stirrer 56 was made of quartz glass and formed into a sphere with a diameter of 1 mm. The weight 66 was made of brass, had a length of 10 mm, an outer diameter of 16 mm, and an inner diameter of 2.8 mm. The connection area ratio (Sc/Sp) % was (1×1×π)/(13.5×13.5×π)×100=0.55%.

Example 6B
In the vibrating fluid device 6B of the 6B embodiment shown in FIG. 13, the base 16 was formed of a quartz glass tube having a length of 100 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric elements 261 and 262 were both the same as the piezoelectric element 11 of Example 1. The connectors 361 and 362 were both made of brass, had an outer diameter of φ2 mm, and a thickness (length from the outer surface of the base 16 to the piezoelectric element 261 or the piezoelectric element 262) of 0.5 mm. The distance from the connection center of the first connector 361 to the tip 131a of the vibration region 161 of the base 16 was 32.5 mm, and the distance from the connection center of the first connector 361 to the tip 162a of the damping region 162 of the base 16 was 47.5 mm. The interval (pitch) between the first piezoelectric element 261 and the second piezoelectric element 262, i.e., the distance between the connection center of the first connecting body 361 and the connection center of the second connecting body 362, was 28 mm. The stirrer 56 was made of quartz glass and formed into a sphere with a diameter of 1 mm. The weight 66 was made of brass and had a length of 10 mm, an outer diameter of 16 mm, and an inner diameter of 2.8 mm. The connection area ratio (Sc/Sp)% was (1×1×π)/(13.5×13.5×π)×100=0.55%.

Example 6C
In the vibrating fluid device 6C of the 6C embodiment shown in FIG. 14, the base 16 was formed of a quartz glass tube having a length of 150 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric elements 261 and 262 were both the same as the piezoelectric element 11 of Example 1. The connectors 361 and 362 were both made of brass, had an outer diameter of φ2 mm, and a thickness (length from the outer surface of the base 16 to the piezoelectric element 261 or the piezoelectric element 262) of 0.5 mm. The distance from the connection center of the first connector 361 to the tip 161a of the vibration region 161 of the base 16 was 42.5 mm, and the distance from the connection center of the first connector 361 to the tip 162a of the damping region 162 of the base 16 was 107.5 mm. The interval (pitch) between the first piezoelectric element 261 and the second piezoelectric element 262, i.e., the distance between the connection center of the first connecting body 361 and the connection center of the second connecting body 362, was 65 mm. The stirrer 56 was made of quartz glass and formed into a sphere with a diameter of 1 mm. The weights 661 and 662 were both made of brass and had a length of 10 mm, an outer diameter of 16 mm, and an inner diameter of 2.8 mm. The connection area ratio (Sc/Sp)% was (1×1×π)/(13.5×13.5×π)×100=0.55%.

Example 6D
In the vibrating fluid device 6D of the sixth embodiment shown in Fig. 15, the base body 16 was formed of a quartz glass tube having a length of 160 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric elements 261 and 262 were both the same as the piezoelectric element 11 of the first embodiment. The connectors 361 and 362 were both brass ring-shaped, with an outer diameter of φ3.8 mm, an inner diameter of 2.8 mm, and a width of 2 mm, and an epoxy resin adhesive was interposed between the rings (connectors 361 and 362) and the piezoelectric elements 261 and 262. The distance from the outer surface of the base body 16 to the piezoelectric element 261 or 262 was 0.5 mm. The distance from the connection center of the first connecting body 361 to the tip 161a of the vibration region 161 of the base 16 was 47.5 mm, and the distance from the connection center of the first connecting body 361 to the tip 162a of the damping region 162 of the base 16 was 112.5 mm. The interval (pitch) between the first piezoelectric element 261 and the second piezoelectric element 262, that is, the distance between the connection center of the first connecting body 361 and the connection center of the second connecting body 362, was 65 mm. The stirrer 55 was made of quartz glass and formed into a rod (cylindrical) shape with a length of 10 mm and a diameter of 1 mm. The weights 661 and 662 were both made of brass and had a length of 10 mm, an outer diameter of 16 mm, and an inner diameter of 2.8 mm. In the ring-shaped connecting bodies 361 and 362, the surfaces (surfaces on which adhesive is applied) adjacent to and facing the piezoelectric elements 261 and 262 are rectangular with a length of 2.8 mm and a width of 2 mm. Therefore, the connecting area ratio (Sc/Sp)% was (2.8×2)/(13.5×13.5×π)×100=0.98%.

Example 7
In the seventh embodiment of the vibrating fluid device 7 shown in FIG. 16, the base 17 was made of quartz glass with a length of 60 mm, a width of 120 mm, and a thickness of 1.2 mm. The cross section of the flow path 47 was square, and the inner dimensions of the flow path 47 were 0.8 mm x 0.8 mm. The same piezoelectric element 27 as the piezoelectric element 11 of Example 1 was used. The brass connector 37 had a diameter of φ2 mm and a thickness of 1 mm. The distance from the connection center of the connector 37 to one end 172a of the base 17 was 35 mm, and the distance from the connection center of the connector 37 to the other end 172b of the base 17 was 85 mm. The stirrer 57 was made of quartz glass and formed into a rod (cylindrical) with a length of 10 mm and a diameter of 0.7 mm. The weight 67 was made of brass, with an outer frame dimension of 100 mm x 70 mm, an inner window dimension of 80 mm x 50 mm, and a thickness of 5 mm. The connection area ratio (Sc/Sp) % was (1×1×π)/(13.5×13.5×π)×100=0.55%. A vibration displacement diagram (displacement diagram by finite element method FEM analysis) of the vibrating fluid device 7 is shown in FIG.

As shown in FIG. 27, the center of the base 17, i.e., the position where the junction 473 of the flow path 47 is formed, was able to be the area with the largest vibration displacement.

Example 8
In the vibrating fluid device 8 of the eighth embodiment shown in FIG. 17, the base 18 was formed of a quartz glass tube having a length of 150 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric elements 281 and 282 were both the same as the piezoelectric element 11 of the first embodiment. The connectors 381 and 382 were both cylindrical and made of brass, with an outer diameter of φ3 mm and a thickness of about 3 mm. The distance from the connection center of the first connector 381 to the inlet 481 of the base 18 (one end of the base 18) was 42.5 mm, and the distance from the connection center of the second connector 382 to the outlet 482 of the base 18 (the other end of the base 18) was 42.5 mm. The interval (pitch) between the first piezoelectric element 281 and the second piezoelectric element 282, i.e., the distance between the connection center of the first connector 381 and the connection center of the second connector 382, was 65 mm. The weights 681, 682 were both made of brass and had a length of 30 mm, a width of 10 mm, and a thickness of 10 mm. The vibration-damping connectors 881, 882 were cylindrical and made of brass, with a diameter of 3 mm and a thickness of about 3 mm. Therefore, the area of each of the vibration-damping connectors 881, 882 facing the base 18 and the area of each of the vibration-damping connectors 881, 882 facing the weights 681, 682 were both smaller than the area of each of the base 18 facing the weights 681, 682. In the connectors 381, 382, the surfaces adjacent to the piezoelectric elements 281, 282 and facing the piezoelectric elements 281, 282 (the surfaces on which adhesive was applied) were circular and had a diameter of 3 mm. Therefore, the connection area ratio (Sc/Sp) % was (1.5×1.5×π)/(13.5×13.5×π)×100=1.2%. A vibration displacement diagram (displacement diagram by finite element method FEM analysis) of the vibrating fluid device 8 is shown in FIG.

As shown in Figure 28, the center of the base 18 was able to be the area with the greatest vibration displacement.

<Example 9>
In the vibrating fluid device 9 of the ninth embodiment shown in FIG. 20, the base 19 was formed of quartz glass having a length of 90 mm, a width of 20 mm, and a thickness of 1.4 mm. The cross section of the flow path 49 was square, and the inner dimensions of the flow path 49 were 0.2 mm x 0.08 mm. The piezoelectric elements 291 and 292 were the same as the piezoelectric element 11 of the first embodiment. The brass connectors 391 and 392 had a diameter of φ3 mm and a thickness of 3 mm. The distance from the connection center of the connector 391 to each of the inlets 491a and 491b was about 13.5 mm, and the distance from the connection center of the connector 392 to the outlet 492 was about 12.5 mm. In addition, the distance from the junction 493 to each of the inlets 491a and 491b was about 29.0 mm, and the distance from the junction 493 to the outlet 492 was about 49.0 mm. The weights 691, 692 were made of brass and had a length of 30 mm, a width of 10 mm, and a thickness of 10 mm. The vibration-damping connectors 891, 892 were cylindrical and made of brass, with a diameter of 3 mm and a thickness of about 6 mm. Therefore, the area of the vibration-damping connectors 891, 892 facing the base 19 and the area of the vibration-damping connectors 891, 892 facing the weights 691, 692 were both smaller than the area of the base 19 facing the weights 691, 692. The connector area ratio (Sc/Sp)% was (1.5×1.5×π)/(13.5×13.5×π)×100=1.2%. A vibration displacement diagram (displacement diagram by finite element method FEM analysis) of the vibration fluid device 9 is shown in FIG. 29.

As shown in FIG. 29, the central part of the base 19, i.e., the position where the junction 493 of the flow path 49 is formed, was able to be the area with the largest vibration displacement.

The above-disclosed embodiments and examples should be considered to be illustrative and not restrictive in all respects. The scope of the present invention is indicated by the claims, not by the above description, and includes all modifications within the meaning and scope of the claims.

1, 2, 3A, 3B, 3C, 4A, 4B, 5, 6A, 6B, 6C, 6D, 7, 8, 9: Vibrating fluid device 11, 12, 13, 14, 15, 16, 17, 18, 19: Base 21, 22, 23, 231, 232, 24, 25, 26, 261, 262, 27, 281, 282, 29: Piezoelectric element 31, 32, 33, 331, 332, 34, 35, 36, 361, 362, 37, 381, 382, 39: Connector 41, 42, 43, 44, 45, 46, 47, 48, 49: Flow path 54a, 54b, 55, 56, 57: Stirrer 65, 66, 67, 681, 682, 691, 692: Weight 76: Flow stopper 881, 882, 891, 892: Vibration damping connection

Claims (18)

A substrate;
A piezoelectric element that vibrates the base body;
a connector for attaching the piezoelectric element to the base,
A vibrating fluid device in which a connecting area ratio (Sc/Sp) (%) is the ratio of a piezoelectric area Sp, which is the area of the surface of the piezoelectric element adjacent to the connecting body and facing the connecting body, to a connecting body area Sc, which is the area of the surface of the connecting body adjacent to the piezoelectric element and facing the piezoelectric element, is 50% or less. The vibrating fluid device of claim 1, wherein the connection area ratio is 20% or less. The vibrating fluid device of claim 1, wherein the connection area ratio is 10% or less. The vibrating fluid device according to claim 1, in which a flow path is formed inside the base. The vibrating fluid device according to claim 4, wherein the inner wall of the flow path has a protrusion that protrudes into the flow path. The vibrating fluid device according to claim 4, wherein the substrate is flat. The vibrating fluid device of claim 4, comprising a stirrer housed within the flow path. The vibrating fluid device according to claim 7, wherein the cross section of the stirrer housed in the flow path perpendicular to the flow path occupies the center of the cross section of the flow path perpendicular to the flow path. The vibrating fluid device according to claim 7, wherein the flow path has a flow stopper portion downstream of the stirrer in the direction of fluid flow, the flow stopper portion having an inner diameter smaller than the maximum diameter of the stirrer. The vibrating fluid device according to any one of claims 1 to 9, comprising a vibration damping part for suppressing vibration of a part of the base body. a vibration-damping connecting portion for connecting the base body and the vibration-damping portion,
11. The vibrating fluid device according to claim 10, wherein an area over which the vibration-damping connecting portion and the base face each other, or an area over which the vibration-damping connecting portion and the vibration-damping portion face each other, is smaller than an area over which the base and the vibration-damping portion face each other. The vibrating fluid device according to claim 11, wherein the vibration-damping connection portion is formed from a material having the same thermal expansion coefficient as the material of the vibration-damping portion. A visual inspection section is provided for visually inspecting the flow path,
The vibrating fluid device according to claim 10 , wherein the vibration suppressing portion is disposed on an opposite side of the piezoelectric element from the visual confirmation portion. The vibrating fluid device according to any one of claims 1 to 9, wherein the piezoelectric element is configured to vibrate so as to bend the base body. The vibrating fluid device according to any one of claims 1 to 9, wherein the piezoelectric element is configured to vibrate in a bending manner. A plurality of the piezoelectric elements are provided,
the plurality of piezoelectric elements include a first piezoelectric element and a second piezoelectric element;
the flow path has a midpoint;
The vibrating fluid device according to claim 1 , wherein the first piezoelectric element and the second piezoelectric element are disposed on opposite sides of the midpoint. The vibrating fluid device according to claim 16, wherein the number of the first piezoelectric elements and the number of the second piezoelectric elements are each one. 7. The vibrating channel device according to claim 6, wherein the vibration surface of said piezoelectric element is approximately parallel to the surface of said plate-like base body.